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SEMI E122-0703 © SEMI 2003 17 Report Label Description Availability End of Test Description Unit level result. One re port is linked to the End of Test event. This one report contains information for all test-sites teste…

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SEMI E122-0703 © SEMI 2003 16
Report Label Description
Availability Upon completion of a Parametric Test.
Description Result of a Parametric test.
PARAMETRIC-TEST-RESULT
Format List, 6
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
6. List, n (n = # of results reported)
1. List, 3
1. PinId
1
2. RealResult
1
3. Range
1
…
n. List, 3
1. PinId
n
2. RealResult
n
3. Range
n
Availability Upon completion of a Text Test.
Description Result of a Text test.
TEXT-TEST-RESULT
Format List, 6
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
6. List, n (n = # of results reported)
1. TextResult
1
2. TextResult
2
…
n. TextResult
n
Availability Upon completion of any kind of Test.
Description Generalized test result.
BRIEF-RESULT
Format List, 5
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
SEMI E122-0703 © SEMI 2003 17
Report Label Description
Availability End of Test
Description Unit level result. One report is linked to the End of Test
event. This one report contains information for all test-sites
tested.
DEVICE-RESULT
Format List, c (c = # of SiteIDs)
1. List, 4
1. SiteID
1
2. Pass
1
3. SoftBinID
1
…
c. List, 4
1. SiteID
c
2. Pass
c
3. SoftBinID
c
11 Process Program Management
11.1 Process Program Requirements
11.1.1 The GEM requirements for process program
management must be fully supported for this class of
equipment. The following is also required. The
process program must have a structure that enables the
user to build process programs with default conditions
that can be overridden at run time via parameters
specified in the PP-SELECT remote command.
• When a process program is downloaded to the
equipment by the host, the process program syntax
shall be verified by the equipment.
• The downloaded process parameters shall be
checked for type and range before execution. An
error message must be generated from the tester if
the process program parameters are outside the
range of the machine capability.
• The contents of the downloaded process program
body (PPBODY) may contain the explicit para-
meters and data necessary for the runtime process
program, or the body may contain reference
information (i.e., PATH location) on where the
explicit data is stored. In the latter case, it is
required that the equipment combines or compiles
the reference data prior to the verification step.
11.2 Diagnostic and calibration routines are considered
process programs and must be verified and validated
the same as a typical process program.
12 Alarm Management
12.1 Alarm Definition
12.1.1 The TSEM requires a broader definition of
alarms than is provided by SEMI E30. The alarm
definitions provided by SEMI E5 provide this broader
definition. SEMI E5 provides for eight (8) categories
of alarms:
1. personal safety — Condition may be dangerous to
people.
2. equipment safety — Condition may harm
equipment.
3. parameter control warning — Parameter variation
outside of preset limits — may harm product.
4. parameter control error — Parameter variation
outside of reasonable control limits — may
indicate an equipment malfunction.
5. irrecoverable error — Intervention required before
normal use of equipment can resume.
6. equipment status warning — An unexpected
condition has occurred, but operation can continue.
7. attention flags — A signal from a process program
indicating that a particular step has been reached.
8. data integrity — A condition that may cause loss
of data.
12.1.2 It will be the equipment’s responsibility to
categorize the alarm. Some alarm conditions may
cause more than one type of alarm to be issued. For
example, a parameter control error for over voltage may
also trip a protective device that makes the alarm
irrecoverable without some intervention.
12.2 Relationship to ALARM PAUSED Process State
12.2.1 The relationship between an alarm condition
and the ALARM PAUSED process state should be
defined by the equipment manufacturer on a case-by-
case basis along these guidelines.
SEMI E122-0703 © SEMI 2003 18
1. An alarm does not necessarily require a process
state change to ALARM PAUSED even though it
may ultimately prove to be the root cause of that
transition at a later time.
2. Alarms that force immediate processing stoppage
for the primary function of the tool should trigger a
transition to ALARM PAUSED.
3. Most alarms in categories 1–3 will cause a
transition to ALARM PAUSED.
12.2.2 A machine with currently set alarms may
PAUSE instead of ALARM PAUSED if none of the
currently set alarms were the immediate trigger for the
transition.
13 Remote Commands
13.1 The purpose of this section is to identify remote
commands, command parameters, and valid commands
versus states in the processing state models.
13.2 Requirements
• The equipment must support the GEM-required
remote commands. (Some of the SEMI E30-
required remote commands are restated here to
define TSEM-specific requirements.)
• All the remote commands defined by TSEM are
required.
• The alphanumeric strings defined by TSEM for
remote commands and command parameters are
required.
• If additional remote commands are supported, then
the “Remote Command versus Valid States” matrix
must be generated for these additional commands.
Place an “X” in the table for each state in which a
given command is valid.
13.3 Remote Commands and TSEM Process Model
Mapping
13.3.1 Table 9 illustrates the relationship between
remote commands and states of the TSEM processing
state model. An “X” indicates that a command is valid
for use in this state. If a remote command is attempted
during a non-valid state, the equipment would reject the
remote command.
13.4 Remote Command Descriptions
13.4.1 ABORT — This command terminates the
current processing. ABORT makes no guarantee about
completion of the current test(s).
13.4.2 PAUSE — This command transitions the tester
to the PAUSING process state when the current test(s)
completes processing.
13.4.3 RESUME — This command resumes processing
from the point where the process was PAUSED.
Process program variable parameters can be specified
in this command that modify the default values for
these variable parameters in the process program.
Process program verification (CHECKING state) must
occur when variable parameters accompany this
command.
13.4.4 PP-SELECT — This command instructs the
tester to copy the indicated Process Program from non-
volatile storage to the tester’s process program
execution area. Process program variable parameters
can be specified in this command that modify the
default values for these variable parameters in the
process program. Process program verification must
occur when variable parameters accompany this
command.
13.4.5 DEFINE-DATALOG-PLAN — This command
defines and names a datalog plan. The START
command may subsequently activate the datalog plan
by name.
13.4.6 START — This command is only available to
the host or operator when a process program has been
selected and the tester is in the READY processing
state. The START command instructs the tester to
initiate processing. Parameters can be specified in this
command.
13.4.7 STOP — This command completes the current
test(s), stops in a safe condition, and returns to the
IDLE processing state. STOP has the intent of bringing
about a normal termination after completion of the
current test(s).
13.4.8 START EXEC — This command instructs the
tester to start the tester executive.
13.4.9 STOP EXEC — This command instructs the
tester to stop the tester executive.
13.4.10 ENABLE-SITE — This command instructs the
tester to persistently re-enable a test-site previously
disabled via the DISABLE-SITE remote command.
Parameters can be specified in this command.
13.4.11 DISABLE-SITE — This command instructs the
tester to persistently disable a test-site originally
enabled via the PP-SELECT remote command.
Parameters can be specified in this command.