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SEMI E98-1102 © SEMI 2000, 2002 31 made. Figure 21 sh ows the relationships of the Equipment . Equipmen t Acces s Manager Equipment I/ODevice Equipment Module Clock Equipmen t Subsy stem M N P M + N + P >= 1 Figure 21…

SEMI E98-1102 © SEMI 2000, 2002 30

10.5.7.1 Abort

10.5.7.1.1 On receipt of an Abort request from the

user, the module shall stop all of its current activity as

soon as it is safe to do so. It should remove any

material in process within the module whenever

possible to do so safely.

10.5.7.1.2 A module may also self-abort when it

detects a dangerous condition.

10.5.7.1.3 In the Behavior State Model, the module

shall transition from ACTIVE SERVICE to

ABORTING when an abort occurs. When all activity

has ceased other than normal background activities for

environmental control, the module transitions to

ABORTED. The module shall not start a new activity

until it is instructed to do so by the user or the user

instructs it to return to IDLE.

10.5.7.2 Add Process Capability — ProcessCapabil-

ityList is an attribute of the equipment module and con-

sists of a list of text strings representing process capa-

bilities that are meaningful to the user. Individual capa-

bilities are added by the factory to recognize the type of

processes the equipment module may be able to run.

10.5.7.3 Pause

10.5.7.3.1 On receipt of a Pause request from the user,

the module shall suspend its activity at the next logical

point in the process from which it will be able to

resume activities at a later time and which will prevent

unintended change to the product. It shall not accept

new work while it is in this state.

10.5.7.3.2 In many cases, to avoid unintended change

to the product, the AbstractEquipmentModule should

wait until the current product has been removed and

then pause, preventing new product from entering.

10.5.7.4 Remove Process Capability — This allows the

factory to remove from the ProcessCapabilityList a

capability that is no longer required or one that can not

be performed by the equipment due to environment or

actual physical changes in the equipment.

10.5.7.5 Resume — When a Resume request is received

during a PAUSE state, the module shall resume its

activity from the point where it was paused.

10.5.7.6 Shutdown — The Shutdown request is used to

put an AbstractEquipmentModule in a state where it is

safe to turn off its power and remove it from the

equipment. The specific operations shall be

documented by the supplier.

10.5.7.7 Start

10.5.7.7.1 Some activities may require specific Start

instructions.

10.5.7.7.2 The user may issue a Start Activity request

to a specific AbstractEquipmentModule.

10.5.7.8 Startup — The Startup request is used when

an AbstractEquipmentModule has been shutdown. The

specific activities that result shall be documented by the

supplier.

10.5.7.9 Stop

10.5.7.9.1 On receipt of a Stop request from the user,

the module shall stop its current activity in an orderly

fashion as soon as it is safe to do so, with all product

material returned as would be expected had the activity

completed normally.

10.5.7.9.2 In the Behavior State Model, the module

shall transition from ACTIVE SERVICE to STOPPING

when a stop operation begins. When all activity has

ceased other than normal background activities for

environmental control, the module transitions to

STOPPED. The module shall not start a new activity

until it is instructed to do so by the user.

10.5.8 EquipmentModule Object — The Equipment-

Module is a type of AbstractEquipmentModule and

inherits all of its attributes, state models, relations, and

services. As shown in Figure 20, the Equipment-

Module may be an aggregate of EquipmentIODevice,

EquipmentSubsystem, and other EquipmentModule

objects.

Equipment

Module

M + N + P >= 1

Equipment

I/ODevice

Equipment

Subsystem

Figure 20

EquipmentModule Aggregation

10.6 Equipment Object

10.6.1 The Equipment is a type of AbstractEquipment-

Module and supports all of the attributes, state models,

and services defined for the AbstractEquipmentModule.

10.6.2 Equipment is an aggregation of Equipment-

Modules, EquipmentSubsystems, and EquipmentIO-

Devices objects and owns all the objects of which it is

SEMI E98-1102 © SEMI 2000, 2002 31

made. Figure 21 shows the relationships of the

Equipment.

Equipment

Access

Manager

Equipment

I/ODevice

Equipment

Module

Clock

Equipment

Subsystem

M + N + P >= 1

Figure 21

Equipment Object Relationships

10.6.3 Equipment Requirements — All equipment shall

satisfy the following requirements:

• The Equipment provides the interface to the factory

and shall not be made up of other Equipment.

• Equipment is the root object within the equipment

hierarchy.

• Equipment may not be a component of any other

AbstractEquipmentElement or any of its subtypes.

• Equipment may be made up of any standardized

objects except for other Equipment objects.

• Equipment is required to have a Clock.

• Equipment is required to have at least one

CarrierPort. Exceptions to this requirement may be

made for testers and for exposure equipment in a

linked litho cell that have separate communications

with the factory systems.

• Equipment is responsible for (owns) all of its

components

10.6.4 Clock Object

10.6.4.1 Clock represents current real-time date and

time of day information. This information may be

provided by a physical real-time clock or by other

methods of calculating time. The Clock is used to

timestamp data and events.

10.6.4.2 Requirements include:

• The user shall be able to read the current date and

time at any time.

• Equipment shall be capable of using both factory

network time services and user interface services to

set current date and time.

• Clock resolution shall be 0.01 seconds or smaller.

• Date shall maintain a four-digit year.

Clock

- DateTime

- UseNet

- TimestampFormat

- GMTDelta

- UseDelta

setDate&Time

getDate&Time

setFormattedDate&Time

getFormattedDate&Time

synchDate&Time

Figure 22

Clock Object

10.6.4.3 All calculations based on, or related to, date

and time shall be fault-free in both the twentieth and

twenty-first centuries.

10.6.4.4 Table 14 defines the attributes of Clock.

Table 14 Clock Attribute Definitions

Attribute Name Definition Access Reqd Form

ObjType Object type RO Y Text = “Clock”

ObjID Object identifier RO Y Text

DateTime Current date and time RO Y Protocol specific

UseNet Enable/disable network time synchronization RW Y Boolean

TimestampFormat Date and time format used to timestamp events RW Y Enumerated

GMTDelta Difference, in minutes, between the current time and

Greenwich Mean Time (GMT)

RO Y Integer

UseDelta Enable/disable showing current GMTDelta on timestamps RW Y Boolean

10.6.4.5 Network Time

10.6.4.5.1 It shall be possible to set current date and time by using time services provided by the network in the

factory. Use of network time allows the different systems within the factory to remain closely synchronized with a

high degree of accuracy, and it relieves the factory host from explicitly setting the equipment’s clock. The attribute

UseNet allows the user to enable and disable use of network time services.

10.6.4.5.2 When enabled, the equipment shall be responsible for ensuring that any change in time does not result in

discontinuities in date/timestamp reporting. For example, if the time changes in the middle of a process, applying

the time change to current process events can cause later events to appear earlier than previous events, or they can

give the appearance of large pause in activities during processing. Both of these cases can cause time-based analysis

of data to give wrong results and must be prevented.

10.6.4.6 Timestamp Data

10.6.4.6.1 Date/time information is used by the factory for a variety of purposes, including analysis of historical

data. Typically a factory keeps local time. GMTDelta, the offset between local time and Greenwich Mean Time, is

provided to allow time values to be compared outside of the local time zone. GMTDelta may also be added to the

timestamp to clarify time data when local time changes within a process.

10.6.4.6.2 The attribute TimestampFormat allows the user to select the format used for timestamping events.

Possible formats include: formatted time, a text string of the form YYYYMMDDhhmmsscc, long signed integer,

and floating point.

10.6.5 Equipment Attributes

Equipment

AssignedOperators

EqpName

Cleanup

Figure 23

Equipment Object

10.6.5.1 Table 15 defines the attributes of the Equipment object, as shown in Figure 23.

Table 15 Equipment Attribute Definitions

Attribute Name Definition Access Reqd Form

ObjType Object type RO Y Text=“Equipment”

ObjID Object identifier RO Y Text

AssignedOperators Currently assigned operators. RO Y List of text

Nickname User-assigned name. RW Y Text

10.6.6 Equipment Services

10.6.6.1 Basic operational commands may be directed to an EquipmentModule, the Equipment as a whole, or to an

individual Process Job.

10.6.6.2 For multi-module or multi-process Equipment, the effect of an operational command varies depending

upon the level of the target object and the configuration of the Equipment. Given the number of Process Jobs that

are defined during the course of a work shift and their temporary nature; it is unlikely that an operator will

differentiate easily between one Process Job and another. Whereas they will be able to more quickly identify an

individual module or the Equipment when time is a critical factor.