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SEMI E107-1102 © SEMI 2001, 2002 11 RELATED INFORMATION 1 NOTE: This related information is not an official par t of SEMI E107, but was appr oved for publication b y full letter ballot procedure on July 19, 2002. R1-1 Ex…

SEMI E107-1102 © SEMI 2001, 2002 10

<xsd:enumeration value=" YSize" />

<xsd:enumeration value=" Area" />

<xsd:enumeration value=" DefectCate" />

<xsd:enumeration value=" XMinPhysic" />

<xsd:enumeration value=" XMaxPhysic" />

<xsd:enumeration value=" YMinPhysic" />

<xsd:enumeration value=" YMaxPhysic" />

<xsd:enumeration value=" IoNumber" />

<xsd:enumeration value=" XMinLogic" />

<xsd:enumeration value=" XMaxLogic" />

<xsd:enumeration value=" YMinLogic" />

<xsd:enumeration value=" YMaxLogic" />

</xsd:restriction>

</xsd:simpleType>

<xsd:complexType name=" analogDataTemplateType" >

<xsd:list itemType=" analogDataItemNameType" />

</xsd:complexType>

<xsd:simpleType name=" analogDataItemNameType" >

<xsd:restriction base=" xsd:string" >

<xsd:enumeration value=" XAddress" />

<xsd:enumeration value=" YAddress" />

<xsd:enumeration value=" TestNumber" />

<xsd:enumeration value=" Note" />

<xsd:enumeration value=" Measure" />

<xsd:enumeration value=" MeasureUnit" />

<xsd:enumeration value=" Std" />

<xsd:enumeration value=" Parameter" />

<xsd:enumeration value=" ParameterUnit" />

<xsd:enumeration value=" UpperLimitData" />

<xsd:enumeration value=" LowerLimitData" />

<xsd:enumeration value=" TestResult" />

</xsd:restriction>

</xsd:simpleType>

</xsd:schema>

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

SEMI E107-1102 © SEMI 2001, 2002 11

RELATED INFORMATION 1

NOTE: This related information is not an official part of SEMI E107, but was approved for publication by full letter ballot

procedure on July 19, 2002.

R1-1 Example of YMS Link Data

<? xml version=”1.0”? >

<Device ProductID=”product1234” LotId=”lot1234” Orientation=”180”

DeviceSizeX=” 4.8987000000e+ 03” DeviceSizeY=” 8.7395000000e+ 03”

Rows=”4” Columns=”1” BinType=”Decimal” NullBin=”255” CreateDate=” 03-18-2000 15:07:50”

Status=” prerepair_map”>

<Data>

</Data>

</Device>

<Comment>Engineering Test</Comment>

<TestEquipmentId>tester1</TestEquipmentId>

<DieCoordinate>BottomLeftXY</DieCoordinate>

</ErrorClass>

</ErrorClass>

<ErrorClassQuality>block-fail</ErrorClassQuality>

</ErrorClass>

</ErrorClassList>

<FailBitDataTemplate>Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize Area

DefectCate</FailBitDataTemplate>

<FailBitDataUnit>1 8 18 0.12345000e+ 03 0.91234000e+ 03 1.06367000e+ 03 7.27391000e+ 03 0.51789500e+ 03

4.16879000e+ 03 0.78889000e+ 03 6.21024000e+ 03 4.89919623e+ 06 block-fail</FailBitDataUnit>

<FailBitDataUnit>2 10 18 3.03120000e+ 03 3.03210000e+ 03 1.58330000e+ 03 1.58580000e+ 03 3.03165000e+ 03

1.58455000e+ 03 9.00000000e-01 2.50000000e+ 00 2.25000000e+ 00 bit-fail</FailBitDataUnit>

</FailBitData>

<AnalogDataTemplate>XAddress YAddress TestNumber Note Measure MeasureUnit TestNumber Comment

Measure MeasureUnit TestResult TestNumber Comment Measure MeasureUnit TestResult</AnalogDataTemplate>

SEMI E107-1102 © SEMI 2001, 2002 12

<AnalogDataUnit>8 18 100 CONTACT –0.600 V 200 IDD 125.0 mA PASS 300 IDDS 100.0 uA

PASS</AnalogDataUnit>

<AnalogDataUnit>9 18 100 CONTACT –0.567 V 200 IDD 120.2 mA PASS 300 IDDS 321.0 uA

FAIL</AnalogDataUnit>

<AnalogDataUnit>10 18 100 CONTACT –0.612 V 200 IDD 123.4 mA PASS 300 IDDS 99.4 uA

PASS</AnalogDataUnit>

<AnalogDataUnit>11 18 100 CONTACT 99999 V 200 IDD 99999 mA PASS 300 IDDS 99.4 uA

PASS</AnalogDataUnit>

</AnalogData>

<Map>

R1-2 Example Datafile

Map = {

FormatRevision = “2.00"

CreateDate = “03-18-2000 15:07:50”

ProductId = " product1234"

LotId = " lot1234"

WaferId = “wafer1234”

Status = “prerepair_map”

Comment = " Engineering Test"

TestProgramName = " pro123a"

TestEquipmentId = “tester1”

WaferOrientation = 180

WaferSize = 200

DieSizeX = 4.8987000000e+ 03

DieSizeY = 8.7395000000e+ 03

ReferenceDieList = {

PosX = -2030.55 PosY = 1427.98

}

WaferCoordinate = “TopLeft”

DieCoordinate = “BottomLeftXY”

MapType = “Die”

BinType = “Decimal”

BinList = {

Code = 001 Count = 35 Quality = “Pass”

Code = 002 Count = 4 Quality = “Fail”

Code = 003 Count = 1 Quality = “Fail”

}

Data = {

007 018 001

008 018 002

009 018 003

010 018 002

}

ErrorClassList = {

Class = “0” Quality = " bit-fail"

Class = “1” Quality = " line-fail"

Class = “2” Quality = " block-fail"

}

FailBitDataTemplate = Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize Area

DefectCate

FailBitData = {