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SEMI P10-0705 © SEMI 1990, 2005 154 RELATED INFORMATION 2 SEMI PHOTOMASK ORDER DATA FILE EXAMPLE NOTICE : The information contained in this related information is not an official part of SEMI P10, and it is not intended …
SEMI P10-0705 © SEMI 1990, 2005 153
CD_DEVIATION_FROM_TARGET — Maximum acceptable deviation of any of
the customer-required CD measurements from the CD_TARGET.
If only one data value (p) appears in the data field, the tolerance is considered +/-
symmetrically about CD_TARGET.
If two data values ( p [,m] ) appear, then the first is the maximum amount by
which deviation is allowed larger than CD_TARGET, and the second is the
maximum amount by which deviation is allowed smaller than CD_TARGET. The
comma and second half of the argument are optional in the syntax (p[,m]) where
p = the plus and m = the minus value for non-symmetric tolerances; if only p is
specified, the plus and minus values are assumed to be symmetric.
p
p
p
m
CD_THREE_SIGMA — Maximum acceptable 3-sigma deviation of all measured
critical dimensions to the the mean of all measured critical dimensions
CD_XY_DEVIATION — Maximum deviation, on a site-by-site basis, of a
horizontal critical dimension to a vertical critical dimension. The two critical
dimensions at each site must be the same size in the pattern data and the
same tone on the mask.
CD_XY_TOLERANCE — Maximum acceptable deviation of the mean of all
measured horizontal critical dimensions to the mean of all measured vertical
mask critical dimensions. Critical dimensions at all sites must be the same size in
the pattern data.
Distribution of
X
vs Y
Horizontal Vertical
SEMI P10-0705 © SEMI 1990, 2005 154
RELATED INFORMATION 2
SEMI PHOTOMASK ORDER DATA FILE EXAMPLE
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not
intended to modify or supercede the official standard. Rather, this example is offered as an aid to visualizing
possible output from software which might implement the standard.
EXAMPLE: A pair of 4-die 5 reticles with separate scribe, barcode, and rms alignment marks. Critical dimensions
are defined as pattern options.
barcode
rms
mark
mask title 1
mask title 2
rms
mark
SEMI P10-0705 © SEMI 1990, 2005 155
START_ORDER MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00Z
MASK_SET_ID 9999 !<mask_set>
BILLING_CONTACT Jean Doe, Accounts Payable !<mask_set_options>
BILLING_ADDRESS Company Name
BILLING_ADDRESS Street Address
BILLING_ADDRESS City, State ZIP
BILLING_PHONE 4085551212
PRICE_UNITS USD
SHIPPING_CONTACT Joe Doe, Wafer Fab
SHIPPING_ADDRESS Company Name
SHIPPING_ADDRESS Street Address
SHIPPING_ADDRESS City, State ZIP
SHIP_CD_DATA T
START_SHIP_TO CD
EMAIL_ADDRESS CD_Engineer@Fab.com
END_SHIP_TO CD
SHIP_CD_DATA T
START_SHIP_TO CD Data
EMAIL_ADDRESS MaskEngineer@Fab.com
END_SHIP_TO CD Data
DATA_MEDIUM 9 TRACK_TAPE
DATA_ID DEVICE 9999
DATA_FORMAT MEBES
DATA_DENSITY 1600BPI
DATA_PATTERN_NAME VT9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME VT9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
END_DATA_MEDIUM 9 TRACK_TAPE
STD_PATTERN_NAME GCARMSB-OX-AA
PATTERN_FORMAT MEBES_RETICLE
END_MASK_SET_OPTIONS 9999
!
MASK_GROUP_ID 5X !<mask_group>
BLANKET_PO_NUMBER 101055C
RELEASE_NUMBER 42
MILESTONES T