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SEMI P41-0304 E © SEMI 2004 15 R e f e ren ce m a rk Ma s k S tag e or Hol d e r I D Figure 10 Direction I mage R e fe r e n c e Im a g e D a t a I mage R e fe r e n c P oint Posi ti o n I n format i on X an d Y Figure 1…

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SEMI P41-0304
E
© SEMI 2004 14
Mask Origin Point
Tool Origin Point
Mask
Tool Offset X and Y
Stage or Holder
Skew
Scale
Coordinate System
Figure 9
Tool Coordinate
SEMI P41-0304
E
© SEMI 2004 15
Reference mark
Mask
Stage or Holder
I D
Figure 10
Direction
Image Reference
Image Data
Image Referenc Point
Position Information X and Y
Figure 11
Image Reference
SEMI P41-0304
E
© SEMI 2004 16
Image Reference Point
Image Size X
Expression Mark
Image Target Position X and Y
Image S ize Y
Figure 12
Image Target
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particular application. The determination of the suitability of the standard is solely the responsibility of the user.
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