semi合集-English.pdf - 第3962页

SEMI F40-0699 © SEMI 1999 6 Po ly mer mat eri al s amp le to be tested Surfac e C ontami nation Extract ion Anal ysis Componen t B ulk P o ly m er Anal ysi s Clean i f req u ir ed Component a nd bla nk e xtra cti on flui…

100%1 / 7923
SEMI F40-0699 © SEMI 19995
ASTM D859 — Standard Test Method for Silica in
Water
ASTM D1068 — Standard Test Method for Iron in
Water
ASTM D1353 — Standard Test Method for Nonvolatile
Matter in Volatile Solvents for Use in Paint, Varnish,
Lacquer, and Related Products
ASTM D4327 — Standard Test Methods for Anions in
Water by Ion Chromatography
ASTM D4779 — Standard Test Method for Total,
Organic, and Inorganic Carbon in High Purity Water by
Ultraviolet (UV) or Persulfate Oxidation or Both, and
Infrared Detection
13.2 SEMATECH Documents
2
SEMATECH 92010935B–STD — Provisional Test
Method for Electrical Resistivity of UPW
SEMATECH 92010936B–STD — Provisional Test
Method for the Determining Leachable Trace
Inorganics from UPW Distribution System Components
SEMATECH 92010937B–STD — Provisional Test
Method for Evaluating Bulk Polymer Samples of UPW
Distribution System Components (FTIR Method)
SEMATECH 92010938B–STD — Provisional Test
Method for Determining Bulk Trace Metals in Polymer
Materials for UPW Distribution System Components
SEMATECH 92010939B–STD — Provisional Test
Method for Evaluating Bulk Polymer Samples of UPW
Distribution System Components (DSC and TGA
Methods)
SEMATECH 92010940B–STD — Provisional Test
Method for Determining the Water Retention Capacity
of Ion-Exchange Resins Used in UPW Distribution
Systems
2
SEMATECH. 2706 Montopolis Dr. Austin, TX 78741.
SEMI F40-0699 © SEMI 1999 6
Polymer
material sample
to be tested
Surface Contamination
Extraction Analysis
Component
Bulk Polymer
Analysis
Clean if required
Component and blank
extraction fluid
samples to be tested
Flush
Analytical
test method
Soak
Pre-clean
caps and containers
covered in this practice
covered in test methods
(see Table 3 and Related
Documents)
Analytical
test method
Figure 1
Summary of Practice
Table 1 Component Handling for Extraction Test Preparation
Component No. of Flushes
x
Flush Time (min.)
Soak Time Capped Component
or
Container
Container Material Section
Tubing,
Piping
10 x 2 min. 1 week capped component N/A 9.5.4
Valves,
Regulators,
Fittings
10 x 2 min. 1 week capped component N/A 9.5.5
Filter Housings 10 x 2 min. 1 week capped component N/A 9.5.6
O-rings,
Gaskets
10 x 2 min. 1 week container PFA
FEP
PP
glass
(see NOTE*)
9.6.4
* NOTE: The container and transfer vessel materials used depend on the test to be performed. Use the following
materials for the noted test methods.
Test Method Material
TOC, NVR glass
anions PP, glass
inorganics, resistivity, silica PFA, FEP
SEMI F40-0699 © SEMI 19997
Table 2 Material Requirements for Bulk Analysis
Inorganics FTIR Thermal
Analysis
Water
Absorption
Weight (gms) 1–2 < 5 0.007–0.01 10
Detection
Limit
0.1 ppm N/A N/A 0.1%
Table 3 Reporting Units for Aqueous Liquid Components
Test Method Aqueous Liquid Component Reporting Units
Leachable Trace Inorganics,
Anions, TOC
tubing, piping, valves, regulators, fittings,
gaskets, O-rings, filter housings
µg/cm
2
Bulk Trace Inorganics
tubing, piping, valves, regulators, fittings,
gaskets, O-rings, filter housings
µg/cm
2
Nonvolatile Residue tubing, piping, valves, regulators, fittings,
gaskets, O-rings, filter housings
µg/cm
2
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.