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SEMI E130-1104 © SEMI 2003, 2004 5 8.1.5.11 SERVICE TASK (SUBSTRATE LOADED Sub-st a te) — A service task such as inking, cleani ng, or inspection is being perform ed by the prober. 8.1.6 PSEM Processing St ate Transit io…

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equipment events that satisfy the requirements of those transitions. In certain implementations, the prober may enter
a state and has already satisfied all of the conditions required by the PSEM300 state model for transition to another
state. In this situation, the prober makes the required transition without any additional actions.
8.1.4 Some equipment may need to include additional states. However, any additional states must not change the
PSEM300-defined state transitions. All expected transitions between PSEM300 states must occur.
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure 1
PSEM Process State Model Diagram
8.1.5 Description of Prober Processing States
8.1.5.1 AWAITING COMMAND (SUBSTRATE LOADED Sub-state) — A substrate on the main chuck is ready for
processing. The prober is ready to receive an instruction from the host.
8.1.5.2 AWAITING LOAD (EXECUTING Sub-state) — At least one Process Job is in the PROCESSING state. No
substrate is loaded on the main chuck. The prober is waiting for a host command to load a substrate.
8.1.5.3 EXECUTING (PROCESS Sub-state) — One of the following conditions exists: A) At least one Process Job
is in the PROCESSING state and the prober is processing material as directed by the host. B) A single Process Job
is active in either the STOPPING or ABORTING state and the prober is removing material.
8.1.5.4 IDLE — No Process Jobs are in the ACTIVE state and the processing resource is available without alarms.
8.1.5.5 HANDLING MATERIAL (EXECUTING Sub-state) — The prober is loading a substrate, unloading a
substrate, or a combined action of loading and unloading substrates on the main chuck. When loading a substrate
onto the main chuck, the HANDLING MATERIAL state is maintained until all preconditioning tasks (i.e. aligning,
profiling, etc.) are completed and the substrate is ready for processing. If a condition arises where the substrate on a
chuck must be re-aligned, the HANDLING MATERIAL state is active until the alignment task has completed.
8.1.5.6 MOVING XYZ (SUBSTRATE LOADED Sub-state) — The prober is executing a move command. This state
is maintained until the move is complete. This includes motion in the z-axis. When this state is exited, the target
unit(s) on the substrate is in position to be processed.
8.1.5.7 PROCESS (PROCESSING ACTIVE Sub-state) — This state is the parent of those sub-states that refer to the
preparation and execution of a process job.
8.1.5.8 PROCESSING ACTIVE — The state in which at least one Process Job is active.
8.1.5.9 PROCESSING BLOCKED — The processing resource is not available for processing.
8.1.5.10 SETTING UP (PROCESS Sub-state) — A single ACTIVE Process Job is in the SETTING UP state.
SEMI E130-1104 © SEMI 2003, 2004 5
8.1.5.11 SERVICE TASK (SUBSTRATE LOADED Sub-state) — A service task such as inking, cleaning, or
inspection is being performed by the prober.
8.1.6 PSEM Processing State Transition Table
Table 1 PSEM Processing State Transition Table
#. Current State Trigger New State Action Comment
1 No state The processing resource has
become available for
processing.
IDLE There are no active process
jobs at this time.
2 IDLE A process job has been
dispatched into the
SETTING UP state.
SETTING UP Actions taken correspond
to preconditioning
activities within the SEMI
E40 Process Job.
3 SETTING UP A single Process Job is
active and has transitioned
from the SETTING UP state
to the PROCESSING state.
AWAITING
LOAD
The prober is awaiting
instructions from the host to
load a substrate on to the
main chuck. The Process
Job PRMtlNameList
contains the list of substrates
to be processed.
4 AWAITING
LOAD
Prober has received a
command from the host to
load a substrate on to the
main chuck.
HANDLING
MATERIAL
The equipment is loading
a substrate on the main
chuck.
None.
5 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. A
Process Job is in the
PROCESSING state.
AWAITING
LOAD
See Section 17 for a
description of the prober
behavior related to material
handling.
6 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. There
are no active Process Jobs.
IDLE
7 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. There
are no Process Jobs in the
PROCESSING state. A
Process Job is in the
SETTING UP state.
SETTING UP
8 HANDLING
MATERIAL
The material handling task
completes. A substrate
located on the main chuck
has been fully setup and is
ready to receive processing
as directed by the host.
AWAITING
COMMAND
All pre-processing steps
including profiling, aligning,
temperature soak, etc. have
completed.
See Section 22.4 for the list
of remote commands the
host can issue while the
prober is in the AWAITING
COMMAND state.
9 AWAITING
COMMAND
The host issued a material
handling related remote
command.
HANDLING
MATERIAL
The prober performs the
task as commanded by the
host.
See Section 17 for a
description of the commands
the host may issue relating to
material handling.
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#. Current State Trigger New State Action Comment
10 AWAITING
COMMAND
The prober receives a
motion related remote
command.
MOVING XYZ The prober moves the
main chuck to the
specified location on the
substrate.
See Section 17 for a
description of the motion
related commands the host
can issue to trigger this
transition.
See the Collection Event
Table Section 19.2 for the
list of required data items
associated with this
transition.
11 MOVING XYZ The prober has completed
the motion related task and
waits for further instructions
from the host.
AWAITING
COMMAND
Prober waits for further
instructions from the host.
12 AWAITING
COMMAND
The prober received a
remote command specifying
a service task.
SERVICE TASK See Section 16 for a
description of the prober
actions related to
performing a service task.
13 SERVICE
TASK
The prober has completed a
service task.
AWAITING
COMMAND
Prober waits for further
instructions from the host.
14 SERVICE
TASK
The prober is configured to
perform a subsequent
service task upon
completing a current service
task.
SERVICE TASK See Section 16 for a
description of the prober
actions related to
performing a service task.
Example: The recipe may
call for a probe card
inspection to automatically
follow a probe clean service
task.
15 PROCESS The processing resource has
become unavailable.
PROCESSING
BLOCKED
No further processing is
possible.
The cause of this trigger can
be an internal interrupt or an
external command from the
operator or host.
16 PROCESSING
BLOCKED
The processing resource has
become available or the
prober is handling material
in the process of terminating
a job.
PROCESS Sub-
state
See Section 8.1.7 for the
conditional return state.
If the job(s) have been
terminated, the HANDLING
MATERIAL state will be
occupied while the material
is being removed from the
prober.
17 IDLE An alarm state is entered
that causes the processing
resource to be unavailable
for processing.
IDLE WITH
ALARMS
18 IDLE WITH
ALARMS
The alarm condition has
been cleared.
IDLE
8.1.7 Process Model Conditional Table
Table 2 Process Model Conditional Table
Conditions Next State
The current Process Job is terminating HANDLING MATERIAL
The processing resource has become available and the current
Process Job remains active
Previous EXECUTING state