semi合集-English.pdf - 第1077页
SEMI E5-1104 © SEMI 1982, 2004 19 Name Format Description Values Where Used 32769 = Action can not be performed now 32770 = Action failed due to errors 32771 = Invalid command 32772 = Client Already Connected 32773 = Dup…
SEMI E5-1104 © SEMI 1982, 2004 18
Name Format Description Values Where Used
9 = Verification error
10 = Validation error
11 = Object identifier in use
12 = Parameters improperly
specified
13 = Insufficient parameters
specified
14 = Unsupported option
requested
15 = Busy
16 = Not available for
processing
17 = Command not valid for
current state
18 = No material altered
19 = Material partially
processed
20 = All material processed
21 = Recipe specification
related error
22 = Failed during processing
23 = Failed while not processing
24 = Failed due to lack of
material
25 = Job aborted
26 = Job stopped
27 = Job cancelled
28 = Cannot change selected
recipe
29 = Unknown event
30 = Duplicate report ID
31 = Unknown data report
32 = Data report not linked
33 = Unknown trace report
34 = Duplicate trace ID
35 = Too many data reports
36 = Sample period out of range
37 = Group size to large
38 = Recovery action currently
invalid
39 = Busy with another recovery
currently unable to perform the
recovery
40 = No active recovery action
41 = Exception recovery failed
42 = Exception recovery aborted
43 = Invalid table element
44 = Unknown table element
45 = Cannot delete predefined
46 = Invalid token
47 = Invalid parameter
48 = Load port does not exist
49 = Load port already in use
50 = Missing Carrier
51-63 = Reserved (data formats
51, 52, 54, or 50 must be used)
64-32767 = User defined (data
formats 52, 54, or 50 must be
used)
32768 = Action will be performed
at earliest opportunity
F26, F28;
S15F28, F18,
F20, F22, F24,
F26, F30, F32,
F34, F36, F38,
F40, F42, F44,
F48, F53;
S16F12, F14,
F16, F18, F24,
F26, F28;
S17F2, F4, F6,
F8, F10, F12,
F14
SEMI E5-1104 © SEMI 1982, 2004 19
Name Format Description Values Where Used
32769 = Action can not be
performed now
32770 = Action failed due to
errors
32771 = Invalid command
32772 = Client Already Connected
32773 = Duplicate ClientID
32774 = Invalid ClientType
32775 = IncompatibleVersions
32776 = Unrecognized ClientID
(Client not currently connected)
32777 = Failed (Completed
Unsuccessfully)
32778 = Failed (Unsafe) —
External intervention required
32779 = Sensor-Detected Obstacle
32780 = Material Not Sent
32781 = Material Not Received
32782 = Material Lost
32783 = Hardware Failure
32784 = Transfer Cancelled
32785–32792 reserved for future
use by SEMI E127 service
requests.
32793-65335 Reserved (data
formats 52, 54, or 50 must be
used)
65536 or above = User defined
(data formats 54 or 50 must be
used)
ERRTEXT 20 Text string describing the
error noted in the
corresponding ERRCODE.
Limited to 80 characters
maximum.
S1F20;
S3F16, F18,
F20, F22, F24,
F26, F30, F32;
S4F20, F22,
F23, F33, F35;
S5F14, F15,
F18;
S13F14, F16;
S14F2, F4, F6,
F8, F10, F12,
F14, F16, F18,
F26, F28;
S15F28, F30,
F32, F34, F36,
F38, F40, F42,
F44, F48, F53;
S16F12, F14,
F16, F18, F24,
F26, F28;
S17F4, F8, F14
ERRW7 20 Text string describing error
found in process program.
S7F27
EVNTSRC 20 Object type for Event Source
Objects
S17F5, F9, F10,
F11, F12
EXID 20 Unique identifier for the
exception. Maximum length
of 20 characters.
S5F9, F11, F13,
F14, F15, F17,
F18
SEMI E5-1104 © SEMI 1982, 2004 20
Name Format Description Values Where Used
EXMESSAGE 20 Text which describes the
nature of the exception.
S5F9, F11
EXRECVRA 20 Text which specifies a
recovery action for an
exception. Maximum length
of 40 bytes.
S5F9, F13
EXTYPE 20 Text which identifies the type
of an exception. It is usually
a single word of text.
"ALARM"
"ERROR"
S5F9, F11;
S14F1, F2, F8
FCNID 51 Function Identification
S2F43, F44
FFROT 52 Film Frame Rotation
In degrees from the bottom CW.
(Bottom equals zero degrees.)
Zero length indicates not used.
S12F1, F3
FILDAT 10, 20 Data from the Data Set
The maximum length is the RECLEN
from Open Data Set Data.
S13F6
FNLOC 52 Flat/Notch Location
In degrees from the bottom CW.
(Bottom equals zero degrees.)
Zero length indicates not used.
S12F1, F3, F4
FRMLEN 3(), 5() Formatted Process Program
Length
If greater than zero, indicates
PPID is available as a formatted
process program and its length
in bytes. If zero, the PPID is
not available as a formatted
program. Negative values are
invalid.
S7F34
GRANT 10 Grant code, 1 byte
0 = Permission Granted
1 = Busy, Try Again
2 = No Space Available
3 = Duplicate DATAID
>3 = Equipment Specific Error
Code
4-63 Reserved
S2F2, F40;
S3F16;
S4F26;
S13F12;
S14F24;
S16F2, F12
GRANT6 10 Permission to send, 1 byte
0 = Permission granted
1 = Busy, try again
2 = Not interested
>2 = Other errors
3-63 Reserved
S6F6
GRNT1 10 Grant code, 1 byte
0 = Positive response, transfer
ok
1 = Busy, try again
2 = No space
3 = Map too large
4 = Duplicate ID
5 = Material ID not found
6 = Unknown map format
>6 = Error
7-63 Reserved
S12F6
HANDLE 3(), 5() Logical unit or channel
S13F3, F4, F5,
F6, F7, F8