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SEMI F62-0701 © SEMI 2001 11 Table 1 TC e Readings TC e (% Reading/ ° C) T e2 -T e1 T e3 -T e2 T e4 -T e3 T e5 -T e4 T e5 -T e6 T e6 -T e7 T e7 -T e8 T e8 -T e9 Flow Se tpoint % F.S. 25 50 75 100 0 NOT E 1: Plot as in Fi…

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SEMI F62-0701 © SEMI 2001 10
Figure 8
Transient Gas Temperature Effect
Flow Setpoint (% of
Reading)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
Tg (
O
C)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
-.1
-.05
.05
.1
0
40
35
30
25
20
25%
50%
75%
100%
SEMI F62-0701 © SEMI 200111
Table 1 TC
e
Readings
TC
e
(% Reading/
°
C)
T
e2
-T
e1
T
e3
-T
e2
T
e4
-T
e3
T
e5
-T
e4
T
e5
-T
e6
T
e6
-T
e7
T
e7
-T
e8
T
e8
-T
e9
Flow Setpoint %
F.S.
25
50
75
100
0
NOTE 1: Plot as in Figure 7.
Table 2 TC
g
Readings
Flow Setpoint (%F.S.) TC
g
(% reading/°C)
25 -0.06
50 -0.08
75 -0.09
100 -0.11
0
NOTE 1: Plot as in Figure 5.
SEMI F62-0701 © SEMI 2001 12
Table 3 Data Presentation for 500 sccm MFC
Data Collection
T
e1
Q
a1
T
e2
Q
a2
T
e3
Q
a3
T
e4
Q
a4
T
e5
Q
a5
T
e6
Q
a6
T
e7
Q
a7
T
e8
Q
a8
T
e9
Q
a9
0% S.P.
Q
ind
25% S.P.
Q
ind
T
g
Avg. of 10 readings
50% S.P.
Q
ind
T
g
Avg. of 10 readings
75% S.P.
Q
ind
T
g
Avg. of 10 readings
100% S.P.
Q
ind
T
g
Avg. of 10 readings
Data Presentation
Tc
e
= Q
a
(30)-Q
a
(20) × 100%
T
e
(30)-T
e
(20) Q
s.p.
Tc
e
= 134-122 × 100%
30.1-20.1 (125)
= 0.96% of Reading @ 125 sccm