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SEMI E109-0305 © SEMI 2001, 2005 25 13 Reticle Pod Load Port/Pod Associati on State Model 13.1 The purpose of the Reticle Pod Association State Model is to define the host view of pod to reticle lo ad port association of…

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SEMI E109-0305 © SEMI 2001, 2005 24
12.4.4 Reticle Load Port Reservation State Transition Table
Table 10 Reticle Load Port Reservation State Transition Table
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
RESERVED
No event report is
required for this
transition.
2 NOT RESERVED Service: If reserved by
service, the host or operator
sends a ReserveAtPort,
ReticleTransferJob, or a Bind
service to the production
equipment.
PodOut: This happens when
the equipment physically
initiates a PodOut operation.
RESERVED If the user has configured
the equipment to use the
reservation visible signal
indicator, it is activated
for this load port.
Data required to be
available for this event
report:
PortID
PodID may be included
when a pod out,
ReticleTransferJob or a
bind service triggers this
transition.
3 RESERVED Service: If a reservation is
cancelled by service, the host
or operator sends a
CancelBind,
CancelReticleTransferJob, or
a CancelReservationAtPort.
Pod arrival:
A pod arrives at the reserved
port.
NOT
RESERVED
If the user has configured
the equipment to use the
reservation visible signal,
the indicator is
deactivated for this load
port.
Data required to be
available for this event
report:
PortID
12.5 Relation of Reservation to Association
12.5.1 The following figure indicates the relationship of Association to Reservation.
Reservation / Association
ASSOCIAT ED
ID Read
Unload or
carrier in
Complete
Load
Complete
ASSOCIATED
RESERVED
Bind
Carrier Presence
Load
w/o Bind
w/o Reserve
Load
w/ Bind
If fails, then PWC/CC
is received
RESERVED
Reserve
Load
w/ Reserve
ASSOCIAT ED
Visible Signal
Carrier Out
Complete
Unload
Complete
Carrier Out
St a rt
RESERVED
ASSOCIATED
Carrier Out
Figure 5
Relation of Reservation to Association
SEMI E109-0305 © SEMI 2001, 2005 25
13 Reticle Pod Load Port/Pod Association State Model
13.1 The purpose of the Reticle Pod Association State Model is to define the host view of pod to reticle load port
association of the production equipment, as well as the host interactions with the production equipment necessary to
associate a reticle pod to a reticle load port, and to perform equipment based pod verification. Each reticle load port
shall maintain an independent instance of the Pod Association State Model. Each instance of this state model must
not influence the state of the same state model for a different reticle load port.
13.1.1 This state model provides the ability to perform PodID verification with two different methods. If the PodID
is provided before the equipment reads the PodID, the PodID that becomes associated with the reticle load port can
be used later for equipment based pod verification. If the association happens by PodID read (not by a service
execution), then the production equipment shall report the PodID information in a data collection event.
13.2 Reticle Pod Load Port/Pod Association State Model Diagram
NOT
ASSOCIATED
ASSOCIATED
2
3
1
RETICLE POD LOAD PORT
/ POD
A
SSOCIATION
4
Figure 6
Reticle Pod Load Port/Pod Association State Model Diagram
13.2.1 Reticle Pod Load Port/Pod Association State Definitions
13.2.1.1 RETICLE POD LOAD PORT/POD ASSOCIATION — The parent state of the NOT ASSOCIATED and
ASSOCIATED sub-states.
13.2.1.2 NOT ASSOCIATED — A sub-state of RETICLE POD LOAD PORT/POD ASSOCIATION. There is no
pod association present for this load port.
13.2.1.3 ASSOCIATED — A sub-state of RETICLE POD LOAD PORT/POD ASSOCIATION. A PodID has been
associated with this reticle load port. The reticle pod load port is not available for a new pod association.
13.2.2 Reticle Pod Load Port/Pod Association State Transition Table
13.2.2.1 Table 11 defines the transitions of the Reticle Pod Load Port/Pod Association State Model.
Table 11 Reticle Pod Load Port/Pod Association State Transition Definitions
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
ASSOCIATED
No pod associations exist for
reset/re-initialized
equipment.
Data required to be available
for this event report:
PortID.
SEMI E109-0305 © SEMI 2001, 2005 26
# Previous State Trigger New State Actions Comments
2 NOT
ASSOCIATED
Service: If associated by
service, the host sends a
Bind or
ReticleTransferJob
service to the production
equipment.
PodID Read: If associated
by a PodID read, the
production equipment
creates the association at
the time the PodID read is
performed.
ASSOCIATED If the Bind or
ReticleTransferJob service is
performed before the PodID
is read by the production
equipment, the production
equipment can perform the
PodID verification. Once
the PodID to reticle pod load
port association is complete,
the reticle pod load port is
not available for association
until the state returns to
NOT ASSOCIATED again.
Data required to be available
for this event report:
PortID
PodID
3 ASSOCIATED Service: If an association
cancellation is desired,
this can be done by the
host sending a
CancelBind or
CancelReticleTransferJob
service to the production
equipment.
Reticle Pod Unload: An
association cancellation
may also be performed by
removing the reticle pod
from the reticle pod load
port.
NOT
ASSOCIATED
. A reticle pod unload may
happen before or after
processing occurs. The
reticle pod load port is
available for another
association.
Data required to be available
for this event report:
PortID
4 ASSOCIATED Production equipment
based pod verification
fails, and the pod assumes
the ID value from the
reticle pod that is on the
reticle pod load port.
ASSOCIATED The existing PodID that
was associated by a Bind or
ReticleTransferJob service
is unassociated by the
production equipment and
the new PodID is now
associated to the Reticle
Pod Load Port. The
production equipment shall
delay further action until
receiving either a
CancelPod or a
ProceedWithPod command
from the host.
This transition only occurs
when the Bind or
ReticleTransferJob
command has been used.
Data required to be available
for this event report:
PortID
PodID
14 Reticle Object
14.1 Information about a reticle is encapsulated as an object. This allows the host to exchange information with the
equipment about one or more specific reticle using services defined in SEMI E39, Object Services Standard. A
reticle has properties (attributes) that are defined in Table 12, Reticle Attribute Definition.
14.2 Object Instantiation
14.2.1 The reticle object is a software representation of the reticle in the equipment. Under normal circumstances
this object is instantiated by the equipment when the host uses the Bind, ReticleTransferJob, PodNotification,
ProceedWithPod service (when it included the content map attribute), MoveReticle service, when the equipment