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SEMI E102-0600 © SEMI 2000 38 R1-2.4 Scenario 4 — Equipment Monito ring and Logical Pa rtition Overflow Con trol MTSC determines- S tk.4 is down, use Stk. 5(priori ty#2)(internal) MTSC determines Stk.7 is full , use Stk.…

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SEMI E102-0600 © SEMI 200037
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
67: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
65: removeFinishedJob(TrJob1)
66: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
69: removeFinishedJob(TrJob2)
70: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
68: informJobStateChange(aJob TrJob2, previousState JobExecuting, newState JobCompleted)
Figure R1-8
Scenario Case 3 (continued)
SEMI E102-0600 © SEMI 2000 38
R1-2.4 Scenario 4 — Equipment Monitoring and Logical Partition Overflow Control
MTSC determines- Stk.4 is down, use Stk. 5(priority#2)(internal)
MTSC determines Stk.7 is full, use
Stk. 8(1st alternate)(internal)
10: Transfer Command to Agt1(carrier 3232,src. eq.1/Port 1, dest. Stk. 2/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt1 (IBSEM)
14: Transfer Command Complete (IBSEM)
19: Transfer Command to Stk. 2 (carrier 3232, src. Stk. 2/Bay_In, dest. Stk. 2/Bay_out)(StockerSEM)
20: Transfer Command Updates from Stk. 2 (Stocker SEM)
21: Transfer Command Complete (StockerSEM)
22: Transfer Command to Ohs1(carrier 3232, src. Stk 2/Bay_Out, dest. Stk. 5/Bay_In)(IBSEM)
23: Transfer Command Updates from Ohs1 (IBSEM)
25: Transfer Command Complete (IBSEM)
17: Stocker 4 status update DOWN (StockerSEM)
12: setMaterialTrackingLocation(MaterialTrackingLocation Agt1)
15: setMaterialTrackingLocation(MaterialTrackingLocation Stk.2)
24: setMaterialTrackingLocation(MaterialTrackingLocationOhs1)
27: setMaterialTrackingLocation(MaterialTrackingLocationStk.5)
2: requestJob (JobType Transport, Priority 1, Deadline time1, container 3232, SourceMachine eq1, SourcePort 1, DestinationMachine Stk7)
6: informJobStateChange(JobType TrJob1, previousState JobQueued, newState JobExecuting)
18: MachineResourceE10StateChangedEvent()
3: Return Job Handle TrJob1
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
26: DurableLocationChangedEvent
28: DurableLocationChangedEvent
7: makeInTransit()
8: MaterialContainerStateChangedEvent
MTSC reserves and manages AMHS equipment capacity(internal)
MTSC determines AMHS route(internal)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
1: setUnit(unitvalue)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-9
Scenario Case 4
SEMI E102-0600 © SEMI 200039
Stk.7 now
available.
31: Transfer Command to Stk.5( carrier 3232, src. Stk. 5/Bay_In, dest. Stk. 5/Bay_Out() (StockerSEM))
32: Transfer Command Updates from Stk. 5 (StockerSEM)
33: Transfer Command Complete (StockerSEM)
34: Transfer Command to Ohs2 (carrier 3232, src. Stk. 5 Bay/Out, dest. Stk. 8/Bay_In)(IBSEM)
35: Transfer Command Updates from Ohs2 (IBSEM)
38: Transfer Command Complete (IBSEM)
41: Transfer Command to Stk.8 (carrier 3232, src. Stk 8/Bay_In, dest. shelf) (StockerSEM)
42: Transfer Command Updates from Stk. 8 (StockerSEM)
43: Transfer Command Complete (StockerSEM)
44: Status update from Stk.7 (available capactiy) (StockerSEM)
46: Transfer Command to Stk. 8 (carrier 3232, src. Stk. 8 shelf, dest. Stk. 8 Bay_Out) (StockerSEM)
47: Transfer Command Updates from Stk. 8 (StockerSEM)
48: Transfer Command Complete (StockerSEM)
49: Transfer Command to Ohs2 (carrier 3232, src. Stk. 8/Bay_Out, dest. Stk. 7/Bay_In) (IBSEM)
50: Tranfer Command Updates from Ohs2 (IBSEM)
36: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
39: setMaterialTrackingLocation(MaterialTrackingLocation Stk.8)
51: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
45: MaterialTrackingLocationNotFullEvent
37: DurableLocationChangedEvent
40: DurableLocationChangedEvent
30: MaterialTrackingLocationFullEvent
Carrier is temporarily stored in
Alternate Stk. 8 until Stk. 7
becomes available.
29: ZoneCapacityEvent(StockerSEM)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-10
Scenario Case 4 (continued)