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SEMI S14-0704 © SEMI 2000, 2004 10 APPENDIX 2 ASSESSMENT OF THE FIRE PR OPERTIES OF MATERIALS NOTICE : The material in this appendix is an o fficial part of SEMI S14 and was approve d by full letter ballot procedures on …
SEMI S14-0704 © SEMI 2000, 2004 9
A1-3.2 “System” refers to the equipment as configured and offered by the supplier.
A1-4 Risk
A1-4.1 The Risk should be calculated based on the Severity and Likelihood assigned above and the Risk Categories
defined in Table A1-3.
Table A1-3 Risk Categories
Likelihood
Severity A B C D E
1 Critical Critical High Medium Low
2 Critical High Medium Low Low
3 High Medium Low Low Slight
4 Medium Low Low Slight Slight
A1-4.2 The Risks are to be reported in total for the equipment as offered for sale. (e.g., if the equipment being
evaluated is a cluster tool, the risks should be reported by the system integrator for the assembled tool, not the
individual modules.)
NOTE A1-2: Although the risks for cluster tools should be reported for the assembled tool, the modules are not necessarily
contiguous and this may bear on the risk.
NOTE A1-3: The Risks of components or subsystems may be increased or decreased by their integration into the equipment
being assessed.
SEMI S14-0704 © SEMI 2000, 2004 10
APPENDIX 2
ASSESSMENT OF THE FIRE PROPERTIES OF MATERIALS
NOTICE: The material in this appendix is an official part of SEMI S14 and was approved by full letter ballot procedures on
September 3, 1999 by the North American Regional Standards Committee.
A2-1 This Appendix describes the qualitative criteria
for evaluating some of the relevant fire properties of
materials. It also provides references to several
standards which may be used in these evaluations.
Each of the standards listed defines test methods and
provides quantitative criteria for consideration.
A2-2 Preferable Materials:
A2-2.1 Require higher heat fluxes to be ignited.
A2-2.2 Once ignited may burn locally in the ignition
area, but they will not propagate a fire beyond the
ignition zone.
A2-2.3 Generate lower quantities of smoke and
corrosive products or generate smoke and corrosive
products that are less damaging.
A2-3 The following standards provide means of
assessing the fire properties of materials. Each of these
standards specifies the types of materials and uses of
materials to which it applies and the fire properties that
its application assesses. Therefore, each must not be
used outside of the scope for which it was written. It
may be appropriate to use different standards for
assessing the materials used in different components in
the equipment.
NOTE A2-1: There are many other standard methods
available for characterizing the fire properties of materials and
it is not the intent of the document to exclude methods other
than those listed here, as long as the methods are applied
appropriately.
A2-3.1 Factory Mutual Research Corp.
Standard 4910,
Clean Room Materials Flammability Test Protocol
A2-3.2 Underwriters Laboratory Standard 94, Tests for
Flammability of Plastic Materials for Parts in Devices
and Appliances
A2-3.3 Underwriters Laboratories Standard 746A,
Polymeric Materials - Short Term Property Evaluations
A2-3.4 Underwriters Laboratories Standard 746B,
Polymeric Materials - Long Term Property Evaluations
A2-3.5 Underwriters Laboratories Standard 746C,
Polymeric Materials - Use in Electrical Equipment
Evaluations
A2-3.6 Underwriters Laboratories Standard 900,
Standard for Safety for Air Filter Units
A2-3.7 Underwriters Laboratories Standard 2360,
Standard for Test Methods for Determining the
Combustability Characteristics of Plastics Used in
Semiconductor Tool Construction
NOTE A2-2: Although the list includes, for some materials,
more than one document that could be applied, the intent is to
provide alternatives, not to suggest that testing to more than
one standard be performed.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI S14-0704 © SEMI 2000, 2004 11
RELATED INFORMATION 1
TEST PROTOCOL FOR WET BENCH MATERIALS PROCESS
COMPATIBILITY
NOTICE: This related information is not an official part of SEMI S14 and is not intended to modify or supersede the official
guideline. It has been derived from the cited work. Publication is authorized by vote of the responsible committee. Determination
of the suitability of this material is solely the responsibility of the user.
R1-1 SEMATECH has published the results of a study
on testing of polymeric materials for use in wet
benches. The Abstract and citation are provided as
Related Information 1 to SEMI S14, Safety Guidelines
for Fire Risk Assessment and Mitigation for
Semiconductor Manufacturing Equipment as the
responsible committee believes the information in this
document may be of use in identifying materials that
are appropriate for the described applications and
consistent with appropriate management of fire risks.
R1-2 The report, SEMATECH Document ID #:
98123623A-ENG, entitled Process Compatibility
Parameters for Wet Bench Plastic Materials, was
written by Archibald Tewarson, Avtar S. Jassal, Latif
Ahmed, and Mark Camenzind and published 30
December 1998.
R1-3 SEMATECH retains the copyright to the
document, but has granted SEMI permission to include
the Abstract and citation in this Safety Guideline. The
complete document (90 pages) is available from
SEMATECH' s web site:
http://www.sematech.org/public/docubase/abstract/tech
-5.htm.
R1-4 Abstract
R1-4.1 This report presents a test protocol of accepted
analytical procedures to determine the process
compatibility parameters for commonly used wet bench
plastic materials (PP, FRPP, and PVC) and proposed
plastic materials (CPVC, ECTFE, and PVDF) that may
be used for wet bench construction. Three industry
standard test methods were used to determine the
outgassing, leaching, and extraction parameters, defined
in combination as the process compatibility parameters.
To supplement them, the presence of critical elements
at the surface of the materials and the condition of the
surface were examined before and after exposure to
water and chemicals. Changes in the mass of plastic
materials as a result of outgassing, leaching, and
extraction were also used to supplement the parameters.
The report includes details of the test procedures, data
analysis, surface topography of the plastic materials,
before and after exposure to water and chemicals, and
discussion of the results.