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SEMI E6-0303 © SEMI 1982, 2003 11 12.2.22 Process Cycle Energy (400AK) — Enter the total electrical energy cons umed du ring the equi pment processing cycle. 12.2.23 Power Char acterizati on Plot (400AL) — Enter yes if p…

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SEMI E6-0303 © SEMI 1982, 2003 10
12 Electrical Power Data Sheet
12.1 Include in Data Sheet 400, Electrical Power the
requested information for equipment connections to
facilities systems including but not limited to electrical
power distribution and conditioning systems.
12.2 Data Sheet 400, Electrical Power contains the
following items.
12.2.1 Equipment Component (400A) — Enter the
name of the equipment component where the
connection is located. The name should the same name
used in Data Sheet 200 and 300. For example:
Mainframe, Vacuum Pump, or Chiller.
12.2.2 Electrical Power Connection Number (400B) —
Enter a unique connection number for every utility
connection. For example: 401, 402, 403, and so on.
12.2.3 Connection Label on Equipment (400C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example
input power or power ground.
12.2.4 Utility Type (400D) — Enter the name of
electrical service to be provided through the connection.
Examples: Normal Power, Conditioned Power,
Uninterruptible Power, Standby Power and Emergency
Power. If selection is not Normal Power, specify reason
in Electrical Power Comments cell.
12.2.5 Line Source (400E) — Identify the source of the
supply line for this connection. If the line comes from a
provided component covered in the data sheets enter the
connection number(s) at the other end of the line. If the
line comes from a facilities source enter facilities
system. For example: 403 or facilities system.
12.2.6 Voltage/Phase/Wire (400F) — Enter the
necessary voltage, number of phases, and number of
wires for the component connection. Ground wires will
be designated separately. For example: 480V/3 Phase/4
Wire + ground or 120V/1 Phase/2 Wire + ground.
12.2.7 Frequency (400G) — Enter the power frequency
of electrical service specified.
12.2.8 Equipment Component Connection Type (400H)
— Enter the method of connection to the component
and a description of the connection on the equipment.
Include the appropriate code (such as NEMA, CEE,
CEI, or ICE), suffix for plug connection, and lug
type/size for hardwire connection. For examples: Plug
NEMA 20P or Hardwire mechanical lug/#6-#2 wire per
phase.
12.2.9 Ampere Interrupting Capacity (400I) — Enter
the ampere interrupting capacity (AIC) rating.
12.2.10 Full Load Amps Phase A, B, C, Neutral (400J,
400K, 400L, 400M) — Enter the nameplate full load
amperage rating for the electrical utility connection,
voltage, and frequency.
12.2.11 Branch Circuit Protection (400N) — Enter the
supplier recommended fuse or breaker setting necessary
to protect the branch circuit supplying power to the
equipment connection.
12.2.12 Real Power Idle Average (400O) — Enter the
average true real power demand for the equipment idle
condition. Real power is the time average of the
instantaneous product of voltage and current. Real
power is expressed in Watts.
12.2.13 Real Power Process Average (400P) — Enter
the average true real power demand for the equipment
processing cycle.
12.2.14 Real Power Maximum (400Q) — Enter the
maximum one second average true real power demand
(value for equipment processing cycle or idle condition,
whichever is greater).
12.2.15 Apparent Power Idle Average (400R) — Enter
the average true RMS apparent power demand for the
equipment idle condition. Apparent power is the
product of RMS volts and RMS amps. Apparent power
is expressed in VA, volt-amps.
12.2.16 Apparent Power Process Average (400S) —
Enter the average true RMS apparent power demand for
the equipment processing cycle.
12.2.17 Apparent Power Maximum (400T) — Enter the
maximum one second average true RMS apparent
power demand (value for the equipment processing
cycle or idle condition, whichever is greater).
12.2.18 Current Idle Average Phase A, B, C, Neutral -
(400U, 400V, 400W, 400X) — Enter the average true
RMS current for the equipment idle condition.
12.2.19 Current Process Average Phase A, B, C,
Neutral (400Y, 400Z, 400AA, 400AB) — Enter the
average true RMS current for the equipment processing
cycle.
12.2.20 Current Maximum Phase A, B, C, Neutral
(400AC, 400AD, 400AE, 400AF) — Enter the
maximum one second average true RMS current (value
for equipment processing cycle or idle condition,
whichever is greater).
12.2.21 Current THD Phase A, B, C, Neutral (400AG,
400AH, 400AI, 400AJ) — Enter the true RMS current
Total Harmonic Distortion (THD) value that is time
coincident with the reported Apparent Power Maximum
value.
SEMI E6-0303 © SEMI 1982, 2003 11
12.2.22 Process Cycle Energy (400AK) — Enter the
total electrical energy consumed during the equipment
processing cycle.
12.2.23 Power Characterization Plot (400AL) — Enter
yes if power consumed through this connection is
represented in the Equipment Power Characterization
Plot provided with this data sheet. If entry is No,
specify reason in Electrical Power Comments cell.
Submit with the electrical power data sheet, a
characterization plot of the one second average true
power demand (kW) versus time for a complete
equipment processing cycle and for equipment idle
condition. This plot should represent the electrical
power demand of the entire equipment (vs. a single
connection). See Figure 1.
12.2.24 Drawing References (400AM) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: wiring diagram XXXXX or
voltage sag characterization test report YYYYY. Be
sure to submit referenced material to equipment
purchaser with data sheets.
12.2.25 Electrical Power Comments (400AN) —
Enter
any comments necessary to clarify information given
for this connection.
Figure 1
Equipment Power Characterization Plot
SEMI E6-0303 © SEMI 1982, 2003 12
Data Sheet 400 - Electrical Power (See SEMI E6 section 12)
400 Electrical Power
A B C D E F G H
1
Equipment
Component
Electrical
Power
Connection
Number
Connection
Label on
Equipment
Utility
Type
Line Source Voltage/Phase
/Wire
Frequency Equipment
Component
Connection
Type
2
text text text text text text Hz text
3
4
5
6
400 Electrical Power
I J K L M N
1
Ampere
Interrupting
Capacity
Full Load Amps
Phase A
Full Load Amps
Phase B
Full Load Amps
Phase C
Full Load Amps
Neutral
Branch Circuit
Protection
2
amps amps amps amps amps amps
3
4
5
6
400 Electrical Power
O P Q R S T
1
Real Power Idle
Average
Real Power
Process Average
Real Power
Maximum
Apparent Power
Idle Average
Apparent Power
Process Average
Apparent Power
Maximum
2
kW kW kW kVA kVA kVA
3
4
5
6
400 Electrical Power
U V W X Y Z AA AB
1
Current Idle
Average
Phase A
Current Idle
Average
Phase B
Current Idle
Average
Phase C
Current Idle
Average
Neutral
Current
Process
A
verage Phase
A
Current
Process
A
verage Phase
B
Current
Process
A
verage Phase
C
Current
Process
Average
Neutral
2
amps amps amps amps amps amps amps amps
3
4
5
6