semi合集-English.pdf - 第2528页

SEMI E88-1104 E © SEMI 1999, 2004 25 Variable Name Type Description Class Format Comments ZoneCapacity i CV Available capacity (in carriers) of a par ticular zone. SV U2 Example: If a stocker zone can store 100 carriers …

SEMI E88-1104

Variable Name Type Description Class Format Comments

SpecVersion CV Version of SEMI E88 to

which the equipment is

compliant.

SV A[0–20] Example values are:

E88-0999, E88-0301. If the

equipment is not compliant, a

zero length value may be

specified.

StockerCraneID CV The id of the stocker

crane.

DVVAL A[1–64] Generally only used when there

are multiple cranes in a stocker.

StockerUnitID CV Unique identification of

a stocker unit (e.g., port,

crane, transfer agent,

etc.).

DVVAL A[1–64] When applicable, this value

shall be the StockerCraneID,

PortID, etc.

StockerUnitID

CV Unique identification of

a stocker unit (e.g., port,

crane, transfer agent,

etc.).

SV A[1–64] When applicable, this value

shall be the StockerCraneID,

PortID, etc.

StockerUnitInfo CV Information associated

with a particular stocker

unit.

DVVAL L,2

1. <StockerUnitID>

2. <StockerUnitState>

StockerUnitInfo

CV Information associated

with a particular stocker

unit.

SV L,2

1. <StockerUnitID

2. <StockerUnitState

StockerUnitState CV The state of the stocker

unit.

DVVAL U2 The State of the component will

be specific to the stocker

configuration.

StockerUnitState

CV The state of the stocker

unit.

SV U2 The State of the component will

be specific to the stocker

configuration.

TransferCommand CV Information associated

with a particular

TRANSFER command.

DVVAL L,2

1. <CommandInfo>

2. <TransferInfo>

TransferCommand

CV Information associated

with a particular

TRANSFER command.

SV L,n

1. <CommandInfo

2. <TransferInfo

TransferInfo CV Carrier information

associated with a

particular transfer

command.

DVVAL L,3

1. <CarrierID>

2. <CarrierLoc>

3. <Dest>

TransferInfo

CV Carrier information

associated with a

particular transfer

command.

SV L,3

1. <CarrierID

2. <CarrierLoc

3. <Dest

TransferState CV State of Transfer

Command.

SV U2 1. Queued

2. Transferring

3. Paused

4. Canceling

5. Aborting

ZoneCapacity CV Available capacity (in

carriers) of a particular

zone.

DVVAL U2 Example: If a stocker zone can

store 100 carriers and 25 of the

locations are currently occupied,

then the ZoneCapacity is 75.

SEMI E88-1104

Variable Name Type Description Class Format Comments

ZoneCapacity

CV Available capacity (in

carriers) of a particular

zone.

SV U2 Example: If a stocker zone can

store 100 carriers and 25 of the

locations are currently occupied,

then the ZoneCapacity is 75.

ZoneData CV Information associated

with a particular zone.

DVVAL L,2

1. <ZoneName>

2. <ZoneCapacity>

ZoneData

CV Information associated

with a particular zone.

SV L,2

1. <ZoneName

2. <ZoneCapacity

ZoneName CV Alphanumeric name of a

particular zone.

DVVAL A[1–64]

ZoneName

CV Alphanumeric name of a

particular zone.

SV A[1–64]

ZoneSize

CV Size (in carriers) of a

particular zone.

SV U2 The physical size of the zone.

ZoneType

CV Type of the Zone. SV U2 1: Shelf

2: Port

3: Other

11 Alarm List

11.1 Since each model of Stocker SEM equipment differs in configuration, it is not practical to provide an

exhaustive list of all possible alarms. Instead, the Stocker SEM is requiring the two tables provided as described in

SEMI E30 (Section 8.4). Alarm List Table which is intended to provide for equipment configuration specific alarms

and Alarm ID, Alarm Set/Cleared Event Table. Any alarm that is displayed locally at the equipment, if enabled, is

required to be sent to the host. To be compliant, Tables 9 and 10 must be completed by the supplier, documenting

all alarms.

11.2 Alarm List Table

11.2.1 The alarm list table contains examples of alarms that pertain to various configuration aspects of equipment.

These examples are intended to illustrate that alarms pertain to situations in which there exists a potential for

exceeding physical safety limits associated with people, equipment, and material being transported as per the SEMI

E30 definition of an alarm. See SEMI E30 for further reference. The supplier is responsible for supplying

documentation associated with these alarm definitions. Each alarm will have an associated alarm text (ALTX) and

alarm identifier (ALID). Table 9 contains an example of alarm list information that is intended to be augmented

when the Stocker SEM equipment supplier documents their interface. Examples highlighted by (*) are required by

Stocker SEM.

Table 9 Alarm List Table

Danger Affected

Equipment Cfg. Alarm Text ALID

Potential Imminent Operator Equipment Material

Stocker stocker unit error* X X X

handoff error* X X X X

database error* X X

11.3 Alarm ID, Alarm Set/Cleared Event Table

11.3.1 The Alarm ID, Alarm Set/Cleared Event table documents the association of each ALID to a set and cleared

event as required by SEMI E30. See SEMI E30 for further reference. The supplier is responsible for supplying

documentation associated with these alarm definitions. Each alarm will have associated alarm set and cleared

collection event identifiers (CEID

set

and CEID

clear

SEMI E88-1104

Table 10 Alarm ID, Alarm Set/Cleared Event Table

Alarm ID (ALID) Alarm SET Event (CEID

set

) Alarm CLEARED Event (CEID

cleared

)

12 Remote Commands

12.1 The purpose of this section is to identify remote

commands, command parameters, and valid commands

versus states pertinent to the Stocker SEM.

12.2 A. Requirements

 The equipment shall support the SEMI E30

(according to the GEM capabilities required per

Section 13) required remote commands.

 All the remote commands defined by Stocker SEM

are required to be implemented as specified.

 The alphanumeric strings defined by Stocker SEM

for RCMD and CPNAME are required.

 A completed table must be generated where an “X”

is placed in the table for each state that a given

command is valid.

 If additional remote commands are supported then

a “remote commands versus valid states” matrix

must be generated for these additional commands.

 For additional commands, a table must be

generated similar to the remote command

descriptions summary.

12.3 Remote Commands Description

12.3.1 ABORT — This command terminates the

activity of a specific TRANSFER command based on

CommandID while the command is in the ACTIVE

state. This command might not be accepted due to

mechanical issues if the stocker is in a specific con-

dition (e.g., moving a carrier). The exact conditions

surrounding when the ABORT command is not ac-

cepted by the SC must be documented by the Stocker

SEM equipment supplier. If accepted, this command

shall clear any error condition that was generated by the

TRANSFER command being aborted. For example, if

a ‘DestOccupied’ or ‘SourceEmpty’ error had occurred,

the error shall be cleared.

12.3.2 CANCEL — This command terminates the

activity of a specific TRANSFER command based on

CommandID while the command is in the QUEUED

state. This command must always be accepted by the

SC when in the QUEUED state.

12.3.3 INSTALL — This is used to update the SC

database by adding a specified CarrierID record to a

specified CarrierLoc. If the CarrierID specified by the

Host is already in the SC database then the additional

fields will be updated based on the information

contained in this command.

12.3.4 LOCATE — This command is used by the Host

to query the SC for database carrier information.

12.3.5 PAUSE — This command puts the SC in the

PAUSING state.

12.3.6 REMOVE — This is used to update the SC

database by deleting a specified carrier. This command

would be used for database recovery.

12.3.7 RESUME — This command puts the SC in the

AUTO state.

12.3.8 RETRY (Supplier Option) — This command

may be used by the Host when an error is encountered

by the stocker. The Host would use this command to

allow the stocker to retry the movement which gener-

ated the error condition. This command shall clear the

error condition that is being addressed by the command.

12.3.9 TRANSFER — This is a SECS-II Enhanced

Remote Command instead of a SECS-II Host

Command Send (S2,F49 instead of S2,F41). See the

examples in Section 15.1 for details.

12.3.10 This command is used to perform the entire

transfer command for the carrier to be transferred

between stocker locations. The execution of this com-

mand will include allocation of resources, acquiring the

carrier, moving the carrier to the destination, queuing

the carrier at an alternate destination (if needed),

depositing the carrier, and returning the resources for

other use. The number of carriers in the TRANSFER

command is always equal to one (i.e., the size of the

transfer unit is always equal to one carrier).

12.3.11 INFOUPDATE — This is used to associate

information with a carrier while in the SC database.

This command is an optional feature and is not required

for compliance. If this command is not supported, then

a HCACK of ‘1’ (Command does not exist ) shall be

returned. If the carrier does not exist in the SC

database, then a HCACK of ‘3’ (At least one parameter

is invalid) shall be returned.