semi合集-English.pdf - 第6820页

SEMI S2-0703a E © SEMI 1991, 2004 49 RELATED INFORMATION INDEX NOTICE: The RI index below will be withdrawn upon July 1, 2006 publicati on and replaced by a new RI Index that captures the appropriate Relate d Informat io…

SEMI S2-0703a

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this safety guideline and are not intended

to modify or supersede the official safety guideline.

These have been supplied by the committee to enhance

the usage of the safety guideline.

SEMI makes no warranties or representations as to the

suitability of the guideline set forth herein for any

particular application. The determination of the

suitability of the guideline is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. This guideline is subject to change

without notice.

The user’s attention is called to the possibility that

compliance with this guideline may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guideline, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this guideline. Users of this guideline

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

NOTICE: A new Appendix will be added (in

numerical order) upon July 1, 2006 publication as

shown in Delayed Revisions Section 1. The EH&S

Committee has voted that addition of this Appendix

section is OPTIONAL before the Effective Date.

SEMI S2-0703a

RELATED INFORMATION INDEX

NOTICE: The RI index below will be withdrawn upon July 1, 2006 publication and replaced by a new RI

Index that captures the appropriate Related Information as approved by the EH&S Committee ballot. The

EH&S Committee has voted that implementation of the information is OPTIONAL before the effective date.

CONTENTS

Related Information 1 — Equipment/Product Safety Program

Related Information 2 — Additional Standards That May Be Helpful

Related Information 3 — Hazard Labels

Related Information 4 — EMO Reach Considerations

Related Information 5 — Seismic Protection

Related Information 6 — Continuous Hazardous Gas Detection

Related Information 7 — Documentation of Ionizing Radiation (Section 24 and Appendix 4) Including Rationale for

Changes

Related Information 8 — Documentation of Non-ionizing Radiation (Section 25 and Appendix 5) Including

Rationale for Changes

Related Information 9 — Laser Checklist

Related Information 10 — Laser Certification Requirements by Region of Use

Related Information 11 — Other Requirements by Region of Use

Related Information 12 — Light Tower Color and Audible Alert Codes

Related Information 13 — Surface Temperature Documentation

Related Information 14 — Recommendations for Designing and Selecting Fail-to-Safe Equipment Control Systems

(FECS) With Solid State Interlocks and EMO

Related Information 15 — Additional Considerations for Fire Suppression Systems

SEMI S2-0703a

RELATED INFORMATION 1

EQUIPMENT/PRODUCT SAFETY PROGRAM

NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by

task force members. This related information was approved for publication by vote of the responsible committee on

October 21, 1999.

R1-1 Preface

R1-1.1 Compliance with design-based safety standards

does not necessarily ensure adequate safety in complex

or state-of-the-art systems. It is often necessary to

perform hazard analyses to identify hazards that are

specific to the system, and develop hazard control

measures that adequately control the associated risk

beyond those that are covered in existing design-based

standards. This document provides guidelines for

developing a deliberate, planned equipment/product

safety (EPS) program integrating the compliance

assessment activities with hazard analyses and other

activities needed to provide a safe system throughout

the life of equipment or products.

R1-1.2 An effective EPS program reduces the cost,

schedule slips, and liability associated with the late

identification and correction of hazards. To be most

effective, an EPS program should be begun by the

manufacturer early during the design phase. Starting

early allows safety to be designed into the system and

its subsystems, equipment, facilities, processes,

procedures, and their interfaces and operations. These

guidelines are designed to assist the manufacturer in

planning and implementation of an effective EPS

program.

R1-1.3 The lowest costs for implementing safety can

be achieved when hazards are identified and resolved

before hardware is built and firmware or software is

coded. This guide is intended to provide the basis for a

methodology for implementing a safety program for

early and continued hazard identification and the

elimination or reduction of associated risks.

R1-1.4 EPS program success depends directly upon

management emphasis and support applied during the

system design and development process and throughout

the life cycle of the product. This emphasis should

include the following management controls:

R1-1.4.1 Agreement from management that the EPS

program will be maintained and supported throughout

the product or facility life cycle;

R1-1.4.2 Clear and early statements of agreement with

EPS objectives and requirements;

R1-1.4.3 Understanding of, and participation in, the

risk acceptance process; and

R1-1.4.4 Continuing consideration of risk reduction

during the management review process.

R1-2 Purpose

R1-2.1 This guide describes an approach for

developing and implementing an EPS program of

sufficient comprehensiveness to identify the hazards of

a product and to develop design and administrative

controls to prevent incidents. The EPS program

addresses hazards from many sources to include system

design, hazardous materials, advancing technologies,

and new techniques. The goal is to eliminate hazards or

reduce the associated risk to an acceptable level.

R1-3 Scope

R1-3.1 This guide applies to every activity of the

product life cycle (e.g., research, technology

development, design, test and evaluation, production,

construction, checkout/calibration, operation,

maintenance and support, modification and disposal).

R1-4 General Guidelines

R1-4.1

EPS Program — The supplier should establish

and maintain an EPS program to support efficient and

effective achievement of overall EPS objectives.

Depending upon the needs of the company, the EPS

Program may be a company wide program covering all

projects, separate programs for each project, or some

combination of the two.

R1-4.1.1 Management System — The supplier should

establish an EPS management system to implement

provisions of this guide commensurate with the needs

of the program. The program manager should be

responsible for the establishment, control, incorpor-

ation, direction and implementation of the EPS program

policies and should assure that risk is identified and

eliminated or controlled. The supplier should establish

internal reporting systems and procedures for

investigation and disposition of product related

incidents and safety incidents, including potentially

hazardous conditions not yet involved in an incident.

R1-4.2 EPS Design Guidelines

R1-4.2.1 EPS design requirements should be specified

after review of pertinent standards, specifications,

regulations, design handbooks, safety design checklists,