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SEMI S22-1103a © SEMI 2003, 2005 51 DELAYED REVISION SECTION 1 (Effective July 1, 2006) MODIFICATION TO SEMI S22 NOTICE: This Delaye d Revision Section contains m ateri al that has been balloted and approved b y the SEMI…

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SEMI S22-1103a © SEMI 2003, 2005 50
Table A1-15 Over Current Protection For Transformers with Thermal Protection
Transformer Impedance Maximum Primary Protection
Percent Of Rating (See Note 1)
Maximum Secondary Protection
Percent Of Rating
#1
6 percent or Less 600 125
More than 6 percent and Less Than
10 percent
400 125
#1
Where the rating does not match a standard overcurrent device rating, the next standard size is permitted.
NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guidelines set forth herein
for any particular application. The determination of the suitability of the safety guidelines is solely the
responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels, product data
sheets, and other relevant literature, respecting any materials or equipment mentioned herein. These safety
guidelines are subject to change without notice.
By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in
this safety guideline. Users of this guideline are expressly advised that determination of any such patent rights or
copyrights, and the risk of infringement of such rights are entirely their own responsibility.
SEMI S22-1103a © SEMI 2003, 2005 51
DELAYED REVISION SECTION 1 (Effective July 1, 2006)
MODIFICATION TO SEMI S22
NOTICE: This Delayed Revision Section contains material that has been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is not immediately effective. The provisions of this
material are not an authoritative part of the document until their effective date. The main body of SEMI
S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
be optionally applied prior to the effective date, providing they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred revision, and
are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined
, and all material to be deleted shall
be struck through
.
D1-1 Revisions to Section 13 (Safety Circuits) — OPTIONAL Before Effective Date
D1-1.1 Make the following changes to ¶13.7.3 and ¶13.7.3.1:
13.7.3 Safety Interlock Design Electromechanical devices and components are preferred.
, but solid state
devices and non
-programmable solid state components may be used provided that the safety interlock system or
relevant parts of the system are evaluated for suitability for use in accordance with appropriate standard(s). The
evaluation for suitability should take into consideration abnormal conditions such as overvoltage, undervoltage,
power supply interruption, transient overvoltage, ramp voltage, electromagnetic susceptibility, electrostatic
discharge, thermal cycling, humidity, dust, vibration, jarring, or interfacing to a network.
EXCEPTION: Where the severity of a reasonably foreseeable mishap is deemed to be minor per SEMI S10, a
software-based safety interlock may be considered suitable.
13.7.3.1 FECS may be used in conjunction with electromechanical or solid state devices and components provided
the programmable safety control system conforms to an appropriate standard for electronic safety systems.
Components of the FECS should be tested and certified according to the requirements of the standard used.
Examples of recognized electronic safety systems standards include IEC 61508, ISO 13849-1, (EN 954-1),
ANSI/ISA SP84.01, DIN/V/VDE-0801.
EXCEPTION: Where the severity of
a reasonably foreseeable mishap is deemed to be minor per SEMI S10, a
software-based safety interlock may be considered suitable.
SEMI S22-1103a © SEMI 2003, 2005 52
DELAYED REVISION SECTION 2 (Effective July 1, 2006)
MODIFICATION TO SEMI S22
NOTICE: This Delayed Revision Section contains material that has been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is not immediately effective. The provisions of this
material are not an authoritative part of the document until their effective date. The main body of SEMI
S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
be optionally applied prior to the effective date, providing they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred revision, and
are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined
, and all material to be deleted shall
be struck through
.
D2-1 Revisions to Section 13 (Safety Circuit) — OPTIONAL Before Effective Date
D2-1.1 Modify “e” of 13.3.4:
e)
the EMO actuator should be non-lockable and self-latching.
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