semi合集-English.pdf - 第7674页
SEMI T6-0697 © SEMI 1997, 2004 27 Segment: REF Reference Numbers Level: Detail Loop: MEA Usage: Optional Max Use: 10 Purpose: To specify identifying numbers. Syntax Notes: 1 At lease one of REF02 or REF03 is required. Co…
SEMI T6-0697 © SEMI 1997, 2004 26
X MEA03 739 Measurement Value X R 1/20
The value of the measurement.
X MEA04 C001 Composite Unit of Measure X
To identify a composite unit of measure (see figures in appendix for examples of use).
M C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
ZZ Mutually Defined
Standardized default unit of measure for each parameter to be
published by SEMI as part of the procedure. Optionally, standard
code set may be used.
O C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
O C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
X MEA05 740 Range Minimum X R 1/20
The value specifying the minimum of the measurement range.
X MEA06 741 Range Maximum X R 1/20
The value specifying the maximum of the measurement range.
O MEA07 935 Measurement Significance Code O ID 2/2
Code used to benchmark, qualify, or further define a measurement value.
03 Approximately
04 Equal to
05 Greater than or equal to
06 Greater than
07 Less than
08 Less than or equal to
10 Not equal to
22 Actual
31 Calculated
39 Corrected
40 Uncorrected
43 Intermediate
44 Average [based on an average parameter or standard]
X MEA08 936 Measurement Attribute Code X ID 2/2
Code used to express an attribute response when a numeric measurement value cannot
be determined.
Other codes available.
05 Undetectable
09 Pass
12 OK
21 Checked
23 Absent
29 To Be Determined
44 Not Applicable
45 Not Determined
51 Conforming
SEMI T6-0697 © SEMI 1997, 2004 27
Segment: REF Reference Numbers
Level: Detail
Loop: MEA
Usage: Optional
Max Use: 10
Purpose: To specify identifying numbers.
Syntax Notes: 1 At lease one of REF02 or REF03 is required.
Comments: May be used when describing serialized or positional-dependent data.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M REF01 128 Reference Number Qualifier M ID 2/2
Code qualifying the Reference Number.
55 Sequence Number
6K Zone
Wafer site or other measurement location identification.
BG Beginning Serial Number
EG Ending Serial Number
QQ Unit Number
Used to identify the parameter sample size.
SE Serial Number
Serialization reference number applicable to the measurement.
SJ Set Number
Reference to the laser mark on a wafer (verbatim).
X REF02 127 Reference Number X AN 1/30
Reference number or identification number as defined for a particular Transaction Set,
or as specified by the Reference Number Qualifier.
X REF03 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.
SEMI T6-0697 © SEMI 1997, 2004 28
Segment: STA Statistics
Level: Detail
Loop: STA
Usage: Optional
Max Use: 1
Purpose: To provide summary statistics related to a specific collection of test result values.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M STA01 950 Statistic Code M ID 2/2
A code specifying the specific statistic being reported.
Complete list from Standard is available. Typical parameters are indicated. Other
parameters may be defined to accommodate proprietary statistical formats.
01 Cusum Delta
02 Cusum - H
03 Cusum - K
04 Capability Ratio
05 F - Test
06 Control Limit Lower - Individual
07 Control Limit Upper - Individual
08 T - Test
09 Grand Average (Double X-Bar)
10 Kurtosis
11 Mean Average
12 Median
13 Minimum Average
14 Median Range
15 Maximum Average
16 Process Capability Upper
17 Process Capability Lower
18 Process Capability CPK
19 Range Average (R-Bar)
20 Control Limit Lower R-Bar
21 Control Limit Upper R-Bar
22 Range Value (Total Range)
23 Standard Deviation
24 Standard Error
25 Skewness
26 Control Limit Lower X-Bar
27 Control Limit Upper X-Bar
28 Failure Rate in Time (failures over time determined by the equation
(failure rate*10^9))
29 Mode
30 Average