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SEMI E30-1103 © SEMI 1992, 2003 81 8.4.3 The equipment suppli er may provide documenta tion on the format of required data item s (see Section 5) using SECS Message Language  Notation (SML  ). The SML formats are provi…

SEMI E30-1103 © SEMI 1992, 2003

Capability Section

References

Error Messages 4.9

Clock 4.10

Spooling 4.11

Control (Operator-Initiated) 4.12 (except

4.12.5.1)

Control (Host-Initiated) 4.12.5.1

8.3 Definition of GEM Compliance — The term “GEM

Compliance” is defined with respect to individual GEM

capabilities to indicate adherence to the GEM standard

for a specific capability. Equipment is GEM-compliant

for a specific GEM capability if, and only if, the

following three criteria are met:

— The fundamental GEM requirements are satisfied.

— The capability is implemented to conform with all

applicable definitions, descriptions, and

requirements defined for the capability in this

standard.

— The equipment does not exhibit behavior related to

this capability that conflicts with the GEM behavior

defined for the capability.

For example, equipment that provides SECS-II

messages for management of process programs must

precisely implement the GEM Process Program

Management capability to be “GEM-Compliant for

Process Program Management.”

Equipment may supply additional functionality not

specified in the GEM standard by using any messages

defined in the SECS-II standard as long as the

additional functionality does not conflict with

compliance to GEM capabilities.

Figure 8.2 illustrates the host view of equipment

communications in relationship to the components of

the GEM standard. The GEM capabilities are built upon

the fundamental GEM requirements and present GEM-

compliant behavior to the host when they are not

obstructed by conflicting functionality. Additional non-

GEM capabilities and non-obstructing extensions to

GEM capabilities provide additional functionality while

maintaining GEM behavior from the host view.

One additional term is defined to facilitate discussion of

GEM capability. Equipment is “Fully GEM Capable” if

and only if it meets the following two criteria:

— The equipment supplies all the GEM capabilities

listed in Section 8.2.

— Every implemented GEM capability is GEM-

Compliant.

8.4 Documentation — This section describes

documentation requirements in addition to those

specified in Sections 3 and 4 of this standard. All

documentation of the SECS-II interface shall be

supplied as a single volume, including Message

Documentation, a Compliance Statement and the

documentation required by Sections 3 and 4.

Figure 8.2

Host View of GEM

8.4.1 Message Documentation — The equipment

supplier shall provide message documentation in

conformance with Chapter 8 (Message Documentation)

of SEMI E5.

8.4.2 GEM Compliance Statement — The SECS-II

interface documentation provided by an equipment

supplier shall address GEM compliance. This

documentation shall include a GEM Compliance

Statement that accurately indicates for each capability

whether it has been implemented and whether it has

been implemented in a GEM-compliant manner. The

format for this statement is supplied as Table 8.3.

The table consists of three columns. The first column

lists the requirements and capabilities. The other two

columns pose questions to the supplier:

Implemented: Does the equipment provide functionality

that is similar to that defined for the GEM requirement

or capability?

GEM-Compliant: Has that requirement or capability

been implemented in a GEM-compliant manner?

SEMI E30-1103 © SEMI 1992, 2003

8.4.3 The equipment supplier may provide documentation on the format of required data items (see Section 5)

using SECS Message Language Notation (SML



). The SML formats are provided in Table 8.4.

Table 8.3 GEM Compliance Statement

GEM COMPLIANCE STATEMENT

FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED GEM-COMPLIANT

State Models

❐ Yes ❐ No

Equipment Processing States

❐ Yes ❐ No

Host-Initiated S1= F13/F14 Scenario

❐ Yes ❐ No

Event Notification

❐ Yes ❐ No

On-Line Identification

❐ Yes ❐ No

Error Messages

❐ Yes ❐ No

Documentation

❐ Yes ❐ No

Control (Operator Initiated)

❐ Yes ❐ No

❐ Yes (See NOTE 1.)

❐ No

ADDITIONAL CAPABILITIES IMPLEMENTED GEM-COMPLIANT (See NOTE 2.)

Establish Communications

❐ Yes ❐ No ❐ Yes ❐ No

Dynamic Event Report Configuration

❐ Yes ❐ No ❐ Yes ❐ No

Variable Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Trace Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Status Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Alarm Management

❐ Yes ❐ No ❐ Yes ❐ No

Remote Control

❐ Yes ❐ No ❐ Yes ❐ No

Equipment Constants

❐ Yes ❐ No ❐ Yes ❐ No

Process Program Management

❐ Yes ❐ No ❐ Yes ❐ No

Material Movement

❐ Yes ❐ No ❐ Yes ❐ No

Equipment Terminal Services

❐ Yes ❐ No ❐ Yes ❐ No

Clock

❐ Yes ❐ No ❐ Yes ❐ No

Limits Monitoring

❐ Yes ❐ No ❐ Yes ❐ No

Spooling

❐ Yes ❐ No ❐ Yes ❐ No

Control (Host-Initiated)

❐ Yes ❐ No ❐ Yes ❐ No

NOTE 1: Do not mark YES unless all fundamental GEM requirements are implemented and GEM-compliant.

NOTE 2: Additional capabilities may not be marked GEM-compliant unless the fundamental GEM requirements are GEM-compliant.

Table 8.4 SML Notation

SECS-II Format Code

Item Format

Binary Octal

SML Item Format Mnemonic

LIST 000000 00 L [length]

Binary 001000 10 B

Boolean 001001 11 BOOLEAN

ASCII 010000 20 A [length] or A [min., max.]

JIS-8 010001 21 J [length] or J [min., max.]

8-byte integer (signed) 011000 30 I8

1-byte integer (signed) 011001 31 I1

2-byte integer (signed) 011010 32 I2

4-byte integer (signed) 011100 34 I4

8-byte floating point 100000 40 F8

4-byte floating point 100100 44 F4

8-byte integer (unsigned) 101000 50 U8

1-byte integer (unsigned) 101001 51 U1

2-byte integer (unsigned) 101010 52 U2

4-byte integer (unsigned) 101100 54 U4