semi合集-English.pdf - 第4487页
SEMI D18-0299 E © SEMI 19 99, 2001 8 Figure 1 Isometric Vie ws

SEMI D18-0299
E
© SEMI 1999, 20017
Table 3 Type A Cassette Registration - Coupling Pin Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
d1 Figure 5 diameter of pin centered on the center axis line 12 ± 0.05 mm
(0.4724 ± 0.002 in.)
r2 Figure 5 radial distance from the center axis line to the origin of
the shoulder radius r5
6 mm
(0.2362 in.)
r3 Figure 5 radial distance from the intersection of the center axis line
and z13 to the top of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r4 Figure 5 blend radius for the intersection of r3 and r52 ± 0.1 mm
(0.0787 ± 0.004 in.)
r5 Figure 5 radial distance from the intersection of the horizontal
datum plane and r2 to the far shoulder of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r6 Figure 5 blend radius for the intersection of r5 and d12 ± 0.1 mm
(0.0787 ± 0.004 in.)
r7 Figure 5 Roughness (R
a
) as defined in ISO 4287
0.30 µm (12 µin.) maximum
z13 Figure 5 vertical distance from the horizontal datum plane to the
origin of top radius r3
2 mm
(0.08 in.)
Table 4 Type B Cassette Registration - Roller Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
r8 Figure 7 Radius about roller circumference revolved about the
revolute axis
= 4.8 ± 0.12 mm
r9 Figure 7 Radius of roller measured from the tangential surface
created by r8 to the revolute axis
≥ 20 ± 0.12 mm

SEMI D18-0299
E
© SEMI 1999, 2001 8
Figure 1
Isometric Views

SEMI D18-0299
E
© SEMI 1999, 20019
Figure 2
Cassette Side Domains