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SEMI P41-0304 E © SEMI 2004 8 MDML (data _no,date_sta mp) Basi cInform ation MaskSize (unit ,shape) MaskSize_X MaskSize_Y MaskT hickness MaskAbsorber Def ectIns pect ion (pre paration_da ta) Inspe ctionTool (t ool_name ,…

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Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImagePixelSize Element Mandatory - Element of pixel size on image data.
unit Attribute Mandatory String Unit system.
ImagePixelSize_X Element Mandatory Float Size of one pixel in X.
ImagePixelSize_Y Element Mandatory Float Size of one pixel in Y.
ImageGrayLevel Element Mandatory String Gray level information of image data.
ImageIllumination Element Mandatory String Illumination information of image data.
ImageRotation Element Mandatory String Rotation information of image data.
ImageMirror Element Mandatory String Mirrorring information of image data.
ImageFlip Element Mandatory String Flipping information of image data.
ImageConvertInformation Element Optional - Element of image conversion information from
original/raw data.
ImageContrast Element Mandatory String Image contrast information.
ImageBrightness Element Mandatory String Image brightness information.
ImageConversionParameter Element Mandatory String Image conversion parameter information.
ImageReference Element Mandatory - Top element of image origin point. Refer to
Figure 11.
origin Attribute Mandatory String Origin point name of this reference position.
ImageReferencePoint Element Mandatory String Image reference point information.
ImageReferencePosition Element Mandatory - Element of image reference position coordinate
value.
unit Attribute Mandatory String Unit system.
ImageReferencePosition_X Element Mandatory Float X coordinates value of image reference position.
ImageReferencePosition_Y Element Mandatory Float Y coordinates value of image reference position.
ImageTarget Element Mandatory - Element of image target.
origin Attribute Mandatory String Origin point name of this reference position.
ImageTargetPosition Element Mandatory - Element of target position on image data. Refer
to Figure 12.
unit Attribute Mandatory String Unit system.
ImageTargetPosition_X Element Mandatory Float X coordinate value of image target position.
ImageTargetPosition_Y Element Mandatory Float Y coordinate value of image target position.
ExpressionMark Element Mandatory String Expression of target point on image data.
MDML (data_no,date_stamp)
BasicInformation
Element name
Attribute name
Top element
Under element
InspectionResult
+ Defect(defect_type,data_stamp)
Repeatable mark
Figure 1
Explanation of Figures 2–7
SEMI P41-0304
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MDML (data_no,date_stamp)
BasicInformation
MaskSize (unit,shape)
MaskSize_X
MaskSize_Y
MaskThickness
MaskAbsorber
DefectInspection (preparation_data)
InspectionTool (tool_name,tool_no)
ToolCoordinateInformation
InspectionMethod
PreparationOperator
ReferenceAreaDB
Subsequent structures are in Figure 5.
DirectionInformation
AreaInformation
LensDistance (unit)
InspectionArea (unit)
InspectionArea_X
InspectionArea_Y
InspectionAreaChip_X
InspectionAreaChip_Y
ChipSize_X
ChipSize_Y
InspectionChipNumber
InspectionChipNumber_X
InspectionChipNumber_Y
+ Reference (origin)
ReferencePointName
ReferencePosition (unit)
ReferencePosition_X
ReferencePosition_Y
+ ImageData
InspectionStartPosition (origin,unit)
InspectionStartPosition_Y
InspectionStartPosition_X
MaskMaterialInformation
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 7.
Subsequent structures are in Figure 3.
Figure 2
Structure of Basic Information Section
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InspectionResult
Summary
InspectionSummary (beginning_date,ending_date)
InspectionRecipe (recipe_name)
InspectionModeInformation
InspectionDetectionSummary
TotalDefect
+ ClassifyDefect (defect_type)
InspectionOperator
ReticleJudgement
+RepairSummary (beginning_date,ending_date)
RepairTool (tool_name,tool_no)
RepairMethod
ToolCoordinateInformation
Subsequent structures are in Figure 5.
N
unberRepairProcessing
DirectionInformation
TotalRepairProcess
+ ClassifyRepairProcess (dafect_type)
RepairOperator
RepairJudgement
+EvaluationSummary (beginning_date,ending_date)
EvaluationTool(tool_name,tool_no)
EvaluationMethod
ToolCoordinateInformation
N
unberEvaluationProcessing
DirectionInformation
TotalEvaluationProcess
+ ClassifyEvaluationProcess (defect_type)
EvaluationOperator
EvaluationJudgement
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 5.
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 4.
Figure 3
Structure of Result Summary Section