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3 SEMI G75.11-0 698 © SEMI 1 998 6.3 Dielectric con sta nt and dielect r i c d issipation factor sh ould be calculated by the following equation: ε = C x /C o tan δ = G x /2 π fC x w h ere : ε : dielectric constant tan :…
SEMI G75.11-0698 © SEMI 1998 2
Figure 2
Electrodes Formed on the Leadframe Tape
Figure 3
Electrode Connection
3
SEMI G75.11-0698 © SEMI 1998
6.3 Dielectric constant and dielectric dissipation factor should be calculated by the following equation:
ε
=
C
x
/C
o
tan
δ
= G
x
/2
π
fC
x
w
h
ere
:
ε
:
dielectric constant
tan
:
dielectric dissipation factor
C
x
:
capacity of measuring condenser
C
c
balances
C
o
:
electrostatic capacity for
ε
=1
calculated by the following equation using the area of
the main electrode and thickness of specimen
C
o
=
r
2
/3.6 t
where :
r
:
radius of main electrode
t
:
thickness of specimen
G
x
:
conductance of specimen calculated
by the following equation
G
x
=g
×
Sv/100
where :
g
:
conductance between "m" and "d"
of conductance shifter in Figure 1
Sv/100
:
resistance ration of conductance
shifter at balance
f
:
the frequency of measurement
:
the ratio of the circle's circumference
to its diameter
7 Related Documents
7.1 ASTM Specification
2
ASTM D 150-64T — Standard Test Methods for Dielectric Constant and Dissipation Factor of Insulating Materials
2 American Society of Testing and Materials, 100 Barr Harbor Drive, West Conshohoken, PA 19428-2959 (all cited standards may be found in
Volume 10.05 of the Annual Book of ASTM Standards)
SEMI G75.11-0698 © SEMI 1998 4
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