semi合集-English.pdf - 第3301页

SEMI E130-1104 © SEMI 2003, 2004 15 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 12 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 A B C DEF Origi nLoca tion = 3 Orie ntati on = 0 Refere nceDe viceX = 5 Refere nceDe viceY = 15 …

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90 deg. 270 deg.
180 deg.
0 deg.
Figure 6
Orientation of the Substrate Notch
18.8 Orientation Attributes
18.8.1 Orientation — Identifies the orientation of the fiducial when defining the coordinate system on a substrate.
This parameter in conjunction with the OriginLocation recipe attribute determines the coordinate and size attributes
of devices on a substrate.
18.8.2 OrientationOnChuck — Identifies the orientation of a substrate loaded on the chuck. This attribute does not
affect the coordinate and size attributes of devices on a substrate.
18.9 Example Coordinate References — The values presented in this section are for demonstration purposes
(measurements are not exact).
18.9.1 Orientation — The recipe attributes presented in Figure 7 reflect an Orientation attribute setting of 0º. The
recipe attributes presented in Figure 8 reflect an Orientation attribute setting of 90º.
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OriginLocation = 3
Orientation = 0
ReferenceDeviceX = 5
ReferenceDeviceY = 15
RefDeviceMatrixX=1
RefDeviceMatrixY=2
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = C
DeviceSizeY = D
MatrixSizeX = A
MatrixSizeY = F
MatrixDeviceRows = 2
MatrixDeviceCols = 3
StepSizeX = B
StepSizeY = E
Rows = 16
Columns = 17
Figure 7
Example Coordinates Orientation = 0
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OriginLocation = 3
Orientation = 90
ReferenceDeviceX = 15
ReferenceDeviceY = 13
RefDeviceMatrixX = 2
RefDeviceMatrixY = 3
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = D
DeviceSizeY = C
MatrixSizeX = F
MatrixSizeY = A
MatrixDeviceRows = 3
MatrixDeviceCols = 2
StepSizeX = E
StepSizeY = B
Rows = 17
Columns = 16
Figure 8
Example Coordinates Orientation = 90
18.9.2 Orientation on Chuck — The following example demonstrates the effect of probing a substrate with different
settings of the OrientationOnChuck recipe attribute. The OrientationOnChuck attribute has no impact on the
coordinate values communicated between the host and the equipment.
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Host Prober
MOVE-ABS(X = 6, Y = 2)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X = 6, Y = 2)
Recipe Parameters:
Orientation = 0
OriginLocation = 3
MOVE-ABS(X = 7, Y = 2)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X = 7, Y = 2)
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OrientationOnChuck = 0
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OrientationOnChuck = 90
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OrientationOnChuck = 0
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OrientationOnChuck = 90
Figure 9
Example OrientationOnChuck
19 Collection Event List
19.1 Requirements
19.1.1 All GEM-required events are required by the PSEM300. Since Processing State Model is required by the
PSEM300, all state transitions are required collection events.
19.1.2
All GEM-required events associated with the Communications, Alarm, and Spooling State Models are
required. This section of the PSEM300 lists only those collection events that are not associated with a change of
state or those requiring specific data variables or reports as defined in the PSEM300.