semi合集-English.pdf - 第3745页
SEMI F2-94 © SEMI 1990, 2004 1 SEMI F2-94 (Withdrawn 0703) SPECIFICATION FOR 316L STAI NLESS STEEL TUBING FOR GENERAL PURPOSE SEMICON DUCTOR MANUFACTURING APPLICATIONS NOTICE: This docum ent was balloted and appro ved fo…
SEMI F1-96 © SEMI 1990, 19967
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F2-94 © SEMI 1990, 2004 1
SEMI F2-94 (Withdrawn 0703)
SPECIFICATION FOR 316L STAINLESS STEEL TUBING FOR
GENERAL PURPOSE SEMICONDUCTOR MANUFACTURING
APPLICATIONS
NOTICE: This document was balloted and approved
for withdrawal in 2003.
1 Purpose
The purpose of this specification is to identify the
applicable ASTM tubing specification requirements and
to define the special material chemical composition
requirements for 316L stainless steel tubing which is to
be used for general purpose applications in
semiconductor manufacturing facilities.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F3-94 © SEMI 1990, 2003 1
SEMI F3-94 (Withdrawn 1103)
GUIDE FOR WELDING STAINLESS STEEL TUBING FOR
SEMICONDUCTOR MANUFACTURING APPLICATIONS
NOTICE: This document was balloted and approved
for withdrawal in 2003.
1 Purpose
1.1 The purpose of this guide is to provide instructions
to increase the awareness of the user to the available
procedures for welding stainless steel gas distribution
systems, and to provide information from which
subsequent evaluations and standardization can be
derived.
2 Scope
2.1 This guide covers the general requirements for the
welding of stainless steel gas distribution systems.
3 Referenced Documents
NOTE: The following documents become part of the guide to
the extent that they are included herein.
3.1 The referenced documents are to be their current
edition as published by their sponsors.
3.2 SEMI Specification
SEMI F2 — Specification for 316L Stainless Steel
Tubing for General Purpose Semiconductor
Manufacturing Applications
3.3 ANSI/ASME Specifications
1
B16.25 — Butt Welding Ends
B31.3 — Chemical Plant and Petroleum Refining
Piping
Boiler and Pressure Vessel Code — Section IX,
Qualification Standard for Welding and Brazing
Procedures, Welders, Brazers, and Welding and
Brazing Operators
3.4 AWS Specification
2
AWS D10.9 — Specification and Qualification of
Welding Procedures and Welders for Piping and
Tubing
3.5 ASTM Specification
3
1 American Society of Mechanical Engineers, 345 East 47th Street,
New York, NY 10017
2 American Welding Society, 550 NW LeJeune Road, P.O. Box
351040, Miami, Florida 33135
A450 (Section 25) — General Requirements for
Carbon, Ferritic Alloy, and Austenitic Steel Tubes
4 General Requirements
4.1 All welding performed under this guide should
conform to the applicable requirements of the ASME
Boiler and Pressure Vessel Code, Section IX, ANSI
B16.25, B31.3 Chapter V, and AWS D10.9, to the
extent that they are included herein.
5 Materials
5.1 All materials to be welded should be manufactured
to ASTM specifications and so certified by the
manufacturer. Certification should conform to ASTM
A-450, Section 25.
5.2 All seamless austenitic stainless steel tubing should
be in conformance with SEMI F2.
6 Testing of Welders
6.1 All welds should be based upon Welding Procedure
Specifications and be documented with associated
Procedure Qualification Records in accordance with
ASME Boiler and Pressure Vessel Code, Section IX, or
with AWS D10.9.
6.2 Qualification of the welding procedures to be used,
and of the performance of welders and welding
operators, should conform to the requirements of the
ASME Boiler and Pressure Vessel Code, Section IX,
Articles II and III, or AWS D10.9.
7 Welding Procedure
7.1 Component Preparation
7.1.1 All weld end preparation should be done in such
a manner as to minimize the introduction of
contaminants into the system.
7.1.2 All cutting of component or tubing weld ends
should be done with a sharp-edged tool. No lubricants
of any kind should be allowed.
7.1.3 All component and tubing weld ends that are to
be cut should be de-burred without chamfering.
7.1.4 All welding ends requiring preparation for
procedures requiring the use of filler material should be
prepared in accordance with ANSI/ASME B16.25.
3 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959