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SEMI E54.8-0305 © SEMI 1999, 2005 2 4 Referenced Standards 4.1 SEM I Standards SEMI E39 — Object Se rvices Standard : Co ncepts, Beha vior, a nd Services SEMI E54.1 — Standard for Sensor/ Actuator Network C ommon Devi ce…

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SEMI E54.8-0305 © SEMI 1999, 2005
1
SEMI E54.8-0305
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR PROFIBUS-DP
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the European Information & Control Committee. Current edition approved by the European
Regional Standards Committee on October 7, 2004. Initially available at www.semi.org February 2005; to be
published March 2005. Originally published September 1999.
1 Purpose
1.1 This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific
communications protocol based on the PROFIBUS-DP standard. This Network Communication Standard (NCS)
taken together with the SEMI Sensor/Actuator Network standard suite and the PROFIBUS standard completely and
unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of
networked devices in semiconductor manufacturing equipment.
1.2 PROFIBUS is a vendor independent, open fieldbus standard for a wide range of applications in manufacturing,
process and building automation. Vendor independence and openness are guaranteed by the IEC standards for
PROFIBUS, IEC 61158 part 2 to part 6 and IEC 61784-1. PROFIBUS-DP is one version of PROFIBUS which is
optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at
the device level.
2 Scope
2.1 This document specifies a SAN communications standard based on the PROFIBUS-DP specification that is in
compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent
devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
2.2 In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI
standard Specific Device Model (SDM) specifications (e.g., for a Mass Flow Controller, In-Situ Particle Monitor
Devices or Endpoint Devices), this Network Communication Standard (NCS) with the related PROFIBUS-DP
standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the
network. This composite model forms a complete interoperability standard for communications among intelligent
sensors, actuators, and controllers in semiconductor manufacturing equipment.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based solely on PROFIBUS-DP and is a companion
document to the PROFIBUS-DP specification; thus, a complete specification of this standard necessarily includes
the PROFIBUS-DP specifications. There are other semiconductor equipment SAN communications options. The
specifications for these options are not included here.
3.2 The specifications within are strictly enhancements that provide additional capabilities over and above those
currently required by PROFIBUS-DP. Included throughout this document, primarily in §6, is information
paraphrased from the PROFIBUS-DP specifications such as: protocol structure, capabilities, options, and
limitations. This information is provided here for reference only and is not intended to provide specification
definitions. In all such areas, refer to the PROFIBUS-DP specification documents for information. This document
is limited to describing enhancements or limitations to the PROFIBUS-DP specification that are imposed by this
standard.
3.3 A complete specification of the conformance testing procedure shall include the PROFIBUS-DP protocol
conformance testing specification. Conformance testing shall also include enhancements and limitations to the
PROFIBUS-DP specification required by this standard.
SEMI E54.8-0305 © SEMI 1999, 2005 2
4 Referenced Standards
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor
Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
4.2 ISO Standard
1
ISO 7498 OSI — Basic Reference Model for Open Systems Interconnection
4.3 IEC Standards
2
IEC 61158-2 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Physical Layer specification
IEC 61158-3 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Data Link Layer service definition
IEC 61158-4 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Data Link Layer protocol specification
IEC 61158-5 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems –Application Layer service definition
IEC 61158-6 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Application Layer protocol specification
IEC 61784-1 — Digital data communication for measurement and control – Profile sets for continuous and discrete
manufacturing relative to fieldbus use in industrial control systems
4.4 PROFIBUS Standards
3
PROFIBUS Profile Guidelines — Part 1: Identification & Maintenance Functions
GSD Specification for PROFIBUS
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 APDU — Application Protocol Data Unit
5.1.2 AREP — Application Reference Endpoint
5.1.3 ASE — Application Service Element
5.1.4 CDM — Common Device Model
5.1.5 DMPM — Data Link Mapping Protocol Machine
1 International Organization for Standardization, 1 rue de Varembe, Case postale 56, CH-1211, Geneva 20, Switzerland
2 International Electrotechnical Commission, 3 rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00, Website: www.iec.ch
3 Profibus International, Haid-und-Neu-Str. 7,76131 Karlsruhe, Germany, Telephone: 49 721 9658 590; Fax: 49 721 9658 589, Website:
www.profibus.com
SEMI E54.8-0305 © SEMI 1999, 2005 3
5.1.6 DP — Decentralized Periphery
5.1.7 DPM1 — DP-Master Class 1
5.1.8 DPM2 — DP-Master Class 2
5.1.9 DPV1 — DP Extensions Version 1
5.1.10 DSAP — Destination SAP
5.1.11 FDL — Fieldbus Data Link
5.1.12 FSPM — Fieldbus Service Protocol Machine
5.1.13 GSD — Generic Data Description
5.1.14 IM — Identification and Maintenance
5.1.15 NCS — Network Communication Standard
5.1.16 OSI — Basic Reference Model for Open Systems Interconnection (ISO 7498)
5.1.17 PDU — Protocol Data Unit
5.1.18 PHY — Physical Layer
5.1.19 SAN — Sensor/Actuator Network
5.1.20 SAP — Service Access Point
5.1.21 SDA — Send Data with Acknowledge
5.1.22 SDM — Specific Device Model
5.1.23 SDN — Send Data with No acknowledge
5.1.24 SRD — Send and Request Data with reply
5.1.25 SSAP — Source SAP
5.2 Terminology Defined in Sensor/Actuator Network Common Device Model (SEMI E54.1)
5.2.1 attribute
5.2.2 behavior
5.2.3 byte
5.2.4 common device model
5.2.5 device
5.2.6
Device Manager (DM) Object
5.2.7 device model
5.2.8 instance
5.2.9 network communication standard
5.2.10 object
5.2.11 Sensor, Actuator and Controller (SAC) Object
5.2.12 service
5.2.13 specific device model
5.2.14 state diagram