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SEMI E112-0305 © SEMI 2001, 2005 8    d63 = 35 + 0.9 / -0.1 Figure 5 Detail B: Top Robotic Handling Flange Hole Feature  1. 5    Figure 6 Detail C: Reticle Seating and Capture Detail

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SEMI E112-0305 © SEMI 2001, 2005 7
RFID PLACEMENT ZONE
Figure 3
External Rear View of MRSP150
Figure 4
Internal Front View of MRSP150
SEMI E112-0305 © SEMI 2001, 2005 8
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
1.5
Figure 6
Detail C: Reticle Seating and Capture Detail
SEMI E112-0305 © SEMI 2001, 2005 9
Figure 7
Section A-A: Door Only Top View of MRSP150
Figure 8
Section B-B: Door Only Top View of MRSP150 with Reticle Contact Surfaces