semi合集-English.pdf - 第1403页

SEMI E30-1103 © SEMI 1992, 2003 77 STREAM 7: Process Program Load S7,F1 Process Program Load Inquire (PPI) S,H<->E, reply S7,F2 Process Program Load Grant (PPG) S,H<->E S7,F3 Process Program Send (PPS) M,H&lt…

SEMI E30-1103 © SEMI 1992, 2003

S2,F37 Enable/Disable Event Report (EDER) S,H->E,reply

S2,F38 Enable/Disable Event Report Acknowledge (EDEA) S,H<-E

S2,F39 Multi-Block Inquire (DMBI) S,H->E

S2,F40 Multi-Block Grant (DMBG) S,H<-E

S2,F41 Host Command Send (HCS) S,H->E

S2,F42 Host Command Acknowledge (HCA) S,H<-E

S2,F43 Reset Spooling Streams and Functions (RSSF) S,H->E

S2,F44 Reset Spooling Acknowledge (RSA) M,H<-E

S2,F45 Define Variable Limit Attributes (DVLA) M,H->E

S2,F46 Variable Limit Attribute Acknowledge (VLAA) M,H<-E

S2,F47 Variable Limit Attribute Request (VLAR) S,H->E

S2,F48 Variable Limit Attributes Send (VLAS) M,H<-E

S2,F49 Enhanced Remote Command M,H->E

S2,F50 Enhanced Remote Command Acknowledge M,H<-E

STREAM 5: Exception (Alarm) Reporting

S5,F1 Alarm Report Send (ARS) S,H<-E

S5,F2 Alarm Report Acknowledge (ARA) S,H->E

S5,F3 Enable/Disable Alarm Send (EAS) S,H->E

S5,F4 Enable/Disable Alarm Acknowledge (EAA) S,H<-E

S5,F5 List Alarms Request (LAR) S,H->E

S5,F6 List Alarm Data (LAD) M,H<-E

STREAM 6: Data Collection

S6,F1 Trace Data Send (TDS) S,H<-E

S6,F2 Trace Data Acknowledge (TDA) S,H->E

S6,F5 Multi-block Data Send Inquire (MBI) S,H<-E

S6,F6 Multi-block Grant (MBG) S,H->E

S6,F11 Event Report Send (ERS) M,H<-E

S6,F12 Event Report Acknowledge (ERA) S,H->E

S6,F15 Event Report Request (ERR) S,H->E

S6,F16 Event Report Data (ERD) M,H<-E

S6,F19 Individual Report Request (IRR) S,H->E

S6,F20 Individual Report Data (IRD) M,H<-E

S6,F23 Request Spooled Data (RSD) S,H->E

S6,F24 Request Spooled Data Acknowledgement Send (RSDAS) S,H<-E

SEMI E30-1103 © SEMI 1992, 2003

STREAM 7: Process Program Load

S7,F1 Process Program Load Inquire (PPI) S,H<->E, reply

S7,F2 Process Program Load Grant (PPG) S,H<->E

S7,F3 Process Program Send (PPS) M,H<->E

S7,F4 Process Program Acknowledge (PPA) S,H<->E

S7,F5 Process Program Request (PPR) S,H<->E

S7,F6 Process Program Data (PPD) M,H<->E

S7,F17 Delete Process Program Send (DPS) S,H->E

S7,F18 Delete Process Program Acknowledge (DPA) S,H<-E

S7,F19 Current EPPD Request (RER) S,H->E

S7,F20 Current EPPD Data (RED) M,H<-E

S7,F23 Formatted Process Program Send (FPS) M,H<->E

S7,F24 Formatted Process Program Acknowledge (FPA) S,H<->E

S7,F25 Formatted Process Program Request (FPR) S,H<->E

S7,F26 Formatted Process Program Data (FPD) M,H<->E

S7,F27 Process Program Verification Send (PVS) S,H<-E

S7,F28 Process Program Verification Acknowledge (PVA) S,H->E

S7,F29 Process Program Verification Inquire (PVA)

S7,F30 Process Program Verification Grant (PVG)

S7,F37 Large Process Program Send S,H <-> E,reply

S7,F38 Large Process Program Acknowledge S,H <-> E

S7,F39 Large Formatted Process Program Send S,H <-> E,reply

S7,F40 Large Formatted Process Program Acknowledge S,H <-> E

S7,F41 Large Process Program Request S,H <-> E,reply

S7,F42 Large Process Program Acknowledge S,H <-> E

S7,F43 Large Formatted Process Program Request S,H <-> E,reply

S7,F44 Large Formatted Process Program Acknowledge S,H <-> E

STREAM 9: System Errors

S9,F1 Unrecognized Device ID (UDN) S,H<-E

S9,F3 Unrecognized Stream Type (USN) S,H<-E

S9,F5 Unrecognized Function Type (UFN) S,H<-E

S9,F7 Illegal Data (IDN) S,H<-E

S9,F9 Transaction Timer Timeout (TTN) S,H<-E

S9,F11 Data Too Long (DLN) S,H<-E

S9,F13 Conversation Timeout (CTN) S,H<-E

STREAM 10: Terminal Services

S10,F1 Terminal Request (TRN) S,H<-E

S10,F2 Terminal Request Acknowledge (TRA) S,H->E

S10,F3 Terminal Display, Single (VTN) S,H->E

S10,F4 Terminal Display, Single Acknowledge (VTA) S,H<-E

S10,F5 Terminal Display, Multi-block (VMN) M,H->E

S10,F6 Terminal Display, Multi-block Acknowledge (VMA) S,H<-E

S10,F7 Multi-block Not Allowed (MNN) S,H<-E

STREAM 14: Object Services

S14,F1 GetAttr Request S,H <-> E

S14,F2 GetAttr Data M,H <-> E

STREAM 15: Recipe Management

S15,F1 Recipe Management Multi-block Inquire S,H <-> E

S15,F2 Recipe Management Multi-block Grant S,H <-> E

S15,F21 Recipe Action Request M,H <-> E

S15,F22 Recipe Action Acknowledge M,H <-> E

S15,F27 Recipe Download Request M,H -> E

S15,F28 Recipe Download Acknowledge M,H <- E

S15,F29 Recipe Verify Request M,H -> E

S15,F30 Recipe Verify Data M,H <- E

S15,F31 Recipe Upload Request S,H -> E

S15,F32 Recipe Upload Data M,H <- E

S15,F35 Recipe Delete Request M,H -> E

S15,F36 Recipe Delete Acknowledge M,H <- E

S15,F49 Large Recipe Download Request S,H -> E,reply

S15,F50 Large Recipe Download Acknowledge S,H <- E

S15,F51 Large Recipe Upload Request S,H -> E,reply

S15,F52 Large Recipe Upload Acknowledge S,H <- E

S15,F53 Recipe Verification Send M,H <- E,reply

S15,F54 Recipe Verification Acknowledge S,H -> E