semi合集-English.pdf - 第1092页
SEMI E5-1104 © SEMI 1982, 2004 34 Name Format Description Values Where Used RPMACK 51 Reticle Pod management service acknowledge code. One byte. 0 = Acknowledge, service has been performed 1 = Service does not exist 2 = …
SEMI E5-1104 © SEMI 1982, 2004 33
Name Format Description Values Where Used
RMCHGTYPE 5() Indicates the type of change
for a recipe
0 = No change
1 = Create
2 = Update
5 = Delete
6 = Copy (new object)
7 = Rename
8 = Unprotect
9 = Product
10 = Verify
11 = Link
12 = Unlink
13 = Certify
14 = De-certify
15 = Change generic attribute
16 = Change agent-specific
attribute
17 = Change both generic and
agent-specific attributes
S15F37, F41,
F44, F46, F47,
F48
RMDATASIZE 5() The maximum total length, in
bytes, of a multi-block
message, used by the receiver
to determine if the anticipated
message exceeds the
receiver’s capacity
S15F1
RMGRNT 10 Grant code, used to grant or
deny a request. 1 byte.
0 = Permission granted
1 = Cannot accept now, try
again
2 = No space
3 = Request is on hold
4-64 Reserved
S15F2, F37,
F46
RMNEWNS 20 New name (identifier)
assigned to a recipe
namespace
S15F5
RMNSCMD 51 Action to be performed on a
recipe namespace
1 = Created
5 = Deleted
0, 2-4, 6-63 Reserved
S15F3
RMNSSPEC 20 The object specifier of a
recipe namespace
S15F3, F5, F7,
F11, F21, F23,
F25, F47
RMRECSPEC 20 The object specifier of a
distributed recipe namespace
recorder
S15F39, F41,
F43
RMREQUESTOR 11 Set to TRUE if initiator of
change request was an
attached segment. Set to
FALSE otherwise.
S15F41, F44,
F46
RMSEGSPEC 20 The object specifier of a
distributed recipe namespace
segment
S15F37, F39,
F41, F44, F46,
F47
RMSPACE 5() The amount of storage
available for at least one
recipe in a recipe namespace,
in bytes
S15F8
ROWCT 5() Row count in die increments
S12F1, F4
SEMI E5-1104 © SEMI 1982, 2004 34
Name Format Description Values Where Used
RPMACK 51 Reticle Pod management
service acknowledge code.
One byte.
0 = Acknowledge, service has
been performed
1 = Service does not exist
2 = Can not perform now
3 = At least parameter does not
exist
4 = Acknowledge, request will
be performed with completion
signaled later by an event
5 = Service is not completed or
prohibited
6 = No such object exists
7-63 Reserved
RPMDESTLOC 20 The LocationID towards
which a reticle must be
moved. Conforms to OBJID
S14F19
RPMSOURLOC The LocationID of the
location from which to pick-
up a reticle for moving it to
another location. Conforms
to OBJID.
S14F19
RPSEL 51 Reference Point Select
Number of reference point from
0-n.
S12F1, F4
RPTID 20, 3(),
5()
Report ID
S2F33, F35;
S6F11, F13,
F16, F11, F19,
F21, F22;
S17F1, F2, F3,
F4, F5, F9, F11,
F12
RPTOC 11 A Trace Object attribute for a
flag which, if set TRUE,
causes only variables which
have changed during the
sample period to be included
in a report.
S14F1, F2, F3,
F4;
S17F5
RQCMD 11 Required Command
True = Command must be
specified
False = Command is optional
S7F22
RQPAR 11 Required Parameter
True = Parameter must be
specified
False = Parameter is optional
S7F22
RRACK 10 Request to Receive
Acknowledge code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Requested material is not
at identified port
3 = Busy. Try again
4 = Sender does not have
permission to perform this
operation
5-63 Reserved
S4F18
SEMI E5-1104 © SEMI 1982, 2004 35
Name Format Description Values Where Used
RSACK 10 Ready to Send Acknowledge
code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Port is already occupied
3 = Busy, unable to move
material at this time. Try
again
4 = Receiver does not have
permission to perform this
operation
5-63 Reserved
S4F2
RSDA 10 Request Spool Data
Acknowledge
0 = OK
1 = Denied, busy try later
2 = Denied, spooled data does
not exist
3-63 Reserved
S6F24
RSDC 51 Request Spool Data Code
0 = Transmit Spooled Messages
1 = Purge Spooled Messages
2-63 Reserved
S6F23
RSINF 3() Starting location for row or
column. This item consists o
f
3 values (x,y,direction). If
direction value is negative, it
equals decreasing direction.
If the value is positive, it
equals increasing direction.
Direction must be a non-zero
value.
S12F7, F14
RSPACK 10 Reset Spooling Acknowledge
0 = Acknowledge, spooling setup
accepted
1 = Spooling setup rejected
2-63 Reserved
S2F44
RTYPE 3(), 5() Type of record
0 = Stream
1 = Discrete
2-63 Reserved
S13F4
SDACK 10 Map set-up data acknowledge
0 = Received data
>1 = Error
1-63 Reserved
S12F2
SDBIN 10 Send bin information flag
0 = Sent bin information
1 = Don't send bin information
>1 = Error
2-63 Reserved
S12F17
SEQNUM 3(), 5() Command Number
Value which identifies a unique
process program command by its
position in the list of commands
relative to the first. For the
first command of the process
program, SEQNUM is l.
S7F27
SFCD 10 Status form code, 1 byte
S1F5
SHEAD 10 Stored header related to the
transaction timer
S9F9
SLOTID 51 Used to reference material by
slot (a position that holds
material/substrates) in a
carrier. This item may be
implemented as an array in
some messages.
S16F11, F13,
F15
SMPLN 3(), 5() Sample number
S6F1