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SEMI F59-0302 © SEMI 2000, 2002 10 Nor mal Fl ow Rate Differential P ressure Test Pressure 1 Test Pressure 2 Test Pressure 3 Figure 4 Exam ple of a Flow Pressure Drop Curve for a Filter NOTICE: SEMI makes no w arranties …
SEMI F59-0302 © SEMI 2000, 2002 9
Table 2 Filter Flow Pressure Drop for Housing with Cartridge Element Removed
Filter Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Housing with Cartridge Removed
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Housing)
Differential Pressure,
H
ousing
(psid, differential)
Flow Meter
Reading (units)
Normal
Flow Rate
(m
3
/hr)
Table 3 Filter Flow Pressure Drop for Cartridge Element
Cartridge Pressure Drop
∆P(cartridge) = ∆P(Unit) – ∆P(Housing)
Normal Flow Rate
(m
3
/hr)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
∆
P(Housing) Differential
Pressure, Housing
(psid, differential)
∆
P(cartridge) Differential
Pressure, Cartridge
(psid, differential)
SEMI F59-0302 © SEMI 2000, 2002 10
Normal Flow Rate
Differential Pressure
Test Pressure 1
Test Pressure 2
Test Pressure 3
Figure 4
Example of a Flow Pressure Drop Curve for a Filter
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express writte
n
consent of SEMI.
SEMI F60-0301 © SEMI 20011
SEMI F60-0301
TEST METHOD FOR ESCA EVALUATION OF SURFACE
COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L
STAINLESS STEEL COMPONENTS
This test method was technically approved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. Current edition approved by the North American Regional
Standards Committee on November 22, 2000. Initially available at www.semi.org December 2000; to be
published March 2001.
1 Purpose
1.1 The purpose of this document is to define a
method for testing passivated 316L stainless steel
components being considered for installation into a
high-purity gas distribution system. Application of this
test method is expected to yield comparable results
among components tested for the purposes of
qualification for this installation.
1.2 This document defines a method of testing the
interior surfaces of stainless steel tubing, fittings,
valves, and other components to determine the surface
composition and chemistry, as a measure of the
effectiveness of passivation processes.
1.3 The objective of this method is to describe a
general set of instrument parameters and conditions that
will achieve precise and reproducible measurements of
important surface chemistry within the chromium-
enriched oxide layer.
2 Scope
2.1 This document describes a test method to
characterize “as received” surface composition and
chemistry encompassing all chromium-enriched
stainless steel surfaces in tubing, fittings, valves, and
other components. This procedure involves
measurement of total Cr/Fe ratios, Cr
ox
/Fe
ox
oxide
species ratios, and the surface elemental compositions
by Electron Spectroscopy for Chemical Analysis
(ESCA), also called X-ray Photoelectron Spectroscopy
(XPS).
2.2 This document also describes the test method for a
compositional ESCA depth profile measurement for Cr,
Fe, Ni, O and C from the as-received surface, through
the oxide layers, and extending into the base metal.
The depth profile measurement evaluates the oxide
thickness and the relative composition throughout the
modified surface layer as a result of the passivation
process.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Limitations
3.1 This test method is intended to be used by ESCA
analysts familiar with the instrumentation and
technique. The ESCA instrument must be calibrated
and maintained to pertinent manufacturer’s
specifications. The method is not intended to preclude
the use of any particular brand or model of surface
analysis equipment. While most of the test
methodology has been developed using specific
instrumentation, this method can be adapted to most
surface analytical instrumentation.
3.2 The effects of the depth of analysis of the
technique and surface contamination affect the results
of this test method. These are discussed in the attached
appendix. Surface roughness, non-planarity of the
surface, and differential sputtering rates for the different
chemical species also cause measurement uncertainties
in this test method
4 Referenced Standards
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
4.1 SEMI Standards
SEMI F19 — Specification for the Finish of the Wetted
Surfaces of Electropolished 316L Stainless Steel
Components.
4.2 ASTM Standards
1
A276 — Standard Specification for Stainless Steel Bars
and Shapes.
A751 — Standard Test Methods, Practices, and
Terminology for Chemical Analysis of Steel Products.
E673 — Standard Terminology Relating to Surface
Analysis.
E902 — Standard Practice for Checking the Operating
Characteristics of X-ray Photoelectron Spectrometers.
1 American Society for Testing and Materials, 1916 Race Street,
Philadelphia, PA 19103