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SEMI E52-0703 © SEMI 1995, 2003 26 Code Gas Name Symbol Formula Synonym Ref 37 Cyanogen Ch loride ClCN ClCN 1 77 Chlorine Trif luoride ClF3 ClF 3 1 202 Chlorine Pentaf luoride ClF5 ClF 5 2 201 Chlorine Dioxid e ClO2 ClO …

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SEMI E52-0703 © SEMI 1995, 2003 25
Code Gas Name Symbol Formula Synonym Ref
320 Triallylamine C9H15N C
9
H
15
N 2
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
200 Carbon Tetrabromide CBr4 CBr
4
2
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
80 Bromotrifluoromethane CBrF3 BrCF
3
F-13B1, R-13B1 1
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
91 Trichlorofluoromethane CCl3F CCl
3
F F-11, R-11 1
101 Carbon Tetrachloride CCl4 CCl
4
Tetrachloromethane or Methane,
Tetrachloro
2
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
46 Carbonyl Fluoride CF2O CF
2
O 1
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
321 Trifluoromethylhypofluorite CF4O CF
4
O CF3OF; Hypofluorous acid;
trifuoromethyl ester
2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
265 Dichloromethane CH2Cl2 CH
2
Cl
2
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
235 Nitromethane CH3NO2 CH
3
NO
2
2
28 Methane CH4 CH
4
1
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
47 Methyl Mercaptan CH4S CH
3
SH 1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
83 Tribromomethane CHBr3 CHBr
3
2
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
19 Chlorine Cl2 Cl
2
1
SEMI E52-0703 © SEMI 1995, 2003 26
Code Gas Name Symbol Formula Synonym Ref
37 Cyanogen Chloride ClCN ClCN 1
77 Chlorine Trifluoride ClF3 ClF
3
1
202 Chlorine Pentafluoride ClF5 ClF
5
2
201 Chlorine Dioxide ClO2 ClO
2
2
72 Perchloryl Fluoride ClO3F ClO
3
F 1
9 Carbon Monoxide CO CO 1
25 Carbon Dioxide CO2 CO
2
1
34 Carbonyl Sulfide COS COS 1
40 Carbon Disulfide CS2 CS
2
2
14 Deuterium D2 H
2
2
D2 2
18 Fluorine F2 F
2
1
217 Digermane Ge2H6 Ge
2
H
6
2
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
43 Germane GeH4 GeH
4
1
7 Hydrogen H2 H
2
1
20 Water Vapor H2O H
2
O 2
22 Hydrogen Sulfide H2S H
2
S 1
23 Hydrogen Selenide H2Se H
2
Se 1
171 Sulfuric Acid H2SO4 H
2
SO
4
2
229 Hydrogen telluride H2Te H
2
Te 2
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
1 Helium He He 1
12 Hydrogen Fluoride HF HF 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
329 Mercury Hg Hg UN 2809 2
17 Hydrogen Iodide HI HI 1
269 Hydrazoic Acid HN3 HN
3
1
167 Nitric Acid HNO3 HNO
3
2
115 Iodine Pentafluoride IF5 IF
5
1
5 Krypton Kr Kr 1
124 Molybdenum Hexafluoride MoF6 MoF
6
2
13 Nitrogen N2 N
2
1
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
50 Hydrazine N2H4 H
2
NNH
2
2
27 Nitrous Oxide N2O N
2
O 1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
346 Niobium Pentachloride NbCl5 NbCl
5
3
350 Deuterium Ammonia ND3 ND
3
3
2 Neon Ne Ne 1
232 Difluoroamidogen NF2 NF
2
2
SEMI E52-0703 © SEMI 1995, 2003 27
Code Gas Name Symbol Formula Synonym Ref
53 Nitrogen Trifluoride NF3 NF
3
1
29 Ammonia NH3 NH
3
1
16 Nitric Oxide NO NO 2
26 Nitrogen Dioxide NO2 NO
2
1
141 Nitrosyl Chloride NOCl NOCl 1
15 Oxygen O2 O
2
1
30 Ozone O3 O
3
1
238 Oxygen Dichloride OCl2 OCl
2
2
41 Oxygen Difluoride OF2 OF
2
1
193 Phosphorus Trichloride PCL3 PCl
3
2
62 Phosphorus Trifluoride PF3 PF
3
1
143 Phosphorus Pentafluoride PF5 PF
5
1
31 Phosphine PH3 PH
3
1
102 Phosphorous Oxychloride POCl3 POCl
3
2
243 Rhenium Hexafluoride ReF6 ReF
6
2
3 Radon Rn Rn 2
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
255 Tribromostibine SbBr3 SbBr
3
2
256 Trichlorostibine SbCl3 SbCl
3
2
245 Stibine SbH3 SbH
3
2
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
86 Sulfur Tetrafluoride SF4 SF
4
1
110 Sulfur Hexafluoride SF6 SF
6
1
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
97 Disilane Si2H6 Si
2
H
6
2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
253 Tetrasilane Si4H10 Si
4
H
10
2
108 Silicon Tetrachloride SiCl4 SiCl
4
Tetrachlorosilane 2
244 Deuteriumsilane SiD4 SiH
2
4
2
88 Silicon Tetrafluoride SiF4 SiF
4
1
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
134 Difluorosilane SiH2F2 SiH
2
F
2
10
205 Chlorosilane SiH3Cl SiH
3
Cl 2
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
39 Silane SiH4 SiH
4
1
147 Trichlorosilane SiHCl3 SiHCl
3
5
261 Trifluorosilane SiHF3 SiHF
3
2
145 Tin Tetrachloride SnCl4 SnCl
4
Tetrachlorostannane 2
32 Sulfur Dioxide SO2 SO
2
1
87 Sulfuryl Fluoride SO2F2 SO
2
F
2
1
246 Sulfur Trioxide SO3 SO
3
2
159 Tritium T2 H
3
2
T2 2