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SEMI C3.23-1000 © SEMI 1984, 2004 6 Figure 3 Sample System for NDI R Analyzer NOTICE: These standards do not purport to address safety issues , if any, associat ed with th eir use. It is the responsibility of the user of…
SEMI C3.23-1000 © SEMI 1984, 2004 5
Figure 1
Figure 2
SEMI C3.23-1000 © SEMI 1984, 2004 6
Figure 3
Sample System for NDIR Analyzer
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
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consent of SEMI.
SEMI C3.41-0703 © SEMI 1990, 2004 1
SEMI C3.41-0703 (Withdrawn 1104)
STANDARD FOR OXYGEN (O
2
), BULK, 99.9998% QUALITY
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in 1990; previously published July 2003.
NOTICE: This document was balloted and
approved for withdrawal in 2004.
1 Description
1.1 Oxygen is a colorless, odorless, and oxidizing
gas. It supports combustion.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations
prior to use.
2 Specifications
QUALITY: 99.9998%
Figure 1A purifier is allowed to be used to meet this
specification.
Impurities
Maximum Acceptable Level
(ppm) (See Note 1.)
Argon (Ar) 1.0
Carbon Dioxide (CO
2
) 0.1
Carbon Monoxide (CO) 0.1
Hydrogen (H
2
) 0.1
Nitrogen (N
2
) 0.5
Particles (See Note 2.)
Total Hydrocarbons (as
CH
4
)
0.1
Water (H
2
O) (v/v) 0.1
TOTAL SPECIFIED
IMPURITIES
2.0
NOTE 1: An analysis of significant figures has not been
considered. The number of significant figures will be based on
analytical accuracy and the precision of the provided procedure.
NOTE 2: To be determined between user and supplier.
3 Physical Constants (for information only)
Metric Units US Units
Molecular weight 31.999 31.999
Boiling point at 1 atm 183.0°C 297.4°F
Density of gas at 25°C
(77°F) and 1 atm
1.309 kg/m
3
0.082 lb/ft
3
Specific gravity of gas 1.1049 1.1049
Density of liquid at boiling
point
1142 kg/m
3
71.27 lb/ft
3
4 Analytical Procedures
4.1 Argon and Nitrogen — This procedure is for the
determination of argon and nitrogen in oxygen using
a gas chromatograph with a discharge ionization
detector (see Figure 1).
4.1.1 Detection Limit — 0.1 ppm
4.1.2 Instrument Parameters
4.1.2.1 Column(s):
3 m (10 ft) by 3.2 mm (1/8 in.) o.d. in Molecular
Sieve 5A
3 m (10 ft) by 3.2 mm (1/8 in.) Oxy–trap (See Figure
1.)
4.1.2.2 Carrier Flow: 44 cc/min
4.1.3 Sample Volume: 0.1 mL
4.1.3.1 Temperatures:
Detector 100°C
Column 30°C
Oxytrap 150°C
4.1.4 Calibration Standards — 1–5 ppm nitrogen
and argon in oxygen.
4.1.5 Operating Procedures
4.1.5.1 Inject the calibration standard into the
column using a gas sampling valve. Record the
retention times and peak area. Order of elution is
argon, nitrogen. If methane is present, the order is
argon, nitrogen, methane.
4.1.5.2 Inject the sample to be tested in same manner
as the calibration standard. Record the retention times
and peak area.
4.1.5.3 Repeat 4.1.5.1.
4.1.5.4 Compare the average peak areas of the
calibration standard to that of the sample being
tested. Calculate the concentrations of impurities as