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SEMI M21-0304 © SEMI 1992, 2004 7 RELATED INFORMATION 1 AN EXAMPLE OF ASSIGNING ADDRESSES TO AN ARRAY NOTICE: This relate d inform ation is not an official part of SEMI M 21. It was develope d during the original devel o…
SEMI M21-0304 © SEMI 1992, 2004 6
Figure 4
Tiled Element Numbering
Figure 5
All Elements Numbered
SEMI M21-0304 © SEMI 1992, 2004 7
RELATED INFORMATION 1
AN EXAMPLE OF ASSIGNING ADDRESSES TO AN ARRAY
NOTICE: This related information is not an official part of SEMI M21. It was developed during the
original development of the document. This related information was approved for publication by full
letter ballot on October 16, 2003.
R1-1 An example of a regular 29-column by 9-row
array, truncated for application to a wafer, is shown in
Figure R1-1. The Starting Element includes the array
center because there are odd numbers of both columns
and rows. In addition, Figure R1-1 shows the element
addresses for elements along the right half of the
horizontal array centerline, for elements along column
1, and for selected other elements in the array. Also
shown are the left hand corner elements (which lie
outside the truncated array).
R1-2 Figure R1-2 shows the same truncated array
fitted onto a wafer. Because the truncation is not
symmetrical around the vertical array centerline, the
array center is located to the left of the wafer center.
Figure R1-1
Array Truncated for Application to a Wafer
SEMI M21-0304 © SEMI 1992, 2004 8
Figure R1-2
Truncated Array on the Wafer