semi合集-English.pdf - 第1458页

SEMI 30.1-0200 © SEMI 1998, 2000 33 Parameter Value CPName Desc ription Range Format 1. CPNA ME * 2. CEPVA L* m. L ,2 1. CPNA ME * 2. CEPVA L* NOTES: “PPB UILDID” and “PPNAME” are requ ired. “SLOTLIST”, “SUBS TRATELIST”,…

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SEMI 30.1-0200 © SEMI 1998, 2000 32
Parameter Value
CPName
Description Range Format
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
“PROCESS-BLD-
GROUP” (for Review
Equipment)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
2. SlotID
n
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n. SubstrateID
n
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-ANOMALY-DEF”
2. AnomalyTableName
6. L,2
1. “ANOMALYNAME” or
“M21-ANOMALYNAME”
2. L,n
1. AnomalyID
1
or M21AnomalyID
1
:
n.
7. L,2
1. “ALIGN-TABLE-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST”**
2. L,n
1. ElementID
1
:
n.
10. L,2
m ≥ 2
List of m
data items
SEMI 30.1-0200 © SEMI 1998, 200033
Parameter Value
CPName
Description Range Format
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
NOTE 1: Required ISEM parameters: “CARRIERID”, “LOCATIONID”, “PROCESS-BLD-GROUP”
13.2.3 Remote Commands vs. Processing States — The following table indicates states where the remote
commands are allowed. This is indicated with a “X” mark.
Table 10 Remote Commands vs. Processing States
COMMAND
PROCESSING STATE
STOP
START
RESUME
PP-UPDATE
PP-SELECT
PAUSE
NEXT-
M
ATERIAL
MAP-
CARRIER
PP-ASSIGN
CLEANUP
ABORT
P
P-UNASSIG
N
IDLE XXXX
ABORTED XX X
PROCESSING ACTIVE
STOPPING XX
ABORTING
PAUSE
ALARM PAUSED X X X
PROCESS PAUSE
PAUSING X X X
PAUSED X X X X X
CHECKING X X X
PROCESS
SETTING UP X X XX XX
READY X X X X X X
EXECUTING
LOAD X X X X
UNLOAD X X X X
WORKING
INSPECT X X X X X
ALIGN X XXXX
REVIEW X XXXX
SEMI 30.1-0200 © SEMI 1998, 2000 34
14 Scenarios
14.1 Run Level Reporting Scenario — This scenario only has expected events (i.e., no alarms or errors).
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the
IDLE processing state and in
The ONLINE REMOTE control
state. The host has defined,
linked, and enabled RUN level
report for CEIDs 2, 3, and 5.
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD”
<--S2,F50 Command Acknowledge
The equipment transitions
from IDLE to SETTING UP, and
material arrives at input
port.
<--S6,F11 SETTING UP -> READY (CEID 3)
Event Report Acknowledge S6,F12-->
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Note End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
<--S6,F11 LOAD -> STOPPING (CEID 5)
Event Report Acknowledge S6,F12-->
<--S6,F11 Run Processed Data Valid
event.
Event Report Acknowledge S6,F12-->
The equipment transitions
from STOPPING to IDLE.