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SEMI P10-0705 © SEMI 1990, 2005 45 <xs:attribute name="p10End" type="xs:string" use="required" fixed="EndSubstrate"/> </xs:complexType> <xs:complexType name="Eu…

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SEMI P10-0705 © SEMI 1990, 2005 44
<xs:element name="BarcodeText" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BarcodeLocation" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BarcodeRotation" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartBarcodeData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndBarcodeData"/>
</xs:complexType>
<xs:complexType name="SubstrateType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankSize" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankGrade" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankFlatness" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskCoating" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ResistType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ResistThickness" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankBirefringenceReqd"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Attenuator" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CoatingGrade" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EuvBlankType"
type="EuvBlankTypeType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartSubstrate"/>
SEMI P10-0705 © SEMI 1990, 2005 45
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndSubstrate"/>
</xs:complexType>
<xs:complexType name="EuvBlankTypeType">
<xs:sequence>
<xs:element name="EuvFlatnessFront" type="xs:string"/>
<xs:element name="EuvFlatnessBack" type="xs:string"/>
<xs:element name="EuvMultilayerComposition"
type="xs:string"/>
<xs:element name="EuvCappingComposition" type="xs:string"/>
<xs:element name="EuvMmrWavelength" type="xs:double"/>
<xs:element name="EuvMeanPeakReflectivity"
type="xs:double"/>
<xs:element name="EuvPeakReflectivityUniformity"
type="xs:string"/>
<xs:element name="EuvAbsorberComposition"
type="xs:string"/>
<xs:element name="EuvAbsorberOpticalProperties"
type="xs:double"/>
<xs:element name="EuvBlankResistance" type="xs:double"/>
<xs:element name="EuvExpansionCoeff" type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartEuvBlankType"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndEuvBlankType"/>
</xs:complexType>
<xs:complexType name="ShipPlotType">
<xs:sequence>
<xs:element name="PlotType" type="xs:string"/>
<xs:element name="PlotScale" type="xs:double"/>
<xs:element name="Quantity" type="xs:integer"/>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PlotFormat" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternPlotNormalTone"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartShipPlot"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndShipPlot"/>
</xs:complexType>
<xs:complexType name="FilmsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Quantity" type="xs:integer"/>
SEMI P10-0705 © SEMI 1990, 2005 46
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmScale" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmSize" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmColor" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmNormalTone" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartFilms"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndFilms"/>
</xs:complexType>
<xs:complexType name="PhaseShiftType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseShiftQualityId"
type="xs:string"/>
</xs:sequence>
<xs:element name="PsmWavelength" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionTarget"
type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionRange"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionError"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="TransmissionEquipReqd"
type="xs:string"/>
<xs:sequence minOccurs="0">