semi合集-English.pdf - 第3261页

SEMI E127.1-0705 © SEMI 2004, 2005 6 Attribute Name Range/Value SECS-II Format RetentionRules List of enumerated text L, n 1. <A[1 ,80]> . . n. <A[1,80] > Service Enumerated: 0 = OUT OF SERVICE 1 = IN SERVICE…

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SEMI E127.1-0705 © SEMI 2004, 2005 5
6.6 Table 6 provides the mappings from ErrorCodes in SEMI E127 to ERRCODE values in SEMI E5.
Table 6 ErrorCode Mappings to ERRCODE Values
Service Valid Logical Values for ErrorCode ERRCODE
ClientConnect Client Already Connected
Duplicate ClientID
Invalid ClientType
IncompatibleVersions
32772 = Client Already Connected
32773 = Duplicate ClientID
32774 = Invalid ClientType
32775 = IncompatibleVersions
ClientDisconnect Unrecognized ClientID (Client not currently connected)
32776 = Unrecognized ClientID (Client
not currently connected)
XfrCommand Rejected/Unrecognized Command
Rejected/Parameter Error
32771 = Invalid command
47 – Invalid Parameter
XfrCommand
XfrVerify
Failed (Completed Unsuccessfully)
Failed (Unsafe) – External intervention required
32777 = Failed (Completed
Unsuccessfully)
32778 = Failed (Unsafe) – External
intervention required
XfrVerify Sensor-Detected Obstacle
Material Not Sent
Material Not Received
Material Lost
Hardware Failure
Transfer Cancelled
32779 = Sensor-Detected Obstacle
32780 = Material Not Sent
32781 = Material Not Received
32782 = Material Lost
32783 = Hardware Failure
32784 = Transfer Cancelled
All other services Action performed – no errors
Action will be performed at earliest opportunity
Action can not be performed now
Action failed due to errors
Unrecognized command
At least one parameter has an error
0 - No error.
32768 = Action will be performed at
earliest opportunity
32769 = Action can not be performed
now
32770 = Action failed due to errors
32771 = Invalid command
47 – Invalid Parameter
7 Object Attribute Form
7.1 §7 defines the SECS-II form of the attributes of objects defined in IMMC, presented in alphabetical order. Note
that attribute names in this section indicate the literal text string that shall be accepted in string comparisons for
attribute names in Stream 14 messages.
7.2 By convention, all tables include ObjID as well as ObjType as the two attributes required by SEMI E39.
Table 7 specifies the attributes of the Integrated Measurement Module.
Table 7 Integrated Measurement Module Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType “IMM” A[3]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
EventList List of 0+ text/integer pairs L,n
1. L,2
1. <A[1,80]
2. <U2 or U4>
.
n. L,2
1. <A[1,80]
2. <U2 or U4>
SEMI E127.1-0705 © SEMI 2004, 2005 6
Attribute Name Range/Value SECS-II Format
RetentionRules List of enumerated text L, n
1. <A[1,80]>
.
.
n. <A[1,80]>
Service Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
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SubstrateList List of 0+ OBJID L, n
1. <A[1,80] >
.
.
n. <A[1,80]>
TableCapacity 0–65,535 U2
TableCount 0–65,535 U2
TableStorageAlert -- I(), F8
7.3 Substrate Transfer Path Object — Table 8 specifies the elements of the Substrate Transfer Path Object.
Table 8 Substrate Transfer Path Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “SubstrateTransferPath”. A[21]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
EventList List of 0+ text/integer pairs. L,n
1. L,2
1. <A[1,80]
2. <U2 or U4>
.
n. L,2
1. <A[1,80]
2. < U2 or U4>
SubstrateList List of 0+ OBJID. L, n
1. A[1,80]
.
n. A[1,80]
SubstIDRead Text. Conforms to restrictions for SubstID in SEMI E90,
SEMI E90.1.
A[1,80]
TransferState Enumerated text:
“ASSIGNED”
“BLOCKED”
“READY TO LOAD”
“READY TO UNLOAD”
A[7,15 ]
7.4 Data Table Object — Table 9 specifies the attributes of the Data Table Object.
Table 9 Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableData” A[9]
SEMI E127.1-0705 © SEMI 2004, 2005 7
Attribute Name Range/Value SECS-II Format
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
RowTemplateID OBJID for associated Row Template Object A[1,80]
7.5 IMM Data Table Object — Table 10 specifies the attributes of the IMM Data Table Object. Note that the IMM
Data Table Object inherits the attributes of a Data Table Object (Table 9).
Table 10 IMM Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_Data”. A[13]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
DataValidity Enumerated:
1 = Valid and Complete Data
2 = Incomplete Data
3 = Out-of-specification Data
>3 reserved
U2
EventList List of 0+ text/integer pairs. L,n
1. L,2
1. <A[1,80]
2. <U2 or U4>
.
n. L,2
1. <A[1,80]
2. <U2 or U4>
IMM_ID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
LotID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ProcessFlowStep Text. A[1,80]
ProcessRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ProcessToolID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
RegionRanges List of 2 integers. L,2
1. <U2>
2. <U2>
Status Enumerated:
1 = IN PROCESS
2 = IN RETENTION
U2
Substid Text. Conforms to restrictions for SubstID in SEMI E90,
SEMI E90.1.
A[1,80]
SubstidRead Text. Conforms to restrictions for SubstID in SEMI E90,
SEMI E90.1
A[1,80]
SubstrOrientation Non-negative floating point. F8
SubstrSide Enumerated:
1 = Front
2 = Back
3 = Both
U2
Summary List of 0+ SummaryData structures. Ref. Table 11
TimeComplete Timestamp format. A[16]
TimeStart Timestamp format. A[16]
TimeStampFormat Enumerated:
0 = Text
> 0 Reserved
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