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SEMI D23-0999 © SEMI 1999 2 6 CEO (Cost of Equipment O w n ership) T able 6.1 Un its i n the document are for i l l u stratio n only. Item Unit Value Definition & Formula Notes A. Equipm ent Cost (1) Bas e Cost ($) M…

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SEMI D23-0999 © SEMI 19991
SEMI D23-0999
GUIDE FOR COST OF EQUIPMENT OWNERSHIP (CEO)
CALCULATION FOR FPD EQUIPMENT
This guide was technically approved by the Global Flat Panel Display Equipment Committee and is the direct
responsibility of the Japanese Flat Panel Display Equipment Committee. Current edition approved by the
Japanese Regional Standards Committee on June 1, 1999. Initially available on SEMI OnLine August 1999;
to be published September 1999.
1 Purpose
1.1 The purpose of this document is to provide a
standard, simple CEO calculation method for
evaluating FPD manufacturing equipment. With this
document, the following merits can be expected:
1.1.1 Both panel and equipment manuf acturers, as
well as material manufacturers can work from the same
standard with regard to cost.
1.1.2 Panel manufacturers’ basis for equipment
comparison will become clear, which will, in turn, help
in equipment selection.
1.1.3 The document will serve to clarify cost reduction
items as well as benchmark cost reduction activities.
1.1.4 Direction for improvement for equipment
manufacturers will become clear.
1.1.5 By doing a separate analysis, comparison, and
evaluation of lines, equipment for different substrate
sizes will become simpler.
2 Scope
2.1 This standard focuses on each equipment in the
FPD production line. It is used to define the calculation
method for cost of installing/operating that equipment,
to define the calculation method for productivity of that
equipment, and to quantify CEO of that equipment.
2.2 It is necessary to clarify the substrate sizes that can
be handled by this equipment. However, this standard
does not deal with the equipment process performance.
It takes the point of view that each panel manufacturer
should evaluate each equipment’s process performance,
including yield, based on their own process
requirements.
2.3 This standard does not purport to address all of the
safety issues associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicablity of regulatory limitations prior to use.
3 Limitations
3.1 This standard does not attempt to include all
elements necessary for equipment evaluation, and may
be seen as incomplete from certain perspectives.
However, it is believed that it will serve as the
foundation for comparative evaluations.
4 Referenced Standards
None.
5 Terminology
5.1 Definitions for each of the items are listed in the
following table.
SEMI D23-0999 © SEMI 1999 2
6 CEO (Cost of Equipment Ownership) Table
6.1 Units in the document are for illustration only.
Item Unit Value Definition & Formula Notes
A. Equipment
Cost
(1) Base Cost ($) Main Equipment Purchase Price
(2) Cost of Options ($) Price of items which can be
categorized as options separate
from main equipment.
(3) Other Parts/Tools ($) Price of tools and accessories
(not included in main
equipment or options price).
Enter maintenance-
related consumables in
D48 (Consumables).
(4) Installation Cost ($) Costs incurred in the installation
of the equipment.
(5) Inspection Cost ($) Costs incurred in inspection of
the equipment.
(6) Shipping Cost ($) Cost of shipping equipment to
the installation location.
(7) Training Cost ($) Cost of training in operation,
maintenance, etc.
(8) Manual Cost ($) Cost of manuals necessary for
maintenance and operation.
(9) Other Costs ($) Other necessary costs not
included in above items.
(10) Subtotal ($) Sum of (1) through (9). If it is difficult to
specify (1) through (9),
it is possible to just
enter (10).
(11) Monthly Cost ($/month) Monthly costs associated with
equipment (10)/60 months.
Salvage value after 5
years is arbitrarily set
here at 0. Adjust to real
value as necessary.
B. Hook-Up
Costs
(12) Materials
(pipes, etc.)
($) Costs for piping and other
materials necessary to operate
equipment.
(13) Power
Connection
($) Costs for connecting electricity,
water, gas, air, etc. supplied by
the factory to the equipment.
(14) Other ($) Other installation costs not
included in above items.
(15) Subtotal ($) Sum of (12) through (14).
(16) Monthly Cost ($/month) Monthly incidental installation
costs (15)/60 months.
Salvage value after 5
years is arbitrarily set
here at 0. Adjust to real
value as necessary.
C. Clean
Room Costs
For each area, if the shape is
complex, use the square surface
area.
Categorize clean area,
gray area, and other
dedicated areas
according to the real
situation of each
factory.
SEMI D23-0999 © SEMI 19993
Item Unit Value Definition & Formula Notes
Area for handling substrates and
having the highest level of
cleanliness.
(17) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the
clean area.
(18) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the clean area.
(19) Maintenance
Area (W*D)
(m
2
) Dimensions of space in clean
area necessary for maintenance
of the equipment and
accessories.
(20) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in clean
area from above items (17)
through (19).
(21) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in clean area (by area unit).
Clean Areas
(22) Monthly
Dedicated Floor Cost
$/month Monthly cost for clean area (20)
× (21).
Area with lower cleanliness
level than above clean area.
(23) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the gray
area.
(24) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the gray area.
(25) Maintenance
Area (W*D)
(m
2
) Dimensions of space in gray
area necessary for maintenance
of the equipment and
accessories.
(26) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in gray
area from above items (23)
through (25).
(27) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in gray area (by area unit).
Gray Area
(28) Monthly
Dedicated Floor Cost
($/month) Monthly costs for gray area (26)
× (27).
Area with the lowest level of
cleanliness (i.e., sub-floor, etc.).
(29) Dedicated
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment in other
dedicated floor area.
(30) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in other dedicated floor area (by
area unit).
Other
Dedicated
Floor Area
(31) Monthly
Dedicated Floor Cost
($/month) Monthly costs for other
dedicated floor area (29) × (30).
D. Running
Costs