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SEMI E94-0705 © SEMI 2000, 2005 18 15.2 Table 16 provi d es a checklist for C ontrol Job Mangement (CJM) compliance. Table 16 CJM Compliance Statem ent Fundamental CJM Requirements CJM Se ction Implemented CJM Compliant …

SEMI E94-0705 © SEMI 2000, 2005 17

Table 15 Variable Data Definitions Table

Variable Name Description Type Access Comment

CtrlJobID Control job identifier, available to be used

in control job related event reports.

Text RO

QueuedCJobs This is an ordered list of control jobs

currently in the Queue. The first job in the

list is the job at the head of the Queue.

(list of)

Text

RO Each list item is a control job identifier.

QueueAvailableSpace Indicates number of jobs which the Queue

can accept.

Numeric RO This value cannot be negative. When it

is zero it indicates that the queue is full.

SetUpName Host sets this to define the operational

condition of the equipment.

Text RW If the equipment is manipulated locally,

it should set this variable to

“unknown”, otherwise it returns the

value set by the host (when requested).

14 Additional Requirements

14.1 Serial Execution of Control Jobs

14.1.1 Control jobs are initiated in sequential order by the equipment. The order is based on the queue. A

ControlJob shall not issue a complete event (message) until all substrates have been placed in destination carriers.

However, in many cases equipment must support multiple control jobs running at once; in order to support the

factory requirement for equipment productivity. This will be particularly true for multi-module equipment. The

next ControlJob in the queue shall start as soon as possible after processing has begun for the last ProcessJob in the

previous ControlJob’s processing control specification.

14.2 Parallel Execution of Control Job

14.2.1 Some equipment may be able to support parallel execution of control jobs. The supplier must fully

document this behavior and any additional services needed to manage it.

14.3 Modifying Control Jobs

14.3.1 Control jobs shall be modifiable if and only if they are not in either the EXECUTING or COMPLETED

states. Jobs shall be modified by using OSS to change their attributes. Modifications shall be rejected if the

equipment is in the wrong state or requested value changes are out of range.

14.4 Set-up, Pre- and Post-Conditioning

14.4.1 Whenever equipment has completed some processing work, with or without material, the equip-ment can be

considered to be “set-up” for a certain process capability. Information about the equipment’s set-up is important to

the factory in determining the best material routing. The SetupName variable defined in this standard is set by the

host after host directed processing or changes to equipment constants. If the equipment is used for processing while

off-line or not under host command, the value of the variable shall be set to “unknown”. It shall also be set to

“unknown” immediately after any changes to equipment constants.

14.5 Event Relationships

14.5.1 This section is reserved for specification of the relationship between process job events and control job

events.

14.5.2 PRJob Paused

14.5.3 PRJob Aborted or Stopped

15 Compliance

15.1 Implementations compliant to this standard shall implement all the messages as specified in §12. All

mandatory parameters must be supported. The supplier shall document support for any of the optional parameters.

Any additional parameters and messages shall be fully documented by the supplier. Additional messages shall be

used to support additional functionality and not as a replacement for any of messages specified herein.

SEMI E94-0705 © SEMI 2000, 2005 18

15.2 Table 16 provides a checklist for Control Job Mangement (CJM) compliance.

Table 16 CJM Compliance Statement

Fundamental CJM Requirements CJM Section Implemented CJM Compliant

Control Job Object 8  Yes  No  Yes  No

Control Job State Model 9  Yes  No  Yes  No

Control Job Queue Model 10  Yes  No  Yes  No

Carrier Properties 11  Yes  No  Yes  No

Service Message Implementation 12  Yes  No  Yes  No

Variable Data 13  Yes  No  Yes  No

Events 7.3.2  Yes  No  Yes  No

Additional Requirements 14  Yes  No  Yes  No

Additional CJM Capabilities CJM Section Implemented CJM Compliant

none

SEMI E94-0705 © SEMI 2000, 2005 19

RELATED INFORMATION 1

APPLICATION NOTES

NOTICE: The material contained in these Applications Notes is not an official part of SEMI E94 and is not

intended to modify or supersede the official standard. Rather, these notes are auxiliary information describing

possible methods for implementing the protocol described by the standard and are included as reference material.

The standard should be referred to in all cases. SEMI makes no warranties or representations as to the suitability of

the material set forth herein for any particular application. The determination of the suitability of the material is

solely the responsibility of the user.

Service messages are presented with a “C” language style of application interface. For illustrative purposes values

for variables may be included using the “=” in the argument list. If not used the optional arguments are not shown.

Service names (e.g., PRJob) are prefixed to function name. The scenarios assume processing is for wafers. The

services used in these scenarios are PRJob for Processing Management, ControlJob for Control Job Management,

and CMS for Carrier Management Services.

R1-1 ControlJob for a Batch Processing Tool

R1-1.1 Tool processes the contents of a single carrier as a batch. This example demonstrates the simplicity of using

control jobs for a simple situation. Wafer order is maintained, and material is returned to the source carrier.

# Comment Dir Message CJS PJS

1 Create the process job. H->E PRJobCreateEnh (PRJobID=prj01_04,

Mtrl = CS001, RecID=ILD3)

No state No state

2 H<-E PRJobCreateAck (PRJobID,

PRJobStatus)

In POOL

3 Request a control job.

Material out specification

maintains wafer order from

source carrier to destination

carrier.

H->E ControlJobCreate (CtrlJobID=cjf01_01,

ProcessingCtrlSpec= (prj01_04, null,null

), MtrlOutSpec=(CSA01,null,null),

MaterialIn= CS001, StartMethod=AUTO)

4 Request accepted. H<-E ControlJobCreateAck

(CtrlJobID=cjf01_01, JobStatus)

QUEUED

5 No CJ in selected state so the

newly created job

immediately transitions.

H<-E Event (CJSELECTED,

CtrlJobID=cjf01_01)

SELECTED

6 A carrier for the selected

control job arrives.

H<-E Event (CARRIERIDREAD, CID=CS001)

7 The equipment recognizes it

and starts execution of the

ControlJob.

H<-E Event (ControlJobStart, cjf01_01) EXECUTING

8 ControlJob starts the

ProcessJob; begins loading

wafers to the processing boat.

H<-E Event (PRJOBSETUP, prj01_01) ACTIVE/

SETUP

9 Material processing starts

after all material is in the

processing boat.

H<-E Event (PRJOBPROCESSING, prj01_04) ACTIVE/

PROCESSING

10 Equipment begins to return

material to the source carrier

(= destination carrier).

H<-E Event (PROCESSINGCOMPLETE,

PRJob=prj01_04)

ACTIVE/

PROCESSING

COMPLETE

11 Carrier is filled with wafers. H<-E Event (CarrierComplete=CS001)

12 Host wants to get it. H->E Rcommand (CarrierOut=CS001)

13 Equipment indicates carrier

can now be picked up.

H<-E Event (ReadytoUnload,

CarrierID=CS001, PortID)

14 H<-E Event (PRJOBCOMPLETE,

PRJob=prj01_01,)

No state