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SEMI E39.1-0703 © SEMI 1995, 2003 3 Parameter Name SECS-II Data Item Status L,n 1. L,2 1.<ERRCODE 1 > 2.<ERRTEXT 1 > : n. L,2 1. <ERRCODE n > 2. <ERRTEXT n > TargetSpec TARGETSPEC 5.2 SECS-II D at…

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SEMI E39.1-0703 © SEMI 1995, 2003 2
Message Name Stream, Function SECS-II Name
Reattach.rsp S14,F14 Object Attach Acknowledge
GetServiceNames.req S14,F25 Get Service Name Request
GetServiceNames.rsp S14,F26 Get Service Name Data
GetServiceParameters.req S14,F27 Get Service Parameter Name Request
GetServiceParameters.rsp S14,F28 Get Service Parameter Name Data
ObjectAction.req S14,F19 Generic Service Request
ObjectAction.rsp S14,F20 Generic Service Acknowledge
ObjectActionCompletion.nfy S14,F21 Generic Service Completion Information
ObjectActionCompletion.rsp S14,F22 Generic Service Completion Acknowledge
5 Service Parameter Mapping
5.1 Table 2 shows the mapping between message parameters defined by OSS and data items defined by SECS-II.
For parameters specified in the definitions of an OSS service, either the parameters themselves, or individual
elements of complex parameters, map to a specific data item.
Table 2 Service Parameters Item Mapping Table
Parameter Name SECS-II Data Item
AttachToken OBJTOKEN
AttrData ATTRVAL
AttrName ATTRID
AttrReln ATTRRELN
ErrCode ERRCODE
ErrText ERRTEXT
ObjAck OBJACK
ObjectAction SVCNAME
ObjectActionAcknowledgement SVCACK
ObjectActionParameterRequest L,2
1. <SPNAME>
2. <SPVAL>
ObjectActionParameterResult L,2
1. <SPNAME>
2. <SPVAL>
ObjectActionReportStatus DATAACK
ObjectActionStatus L,2
1. <SVCACK>
2. Status
ObjID OBJID
ObjSpec OBJSPEC
ObjType OBJTYPE
OperationID OPID
ServiceParameterName SPNAME
ServiceParameterValue SPVAL
SEMI E39.1-0703 © SEMI 1995, 2003 3
Parameter Name SECS-II Data Item
Status L,n
1. L,2
1.<ERRCODE
1
>
2.<ERRTEXT
1
>
:
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
TargetSpec TARGETSPEC
5.2 SECS-II Data Items Without Corresponding SEMI E94 Parameters
5.2.1 Table 3 contains the SECS-II data items that do not correspond to SEMI E39’s service parameters.
Table 3 Additional Data Item Requirements Table
Function SECS-II Data Item
Used to satisfy SECS-II conventions for linking a multi-block inquiry with a subsequent multi-
block message. Neither required nor specified by OSS.
DATAID
Used to inform receiver of total message length size for SECS-II multi-block conventions.
Neither required nor specified by SEMI E39.
DATALENGTH
Used to satisfy SECS-II multi-block requirements. Neither required nor specified by OSS. GRANT
6 Data Item Format Restrictions
ATTRID Format: 20
The ASCII version of ATTRID is restricted to the
characters from 20
16
through 7E
16
, excluding the
following characters: the “greater than” symbol “>”, the
colon “:”, the question mark “? ”, the asterisk “*”, and
the tilde “~ ”. The space character (20
16
) may not be
used as the first or last character. Maximum length is 40
characters.
OBJTYPE Format: 20
The ASCII version of OBJTYPE is restricted to the
characters from 20
16
through 7E
16
, excluding the
following characters: the “greater than” symbol “>”, the
colon “:”, the question mark “? ”, the asterisk “*”, and
the tilde “~ ”. The space character (20
16
) may not be
used as the first or last character. Maximum length is 40
characters.
OBJID Format: 20
The ASCII version of OBJID is restriced to the
characters from 20
16
through 7E
16
, excluding the
following characters: the “greater than” symbol “>”, the
colon “:”, the question mark “? ”, the asterisk “*”, and
the tilde “~ ”. The space character (20
16
) may not be
used as the first or last characer. The equipment shall
allow the OBJID to be any length from 1 to 80
characters, inclusive. A zero length OBJID implies that
no OBJID is specified.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E40-0705 © SEMI 1995, 2005 1
SEMI E40-0705
STANDARD FOR PROCESSING MANAGEMENT
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published
June 2003.
1 Purpose
1.1 Automated management and command of material processing in equipment is a crucial aspect enabling factory
automation. This standard addresses the communications needs within the semiconductor manufacturing
environment with respect to the processing of material in equipment.
1.2 This standard specifies the application of the appropriate processing to specified material received at the
processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to
processing, and the messaging services which are needed to accomplish the task.
1.3 The communications services defined here enable standards-based interoperability of independent systems.
They allow application software to be developed that can assume the existence of these services and allow software
products to be developed which offer them.
1.4 Implementation of automated processing management will help eliminate misprocessing of material. The
adoption of the standards described will greatly reduce the effort required to integrate compliant equipment
components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard
services.
2 Scope
2.1 The scope of this standard is automated material processing based on discrete processing jobs. It provides the
functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of
other multi-resource equipment, as well as to host control of many types of equipment.
2.2 This standard supports individual management of jobs for identical processing of material within a group and
concurrent processing of independent groups. Where material contains other material (such as carriers containing
wafers), processing may be specified in terms of either material type.
2.3 A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A
method is defined for taking advantage of recipe variable parameters. This is not expected to satisfy all closed loop
control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex
data.
2.4 This standard does not provide services for receiving material for processing, or disposing of it after processing
is complete. Automation of material transfer is assumed to be provided through other services, such as those defined
in applicable SEMI standards.
2.5 This standard presents a solution from the concepts and behavior down to the messaging services. It does not
define the messaging protocol.
2.6 A messaging service includes the identification that a message shall be exchanged and a definition of the data
which is contained in that message. It does not include information on the structure of the message, how the data is
represented within the message, or how the message is exchanged. This additional information is contained within
the message protocol.
2.7 The defined services may be applied to multiple protocols. Information on the mapping of processing
management services to special protocols (e.g., SECS-II) are added as adjunct standards.
2.8 The services assume a communications environment in which a reliable connection has been established
between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection,
and handling communication failures are beyond the scope of this standard.