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SEMI P41-0304 E © SEMI 2004 6 Item Element or attribute Mandatory or Optional Data Type Description ToolOriginPosition_Y Element Mandatory Float Y coordinate value of tool origin position. ToolStageCorrectionInformation …

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SEMI P41-0304
E
© SEMI 2004 5
Table 4 Description of Each Defect Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
Defect Repeatable
Element
Mandatory - Top element of each defect information.
defect_type Attribute Mandatory String Defect type.
date_stamp Attribute Optional String Date classified.
DefectInformation Element Mandatory - Top element of defect information.
origin Attribute Mandatory String Origin point name of this reference position.
DefectPosition Element Mandatory - Element of defect position.
unit Attribute Mandatory String Unit system.
DefectPosition_X Element Mandatory Float X coordinate value of defect position.
DefectPosition_Y Element Mandatory Float Y coordinate value of defect position.
DefectSize Element Mandatory - Element of defect size.
unit Attribute Mandatory String Unit system.
DefectSize_X Element Mandatory Float X size value of defect.
DefectSize_Y Element Mandatory Float Y size value of defect.
DefectJudgment Element Mandatory String Judgment of defect.
ImageData Repetable
Element
Mandatory - Image data of defect. Subsequent structures are
in Table 7.
DefectRepair Repetable
Element
Mandatory - Top element of defect repair.
date_stamp Attribute Optional String Repair processing date.
RepairRecipe Element Mandatory - Element of repair recipe.
recipe_name Attribute Optional String Repair recipe name.
RepairCondition Element Mandatory String Repair conditions.
RepairResult Element Mandatory String Repair results.
ImageData Repetable
Element
Mandatory - Image data of repaired defect. Subsequent
structures are in Table 7.
DefectEvaluate Repetable
Element
Mandatory - Top element of defect evaluation.
date_stamp Attribute Optional String Evaluation processing date.
EvaluateRecipe Element Mandatory - Element of evaluation recipe.
recipe_name Attribute Optional String Evaluation recipe name.
EvaluateCondition Element Mandatory String Evaluation condition.
EvaluateResult Element Mandatory String Evaluation result.
ImageData Repetable
Element
Mandatory - Image data of evaluated defect. Subsequent
structures are in Table 7.
Table 5 Description of Tool Coordinate Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
CoordinateSystem Element Mandatory String Coordinate system of tool.
ToolOriginPointInformation Element Mandatory - Element of origin point information.
ToolOriginPoint Element Mandatory String Tool origin point information.
ToolOriginPosition Element Mandatory - Element of origin position.
unit Attribute Mandatory String Unit system.
ToolOriginPosition_X Element Mandatory Float X coordinate value of tool origin position.
SEMI P41-0304
E
© SEMI 2004 6
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ToolOriginPosition_Y Element Mandatory Float Y coordinate value of tool origin position.
ToolStageCorrectionInformation Element Mandatory - Top element of tool work stage correction
information.
ToolStageCorrection Element Mandatory - Element of correction information.
unit Attribute Mandatory String Unit system.
ToolStageCorrection_X Element Mandatory Float Correction information of X coordinates.
ToolStageCorrection_Y Element Mandatory Float Correction information of Y coordinates.
ToolStageSkew Element Mandatory - Element of skew correction information.
unit Attribute Mandatory String Unit system.
ToolStageSkewCorrection Element Mandatory Float Skew correction information.
MaskOriginPointInformation Element Mandatory - Top element of mask origin position.
MaskOriginPoint Element Mandatory String Mask origin point information.
MaskOriginPosition Element Mandatory - Element of mask origin position.
unit Attribute Mandatory String Unit system.
MaskOriginPosition_X Element Mandatory Float X coordinate value of mask origin position.
MaskOriginPosition_Y Element Mandatory Float Y coordinate value of mask origin position.
ToolOffset Element Mandatory - Element of relative position information on tool
origin and mask origin.
unit Attribute Mandatory String Unit system.
ToolOffset_X Element Mandatory Float X offset value of relative position of tool origin
and mask origin.
ToolOffset_Y Element Mandatory Float Y offset value of relative position of tool origin
and mask origin.
ToolStageAccuracy Element Optional - Tool work stage positioning accuracy
information.
unit Attribute Optional String Unit system.
Table 6 Description of Mask Direction Information Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ReferenceMark Element Mandatory String Information on the reference mark for expressing
direction of mask.
MarkRotation Element Mandatory String Information of rotation direction on mask.
MaskMirror Element Mandatory String Information of mirror direction information on
mask.
MaskFlip Element Mandatory String Information of flip direction information on
mask.
Table 7 Description of Image Data Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImageReferenceAddress Element Optional String Reference address information of image data.
ImageInformation Element Mandatory - Element of image data information.
ImageFormat Element Mandatory String Image data format information.
ImageMagnification Element Mandatory Float Image data magnification information.
ImagePixelNumber_X Element Mandatory Integer Number of pixels in X.
ImagePixelNumber_Y Element Mandatory Integer Number of pixels in Y.
SEMI P41-0304
E
© SEMI 2004 7
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImagePixelSize Element Mandatory - Element of pixel size on image data.
unit Attribute Mandatory String Unit system.
ImagePixelSize_X Element Mandatory Float Size of one pixel in X.
ImagePixelSize_Y Element Mandatory Float Size of one pixel in Y.
ImageGrayLevel Element Mandatory String Gray level information of image data.
ImageIllumination Element Mandatory String Illumination information of image data.
ImageRotation Element Mandatory String Rotation information of image data.
ImageMirror Element Mandatory String Mirrorring information of image data.
ImageFlip Element Mandatory String Flipping information of image data.
ImageConvertInformation Element Optional - Element of image conversion information from
original/raw data.
ImageContrast Element Mandatory String Image contrast information.
ImageBrightness Element Mandatory String Image brightness information.
ImageConversionParameter Element Mandatory String Image conversion parameter information.
ImageReference Element Mandatory - Top element of image origin point. Refer to
Figure 11.
origin Attribute Mandatory String Origin point name of this reference position.
ImageReferencePoint Element Mandatory String Image reference point information.
ImageReferencePosition Element Mandatory - Element of image reference position coordinate
value.
unit Attribute Mandatory String Unit system.
ImageReferencePosition_X Element Mandatory Float X coordinates value of image reference position.
ImageReferencePosition_Y Element Mandatory Float Y coordinates value of image reference position.
ImageTarget Element Mandatory - Element of image target.
origin Attribute Mandatory String Origin point name of this reference position.
ImageTargetPosition Element Mandatory - Element of target position on image data. Refer
to Figure 12.
unit Attribute Mandatory String Unit system.
ImageTargetPosition_X Element Mandatory Float X coordinate value of image target position.
ImageTargetPosition_Y Element Mandatory Float Y coordinate value of image target position.
ExpressionMark Element Mandatory String Expression of target point on image data.
MDML (data_no,date_stamp)
BasicInformation
Element name
Attribute name
Top element
Under element
InspectionResult
+ Defect(defect_type,data_stamp)
Repeatable mark
Figure 1
Explanation of Figures 2–7