semi合集-English.pdf - 第109页

SEMI E10-0304 E © SEMI 1986, 2004 23 R1-5.6.1.6 The state va lue function f or IPF1 = K × PM1. The equival ent truth table is trivial and is therefore not shown. R1-5.6.2 Example 2 — This example, as shown i n Figure R1-…

SEMI E10-0304

R1-5.6.1 Example 1 — This example, shown in Figure

R1-4, is of a multi-path cluster tool with seven

modules. L1 and L2 are load lock modules that are used

to load units into the tool. A single transport arm, T,

performs all point-to-point transportation. The first

process module visited by any unit is either PM1 or

PM2, after which every unit visits PM3. Lastly, L3 is a

load lock that is used to unload units from the multi-

path cluster tool.

R1-5.6.1.1 The key group, K, as shown in Figure R1-5,

is made up of the three load locks and the transport,

which are the common support modules for this multi-

path cluster tool used by any unit. Since all modules

visit PM3 regardless of any IPF distinction, PM3 also is

included in the key group in order to simplify

calculation. Any other system-level failure issues may

be allocated to the abstract platform module, P.

= Load Lock i, i = 1, 2, 3

PMj = Process Module j, j = 1, 2, 3

T = Transport Module

PM1

PM2

PM3 L3

Figure R1-4

Multi-Path Cluster Tool Modules, Example 1

T L3

PM3

Figure R1-5

Key Group, Example 1

R1-5.6.1.2 The state value function for the key group is

K = P × [1 − (1 − L1) × (1 − L2)] × T × L3

PM3.

For reference, the equivalent truth table for this logic is

shown in Table R1-1:

Table R1-1 Truth Table for Key Group, Example 1

P L1 L2 T L3 PM3 K

1 1 1 1 1 1 1

1 1 0 1 1 1 1

1 0 1 1 1 1 1

else 0

R1-5.6.1.3 IPF1 is a general IPF that uses the key

group and either process module PM1 or PM2, as

shown in Figure R1-6.

PM1

PM2

Figure R1-6

IPF1, Example 1

R1-5.6.1.4 The state value function for IPF1 = K

− (1 − PM1)

(1 − PM2)]. The equivalent truth table

is shown in Table R1-2:

Table R1-2 Truth Table for the State Function,

Example 1

K PM1 PM2 IPF1

1 1 1 1

1 1 0 1

1 0 1 1

else 0

R1-5.6.1.5 IPF2 represents a process engineering issue

where PM2 is not sufficiently matched in performance

to PM1. Therefore for certain processes, all units are

restricted to go through PM1 only as shown in Figure

R1-7.

PM1

Figure R1-7

IPF2, Example 1

SEMI E10-0304

R1-5.6.1.6 The state value function for IPF1 = K

PM1. The equivalent truth table is trivial and is

therefore not shown.

R1-5.6.2 Example 2 — This example, as shown in

Figure R1-8, is of a more complicated coat/develop

system that has 56 total modules, including four load

locks (L1-L4), four common transport robots (R1-R4),

four coat stations, four develop stations, and four arrays

of heat/chill plates with ten modules in each array.

R1-5.6.2.1 The key group, K, contains the platform,

the four load locks, and the four transport robots, as

shown in Figure R1-9. There are no process modules

that are used in every IPF, therefore no process modules

appear in K.

10X Heat /

Chill

10X Heat /

Chill

10X Heat /

Chill

10X Heat /

Chill

Coat

1,2

Coat

3,4

Develop

1,2

Develop

3,4

1, 2, 3, 4

xposure

Figure R1-8

Modules For A Coat/Develop System

R1 R2 R3 R4

Figure R1-9

Key Group Modules, Example 2

SEMI E10-0304

R1-5.6.2.2 The state value function for the key group is K = P

[1 − Π

i = 1 to 4

(1 − Li)] × Π

j=1 to 4

Rj, which can be

expanded to:

K = P × [1 − (1 − L1) × (1 − L2)

(1 − L3)

(1 − L4)]

R1-5.6.2.3 The equivalent truth table is shown in Table R1-3:

Table R1-3 Truth Table for State Function, Example 2

P L1 L2 L3 L4 R1 R2 R3 R4 K

0 any any any any any any any any 0

1 0 0 0 0 any any any any 0

any any any any any 0 any any any 0

any any any any any any 0 any any 0

any any any any any any any 0 any 0

any any any any any any any any 0 0

else 1

NOTE 7: This truth table emphasizes the subsets that bring the key group “down,” which are called minimum cut sets, rather

than the subsets that keep the key group “up,” called minimum path sets.

R1-5.6.2.4 IPF1 has 13 steps and each step has two alternative modules, as shown in Figure R1-10.

step 1

step 2

step 3

step 4

step 5

step 6

step 7

step 8

step 9

step 10

step 11

step 12

step 13

Figure R1-10

Module Configuration For IPF1, Example 2

R1-5.6.2.5 The state value function for IPF1 = K

i=1 to 13

[1 − (1 − PM

i,1

)

(1 − PM

i,2

)]. The equivalent truth

table is highly redundant and is therefore omitted.

R1-5.6.2.6 IPF2 has the same 13 steps as IPF1. However due to process matching issues, all units are restricted to a

single process module at steps 1, 5, 9, and 13, as shown in Figure R1-11.

step 1

step 2

step 3

step 4

step 5

step 6

step 7

step 8

step 9

step 10

step 11

step 12

step 13

Figure R1-11

Module Configuration For IPF2, Example 2

R1-5.6.2.7 The state value function for IPF2 = K

1,1

5,1

9,1

13,1

i={2-4, 6-8, 10-12}

[1 − (1 −

i,1

) × (1 − PM

i,2

)]