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SEMI D18-0299 E © SEMI 19 99, 2001 6 Symbol Us ed Show n in Datum Me asured From Boundary or Fea ture M easured To: Algebraic Re lation or Value z 1 Figure 4 horizontal da tum plane bottom of cassette bottom domain ≥ 2 z…
SEMI D18-0299
E
© SEMI 1999, 20015
Symbol Used Shown in Datum Measured From Boundary or Feature Measured To: Algebraic Relation or Value
x8 Figure 3 bilateral datum plane inside edge of cassette sensing pad
areas
0.711 ×= W ±5.0
x9 Figure 3 bilateral datum plane outside edge of cassette sensing pad
areas
.7801 ×= W ±5.0
x10 Figure 4 bilateral datum plane encroachment of cassette top domain
on robotic handling flange space
1.02
1 ×≤ W
x11 Figure 4 bilateral datum plane far side of robotic handling flanges
1.051 ×≤ W
x12 Figures 3 bilateral datum plane inside edge of conveyor rail
exclusion zones
0.752
1 ×≥ W
x13 Figures 3 bilateral datum plane outside edge of conveyor rail
exclusion zones
0.877 1 ×≤ W
x14 Figure 3 bilateral datum plane center of coupling exclusion zones
0.9455 1 ×= W ± 0.1
x15 Figures 3
and 6
bilateral datum plane centerline of V-rail roller
0.815 1 ×= W ± 0.2
x16 Figure 6 bilateral datum plane centerline of float roller
19x=± 2.0
x17 Figure 3 bilateral datum plane inside edge of facial datum plane V-
groove
0.0245 1 ×= W ± 0.2
x18 Figure 3 bilateral datum plane outside edge of facial datum plane
V-groove
0.020
1 ×= W ± 0.2
x19 Figure 6 bilateral datum plane left edge of V-groove exclusion zone
0.069 1 ×≥ W
x20 Figure 6 bilateral datum plane right edge of V-groove exclusion
zone
0.109
1 ×≥ W
x21 Figure 6 bilateral datum plane inside edge of float roller exclusion
zone
0.742 1 ×≤ W
x22 Figure 6 bilateral datum plane outside edge of float roller exclusion
zone
0.884 1 ×≥ W
y1 Figure 2 facial datum plane encroachment of cassette side
domain
031.0
1 ×≥ L
y2 Figure 2 facial datum plane encroachment of cassette side
domain
454.01 ×≤ L
y3 Figure 2 facial datum plane encroachment of cassette side
domain
515.01 ×≥ L
y4 Figure 2 facial datum plane encroachment of cassette side
domain
938.0
1 ×≤ L
y5 Figure 2 facial datum plane outside edge of substrate pick-up
volume
11 +≤
L
y6 Figure 2 facial datum plane encroachment of cassette side
domains on substrate set-down
volume
11 +≥
L
y7 Figure 2 facial datum plane encroachment of cassette side
domains on substrate extraction
volume
31 +≥ L
y8 Figure 2 facial datum plane boundary of rear cassette domain
12.11 ×≤ L
y9 Figures 2 facial datum plane outside edge of cassette top and
bottom plate domain
21.1
1 ×≤ L
y10 Figures 3 facial datum plane inside edge of cassette top and
bottom plate indent
985.01 ×≤ L
y11 Figure 3 facial datum plane inside edge of cassette sensing pad
areas
708.01 ×≥ L
y12 Figure 3 facial datum plane outside edge of cassette sensing pad
areas
954.01 ×≤ L
y13 Figure 3 facial datum plane center of coupling exclusion zones
923.01 ×= L ± 0.1
SEMI D18-0299
E
© SEMI 1999, 2001 6
Symbol Used Shown in Datum Measured From Boundary or Feature Measured To: Algebraic Relation or Value
z1 Figure 4 horizontal datum plane bottom of cassette bottom domain
≥ 2
z2 Figure 4 horizontal datum plane bottom of cassette sensing pads
=3 ± 0.5
z3 Figure 6 horizontal datum plane bottom surface of conveying surface
=2 ± 0.5
z4 Figure 4 horizontal datum plane top of cassette bottom domain
≤ 40
z5 Figure 4 horizontal datum plane bottom nominal substrate seating
plane
= 60
z6 Figure 4 each nominal substrate
seating plane
bottom of substrate
= ± 0.5
z7 Figure 4 each nominal substrate
seating plane
encroachment of cassette side
domains on clearance above the
substrate
See Table 2.
z8 Figure 4 each nominal substrate
seating plane
adjacent nominal substrate seating
planes
See Table 2.
z9 Figure 4 top nominal substrate
seating plane
bottom of cassette top domain
≥ z7 + 1
z10 Figure 4 top nominal substrate
seating plane
bottom of clearance under robotic
handling flange
≤ 30
z11 Figure 4 top nominal substrate
seating plane
top of clearance under robotic
handling flange
= 40 ± 1
z12 Figure 4 top nominal substrate
seating plane
top of top cassette domain
≤ 50
z14 Figure 6 Horizontal Datum Plane top of V-rail, V-groove, and float
roller exclusion zones
= 24.86 ± 0.12
W= the length in millimeters of the substrate edge perpendicular to the bilateral datum plane.
W
1
= one half the length of W
L= the length in millimeters of the substrate edge perpendicular to the facial datum plane.
L
1
= one half the length of L
All values in millimeter (mm)
Table 2 Pitch and Capacity Options
Substrate Size Cassette Capacity (c) Substrate Pitch (z8) Substrate Clearance (z7) Resulting Cassette Height
(z5-z1)+((z8*(c-1))+z12
550 mm x
650 mm
25 substrates 20 mm (0.79 in.) 16 mm (0.63 in.) minimum 580 mm (22.83 in.) maximum
600 mm x
720 mm
25 substrates 20 mm (0.79 in.) 16 mm (0.63 in.) minimum 580 mm (22.83 in.) maximum
960 mm x
1100 mm
20 30 mm (1.18 in.) 20 mm (0.79 in.) 678 mm (26.7 in.) maximum
4 not yet defined
SEMI D18-0299
E
© SEMI 1999, 20017
Table 3 Type A Cassette Registration - Coupling Pin Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
d1 Figure 5 diameter of pin centered on the center axis line 12 ± 0.05 mm
(0.4724 ± 0.002 in.)
r2 Figure 5 radial distance from the center axis line to the origin of
the shoulder radius r5
6 mm
(0.2362 in.)
r3 Figure 5 radial distance from the intersection of the center axis line
and z13 to the top of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r4 Figure 5 blend radius for the intersection of r3 and r52 ± 0.1 mm
(0.0787 ± 0.004 in.)
r5 Figure 5 radial distance from the intersection of the horizontal
datum plane and r2 to the far shoulder of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r6 Figure 5 blend radius for the intersection of r5 and d12 ± 0.1 mm
(0.0787 ± 0.004 in.)
r7 Figure 5 Roughness (R
a
) as defined in ISO 4287
0.30 µm (12 µin.) maximum
z13 Figure 5 vertical distance from the horizontal datum plane to the
origin of top radius r3
2 mm
(0.08 in.)
Table 4 Type B Cassette Registration - Roller Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
r8 Figure 7 Radius about roller circumference revolved about the
revolute axis
= 4.8 ± 0.12 mm
r9 Figure 7 Radius of roller measured from the tangential surface
created by r8 to the revolute axis
≥ 20 ± 0.12 mm