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SEMI E122.1-0703 © SEMI 2003 7 • Setting the configurati on of the equipm ent to allow for differe nt materi al specifications, e quipment options, material flows, frequency of automatic functio ns , etc. An exam ple is …

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SEMI E122.1-0703 © SEMI 2003 6
Service SECS-II Field Values Req. Description
CPVAL
4
L, c
1. L, 3
1. U4
2. U4
3. U4
…
c. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options for specific test ids.
L, c (c = # of (TestId, TestStatus) pairs being
assigned reports.)
1. L, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. L, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
CPNAME
5
“DATALOGOPTION” N DATALOGOPTION parameter.
CPVAL
5
U4 N Turns datalog on/off.
(0:No Log, 1:Log Pass, 2:Log Failures, 3: Log
All)
CPNAME
6
“DATALOGPLANNAME” N DATALOGPLANNAME parameter.
CPVAL
6
A[80] N Turns on datalogging according to a
predefined plan. This parameter overrides all
other individual datalog setting options in a
START command.
START-EXEC RCMD “START-EXEC” Y
STOP RCMD “STOP” Y
STOP-EXEC RCMD “STOP-EXEC” Y
6 Variable Data Item Mapping
6.1 The purpose of this section is to define the list of variable items required by the TSEM. Values of these
variables will be available to the host through collection event reports and host status queries.
6.2 Requirements
6.2.1 All generic variable items defined in SEMI E30 are required by all TSEM equipment.
6.2.2 Any supplier-defined variables shall be documented in the same format used by this document. The following
minimum information is required:
<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>
Description: <If class = DVVAL, description must contain statement of when data is valid.>
<If format = ASCII, then a length is required. It is assumed to be left-justified unless otherwise noted.>
6.3 Data Types
6.3.1 Equipment Constants (ECVs) can be changed by the host using S2,F15. The operator may be able to change
some values, but the equipment does not change the values on its own. The value of an equipment constant may be
queried by the host at any time, using the S2,F13/14 transaction. They reside in non-volatile memory of the
equipment. Equipment constants remain in effect until they are overwritten either by manual entry or by a S2,F15
(NEW EQUIPMENT CONSTANT SEND).
6.3.2 Equipment constants have various uses in TSEM, including the following:
• Equipment offsets that match the performance of several pieces of equipment that would otherwise perform
differently due to inherent manufacturing differences. Examples are home values and motion axis scaling
factors.
SEMI E122.1-0703 © SEMI 2003 7
• Setting the configuration of the equipment to allow for different material specifications, equipment options,
material flows, frequency of automatic functions, etc. An example is yield check frequency.
• Managing optional machine features. Examples are constants that indicate whether optional features such as
automated media stackers are present and control the configuration and function of these optional subsystems
when they are present.
6.3.3 Status Variables (SVs) are valid at all times. An SV may not be changed by the host but may be changed by
the equipment or operator. The value of status variables may be queried by the host at anytime using the S1,F3/4 or
S6,F19/20 transactions.
6.3.4 DVVALs are variables that are valid only upon the occurrence of specific collection events. An attempt to
read a variable item at the wrong time does not generate an error, but the data reported may not have relevant
meaning.
6.3.5 Data Item Requirements for Multi-Head, Multi-Site Equipment — The identification for multi-head and multi-
site data (variable items, status variables, events, etc.) is addressed in this specification through the use of status
variables. In Table 5, the subscript “v” is used to denote the number of virtual testers, “h” is used to denote the
number of tester heads, “s” to denote the number of tester head sites, and “b” to denote the number of bins or
classes.
6.3.6 class, hard-bin, and soft-bin — Equipment is to maintain DVVALs which provide three levels of granularity
for test results: class, hard-bin, and soft-bin. Classes, hard-bins, and soft-bins are expected to be defined within a
process program, and their names are made available as DVVALs. When device testing has completed, the process
program is to determine the class, hard-bin, and soft-bin with which the device is to be associated, based on the
results of the testing. Finally, a summation of the number of devices associated with each class, hard-bin, and soft-
bin is also maintained throughout the execution of a process program, and these are also made available as
DVVALs.
6.4 For multiple sites scenarios, if a variable is described as List by number of sites, then a list is expected, one
value for each site.
Table 5 Variable Item Mapping Table
Variable Name Description SECS-II Type Class Comments
ActiveSites List of test-sites that are to be tested. L, n
1. U4
2. U4
:
n. U4
SV n = # of active sites
Address Address of the reported vector. U4 DVVAL Valid only in Datalog
reports.
Channel Hardware channel or resource
identifier.
A[80] DVVAL List by PinID.
ClassID Test result class number. U4 DVVAL List by test-site.
ClassName Test result class name. A[80] DVVAL List by ClassID.
ConfigInfo Physical configuration information. Format is
determined by
vendor.
SV Implementation specific
variable.
Cycle Cycle count for this report. U4 DVVAL Valid only in Datalog
reports.
DatalogConfig Datalog Configuration. A[80] SV
DatalogPlanName Datalog report plan name. A[80] SV
DockingStatus Information on handler/prober
docking status.
BOOLEAN SV
SEMI E122.1-0703 © SEMI 2003 8
Variable Name Description SECS-II Type Class Comments
EnabledSites List of test-sites initially enabled at
process program download.
L, n
1. U4
2. U4
:
n. U4
SV n = # of enabled sites
EquipMake Tool Manufacturer. A[80] SV
EquipSerialID Unique Equipment identifier. A[80] SV
FunctionalResult Vector of bits indicating pass or fail
for each pin.
B DVVAL
HardBinID Test result hard-bin number. U4 DVVAL List by test-site.
HardBinName Test result hard-bin name. A[80] DVVAL List by HardBbinID.
HighLimit Higher limit for measurement.
Multiple instances of this variable
exist. See TEST-LIST report.
F4 DVVAL List by TestID.
LowLimit Lower limit for measurement.
Multiple instances of this variable
exist. See TEST-LIST report.
F4 DVVAL List by TestID.
NumberOfHeads The number of test-heads on the
system.
U4 SV
NumberOfPins The number of pins for each test-head. U4 SV
OperatorID Current Operator ID. A[80] ECV
Pass True if the test passed. BOOLEAN DVVAL Valid only in Datalog
reports.
PatternName This must identify the location to
which the vector address and cycle
count are relative.
A[80] DVVAL Valid only in Datalog
reports.
PinID Pin identifier used to identify the pin
results in pin result reports.
U4 DVVAL List by PinID.
PPExecVersion Test program version. A[80] SV
ProcessProgramID Process program identifier. A[80] SV
Range Range used by the measurement unit. F4 DVVAL Valid only in Datalog
reports.
RealResult Measured value. F4 DVVAL Valid only in Datalog
reports.
Signal Signal name. A[80] DVVAL List by PinID.
SiteID Test-board test-site number for multi-
site (parallel) testing.
U4 DVVAL
SoftBinID Test result soft-bin number. U4 DVVAL List by test-site.
SoftBinName Test result soft-bin name. A[80] DVVAL List by SoftBinID.
SoftwareBuildID The build ID of this software list
element. Multiple instances of this
variable exist. See
SOFTWARE-LIST report.
A[80] DVVAL
SoftwareName The name of this software list element
(e.g. Solaris, IG9000, etc.) Multiple
instances of this variable exist. See
SOFTWARE-LIST report.
A[80] DVVAL
SoftwareType The type of this software list element
(e.g. Operating System, Tool Control
System, etc.) Multiple instances of this
variable exist. See
SOFTWARE-LIST report.
A[80] DVVAL