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SEMI E6-0303 © SEMI 1982, 2003 23 Data Sheet 900 – Vacuum (See SEMI E6 Section 17) 900 Vacuum A B C D E F 1 Equipment Component Vacuum Connection Number Connection Label on Equipment Utility Type Line Source Vacuum Conve…

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SEMI E6-0303 © SEMI 1982, 2003 22
17 Vacuum Data Sheet
17.1 Include in the Vacuum Data Sheet the requested
information for equipment connections to centralized
process vacuum systems and local vacuum pump
systems.
17.2 Data Sheet 900, Vacuum contains the following
items.
17.3 Equipment Component (900A) — Enter the name
of the equipment component where the connection is
located. The name should be the same name used in
Data Sheet 200 and 300. For example: Mainframe,
Vacuum Pump, or Chiller.
17.3.1 Vacuum Connection Number (900B) — Enter a
unique connection number for every vacuum
connection. For example: 901, 902, 903, and so on.
17.3.2 Connection Label on Equipment (800C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example
Process Vac.
17.3.3 Utility Type (900D) — Enter the name of
vacuum service to be provided through the connection.
For example: Process Vacuum System or Local
Vacuum Pump.
17.3.4 Line Source (900E) — Identify the source of the
vacuum line for this connection. If the line comes from
a provided component covered in the data sheets enter
the connection number(s) at the other end of the line. If
the line comes from a facilities source enter facilities
system. For example: 903 or facilities system.
17.3.5 Vacuum Conveyed Process Wastes (900F) —
Enter the specific chemical(s) of any potential
byproducts that may come through the referenced
vacuum connection. In particular, identify any
discharge that might be regulated by the semiconductor
manufacturers’ discharge permit. For example:
tungsten-fluorine-oxygen precipitates or
pyrophosphoric acid condensates.
17.3.6 Minimum Vacuum (900G) — Enter the
minimum vacuum for the equipment to operate
correctly.
17.3.7 Maximum Vacuum (900H) — Enter the highest
vacuum that can be used to operate the equipment
correctly.
17.3.8 Maximum Vacuum Fluctuation (900I) — Enter
the maximum vacuum change during the processing
cycle for the equipment to operate correctly.
17.3.9 Maximum Flow (900J) — Enter the maximum
flow rate (for the equipment processing cycle or idle
condition whichever is greater).
17.3.10 Heating and Insulating (900K) — Enter any
foreline heating and insulating requirements.
17.3.11 Equipment Component Fitting Size (900L) —
Enter the fitting size of the connection provided on the
equipment component. In row 2 enter or select the units
of measure for the specified fitting size. For example:
mm or inches.
17.3.12 Equipment Component Fitting Material
(900M) — Enter a general description of the fitting
material of the connection provided on the equipment
component. For example: 316 SS.
17.3.13 Equipment Component Fitting Type (900N) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example: ISO
KF Flange.
NOTE 7: SEMI E73 specifies the physical and electrical
interfaces for dry pump and SEMI E74 specifies the physical
and electrical interfaces for turbomolecular pumps.
17.3.14 Drawing References (900O) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYY. Submit referenced material to
equipment purchaser with this data sheet.
17.3.15 Vacuum Comments (900P) — Enter any
comments necessary to clarify data provided for this
connection. For example: vacuum switch will initiate
tool alarm if vacuum falls below 10
-4
Torr (1.33 x 10
-2
Pa), maximum allowed foreline length, maximum
number of bends or condensate cleaning requirements.
SEMI E6-0303 © SEMI 1982, 2003 23
Data Sheet 900 – Vacuum (See SEMI E6 Section 17)
900 Vacuum
A B C D E F
1
Equipment
Component
Vacuum
Connection
Number
Connection
Label on
Equipment
Utility
Type
Line
Source
Vacuum
Conveyed
Process Wastes
2
text text text text text text
3
4
5
6
900 Vacuum
G H I J K
1
Minimum
Vacuum
Maximum
Vacuum
Maximum Vacuum
Fluctuation
M
aximum
Flow
Heating and
Insulating
2
Pa Pa Pa cmh text
3
4
5
6
900 Vacuum
L M N O P
1
Equipment
Component Fitting
Size
Equipment
Component Fitting
Material
Equipment
Component Fitting
Type
Drawing References Vacuum Comments
2
mm or inches text text text text
3
4
5
6
18 Exhaust Data Sheet
18.1 Include in the Exhaust Data Sheet the requested
information for equipment connections to facilities
systems (including but not limited to) heat exhaust and
process chemical exhaust systems.
18.2 Data Sheet 1000, Exhaust contains the following
items.
18.3 Equipment Component (1000A) — Enter the
name of the equipment component where the
connection is located. The name should the same name
used in Data Sheet 200 and 300. For example:
Mainframe, Vacuum Pump, or Chiller.
18.3.1 Exhaust Connection Number (1000B) — Enter a
unique connection number for every utility connection.
For example: 1001, 1002, and so on.
18.3.2 Connection Label on Equipment (1000C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example:
Acid Exhaust.
18.3.3 Utility Type (1000D) — Enter the type of
exhaust service to be provided through the connection.
For example: Heat Exhaust, Acid Exhaust, Caustic
Exhaust, or Solvent Exhaust.
18.3.4 Line Source (1000E) — Identify the source of
the exhaust line for this connection. If the line comes
from a provided component covered in the data sheets
enter the connection number(s) at the other end of the
line. If the line comes from a facilities source enter
facilities system. For example: 1003 or facilities
system.
18.3.5 Exhaust Conveyed Process Wastes (1000F) —
Enter the specific chemical(s) of any potential
SEMI E6-0303 © SEMI 1982, 2003 24
byproducts that may come through the referenced
exhaust connection. In particular, identify any discharge
that might be regulated by the semiconductor
manufacturers’ discharge permit. For example: acid
condensates.
18.3.6 Minimum Static Pressure (1000G) — Enter the
minimum static pressure for the equipment to operate
correctly.
18.3.7 Maximum Static Pressure (1000H) — Enter the
highest static pressure for the equipment to operate
correctly.
18.3.8 Maximum Static Pressure Fluctuation (1000I)
— Enter the maximum negative static pressure change
during the processing cycle for the equipment to
operate correctly.
18.3.9 Idle Average Flow (1000J) — Enter the average
flow rate when the equipment is in idle condition.
18.4 Process Average Flow (1000K) — Enter the
average flow rate over the processing cycle.
18.5 Maximum Temperature (1000L) — Enter the
maximum exhaust temperature.
18.5.1 Equipment Component Fitting Size (1000M) —
Enter the fitting size of the connection provided on the
equipment component. In row 2 enter or select the units
of measure for the specified fitting size. For example:
mm or inches.
18.5.2 Equipment Component Fitting Size Dimension
(1000N) — Enter ID if fitting size in 100M is measured
as inner diameter. Enter OD if fitting size in 100M is
measured as outer diameter.
18.5.3 Equipment Component Fitting Material
(1000O) — Enter a general description of the fitting
material of the connection provided on the equipment
component. For example: Polypropylene.
18.5.4 Equipment Component Fitting Type (1000P) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example:
Collar, Flange, or Butt.
18.5.5 Flow Loss Coefficient, C (1000Q) — Enter the
flow loss coefficient (C). The flow loss coefficient can
be calculated by measuring the static pressure loss
through the equipment (SP), at the design flow rate, and
calculating velocity pressure (VP) as follows:
C = Flow loss coefficient (unit less) = SP/VP
Where:
SP = Static pressure loss through equipment (Pa)
VP = Velocity pressure (Pa) = ρV
2
/2
ρ = Air density (Kg/m
3
)
V = Air velocity (m/s)
18.5.6 External Damper Required (1000R) — Enter
yes if a balancing or isolation damper should be
provided by the equipment purchaser in the exhaust
system line that will be connected to the connection.
Enter no if a damper is not required or the equipment
supplier provides the damper with the equipment.
Clarify as required in the Exhaust Comments cell.
18.5.7 Drawing References (1000S) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYY. Submit referenced material to
equipment purchaser with this data sheet.
18.5.8 Exhaust Comments (1000T) — Enter any
comments necessary to clarify information given for
this connection. For example: pressure switch will
alarm if exhaust static pressure falls below 0.5 inches
H
2
O. Also enter the design or test altitude so the
equipment user can make adjustments, as necessary, for
installation location altitude. For example: exhaust
requirements are based on equipment operation at sea
level.