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SEMI S12-0298 © SEMI 1998 8 maximum pressure. Fold the wipe sample with the exposed si de in, and f o ld it over again . R1-3.4 L abel a glass-st oppered jar or zipper-clos ure plastic bag with the infor mation listed in…

SEMI S12-0298 © SEMI 19987

RELATED INFORMATION 1

EXAMPLES OF WIPE SAMPLING PROCEDURES

NOTE: This related information is not an official part of

SEMI S12 and is not intended to modify or supersede the

official standard. It has been derived from the work of the

originating task force. Publication was authorized by full

ballot procedures. Determination of the suitability of the

material is solely the responsibility of the user.

Wipe sampling should be conducted primarily on

nonporous surfaces. “Wet” (swab or filter paper with

solvent) or “dry” (swab or filter paper without solvent)

wipe sampling techniques may be used. These

procedures are based on those contained in the US

EPA’s “Guide for Decontaminating Buildings,

Structures, and Equipment at Superfund Sites,”

EPA/600/2-85/028, March, 1985. The sample area has

been decreased in the wet wipe sampling procedure

from 0.25 m

to 100 cm

(0.01 m

) due to the size of

equipment and surfaces anticipated to be sampled for

this SEMI Guideline. Another relevant document on

sampling for surface contamination is contained in the

OSHA - Occupational Safety and Health

Administration, U.S. Department of Labor, OSHA

TECHNICAL MANUAL, CPL 2 - 2.20B, Chapter 2,

Sampling for Surface Contamination, February 5,

1990. Chemical-resistant gloves should be worn while

performing these procedures. Gloves should be clean to

avoid tainting the samples obtained and should be

changed between the securing of samples to avoid

cross-contamination.

R1-1 General Recommendations

R1-1.1 Assure that the marking method for the sample

container and area to be wiped will not interfere with

the intended analysis.

R1-1.2 Assure that the container will not absorb the

material being sampled or add interfering material that

will be detected during analyses.

R1-1.3 Assure that the wetting agent will not react with

the material being sampled, interfere with the analysis,

or degrade the shipping container.

R1-1.4 Should it become necessary to swipe an area

other than 100 cm

(e.g., a lever or knob or other part of

a tool), then record the estimated or, preferably,

measured swipe area.

R1-1.5 Submit a blank with each batch of swipe

samples. The blank is a sampling device (such as a

swipe tab) of the same type and from the same batch as

that used for the sampling and which is wetted and

handled just like the samples, but which is not rubbed

on a surface.

R1-1.6 Use appropriate personal protective equipment

during sampling.

R1-1.7 Samples should be analyzed by a competent

and appropriately certified laboratory for the hazardous

materials being evaluated.

R1-1.8 The sampling and analytical methods used

should be appropriate for the agent in question, with

the NIOSH Manual of Analytical Methods, EPA’s Test

Methods for Evaluation of Solid Wastes (EPA SW-846),

and OSHA’s Sampling and Analytical Methods being

established methodologies. If new methods are to be

developed or reviewed, they should be approved by an

industrial hygienist certified by the American Board of

Industrial Hygiene or by another appropriately certified

or registered professional.

R1-2 Wet Wipe Sampling Procedure

R1-2.1 Mark off a square area of approximately 100

on the surface to be wiped, using a template which

is cleaned between each sampling event. If a template is

unavailable or the area to be wiped is less than 100 cm

note the exact dimensions and establish markings on the

four outer corners of the area to be wiped.

R1-2.2 Label the appropriate wet sample container

with the information listed in R1-1.5.

R1-2.3 Hold a filter paper with a clean, impervious,

gloved hand or metal clamp, and saturate the wipe with

either deionized water, isopropyl alcohol, or other

wetting agent, depending on the hazardous material to

be sampled.

R1-2.4 Wipe the sampling area starting at the outside

edge and progressing toward the center, making

concentric circles of decreasing size, applying moderate

pressure. Fold the wipe sample with the exposed side

in, and fold it over again.

R1-2.5 Carefully place the completed wipe sample in

the container for storage and transportation, without

allowing the sample to contact any other surfaces.

R1-3 Dry Wipe Sampling Procedure

R1-3.1 Label the appropriate dry sample container with

the information listed in R1-1.5.

R1-3.2 Hold a filter paper wipe with a clean,

impervious, gloved hand.

R1-3.3 Wipe the sampling area, starting at the outside

edge and progressing toward the center, making

concentric circles of decreasing size, applying

SEMI S12-0298 © SEMI 1998 8

maximum pressure. Fold the wipe sample with the

exposed side in, and fold it over again.

R1-3.4 Label a glass-stoppered jar or zipper-closure

plastic bag with the information listed in R1-1.5.

R1-3.5 Carefully place the completed wipe sample in

the container for storage and transportation without

allowing the sample to contact any other surfaces.

R1-4 Scrape and Bulk Sampling

NOTE: A scrape sample is one made by abrading material

and collecting it in a container which is sent to a laboratory

for analysis. Scrape sampling might be done to assure lead

and hexavalent chromium are not present in paint on the

exterior of a tool. Bulk sampling requires the collection of

adequate amounts of the suspected material to allow for

meeting minimum detection limits of the sampling and

analytical techniques being used. Close consultation is

needed with the accredited laboratory performing the

analysis.

R1-5 Sample Control

R1-5.1 Label each sample container with the following

information before sampling:

• Sample Number

• Sample Location (where was sample taken from)

• Sample Type and Media Used

• Date of Sample

• Name of Person Performing Sampling

• Areas Sampled (in cm

)

R1-5.2 Record each sampling event in a log book.

Include a rough sketch of the equipment, associated

areas of concern, and exact sampling locations. Also

include any other pertinent notes or details which may

affect the interpretation of sample results.

R1-5.3 Follow the chain of custody procedures

outlined in EPA SW-846.

R1-5.4 Analyze samples using standard methods, such

as those specified by NIOSH, OSHA or EPA SW-846,

whenever possible. (See Section R1-1.8 for additional

details.)

RELATED INFORMATION 2

EXAMPLE OF METHOD FOR ESTABLISHING “NON-HAZARDOUS”

LEVELS

NOTE: This related information is not an official part of

SEMI S12 and is not intended to modify or supersede the

official standard. It has been derived from the work of the

originating task force. Publication was authorized by full

ballot procedures. Determination of the suitability of the

material is solely the responsibility of the user.

This method was compiled from various sources. The

applicability of this method and the validity of its

assumptions in the application for which it is

considered must be determined by an appropriate

professional.

R2-1 Method 1

This method is designed to be protective of the health

and safety of untrained and unprotected individuals. In

this method, “non-hazardous” level is determined by

assessment of the risk posed by potential exposure to

the contaminant(s). (This method is based on the

assumptions that 1) the exposed portions of a worker’s

body collect a single layer of the contaminant, with a

density half that of the layer on the contaminated

surface, in the course of a day and that 2) this

contaminant is then incorporated, at the end of the day,

into the body by either absorption or ingestion.) This

method is, therefore, probably inappropriate for

contaminants which are absorbed rapidly throughout

the day.

R2-1.1 Toxicity criteria are determined for each of the

chemicals identified as potentially leaving a residue. As

an example, toxicity criteria used are reference doses

(RfDs) for human uptake of chemicals (US EPA’s

Integrated Risk Information System, 1996), and no

significant risk levels (NSRLs) defined under

California’s Safe Drinking Water and Toxic

Enforcement Act of 1986 (Proposition 65). Daily

exposures to the RfD (expressed in mg/kg-day) over a

lifetime are not expected to cause adverse health effects

(non-cancer effects). Daily exposure to the NSRL

(µg/day) over a lifetime are considered to pose an

insignificant (less than 1 in 100,000) increased cancer

or reproductive risk.

R2-1.2 Oral and dermal exposures are considered.

Dermal exposure is assumed to occur through direct

contact with contaminated work surfaces (i.e., hands,

arms, and face). Oral exposure is assumed to occur

though direct contact with contaminated work surfaces

and hands, and subsequent contact between hand and

mouth.