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SEMI E30-1103 © SEMI 1992, 2003 83 A. Application Notes NOTE: The material contai ned in t hese Application Notes is not an official part of thi s SEMI standard and is not intended to m odify or supersede the official st…

SEMI E30-1103 © SEMI 1992, 2003

Table 8.4 SML Notation

SECS-II Format Code

Item Format

Binary Octal

SML Item Format Mnemonic

LIST 000000 00 L [length]

Binary 001000 10 B

Boolean 001001 11 BOOLEAN

ASCII 010000 20 A [length] or A [min., max.]

JIS-8 010001 21 J [length] or J [min., max.]

8-byte integer (signed) 011000 30 I8

1-byte integer (signed) 011001 31 I1

2-byte integer (signed) 011010 32 I2

4-byte integer (signed) 011100 34 I4

8-byte floating point 100000 40 F8

4-byte floating point 100100 44 F4

8-byte integer (unsigned) 101000 50 U8

1-byte integer (unsigned) 101001 51 U1

2-byte integer (unsigned) 101010 52 U2

4-byte integer (unsigned) 101100 54 U4

SEMI E30-1103 © SEMI 1992, 2003

A. Application Notes

NOTE: The material contained in these Application

Notes is not an official part of this SEMI standard and

is not intended to modify or supersede the official

standard. Rather, these notes are auxiliary information

describing possible methods for implementing the

protocol described by the standard and are included as

reference material. The standard should be referred to

in all cases. SEMI makes no warranties or

representations as to the suitability of the material set

forth herein for any particular application. The

determination of the suitability of the materialis solely

the responsibility of the user.

A.1 Factory Operational Script

An Operational Script is a series of capabilities

arranged in a typical factory operation sequence. The

intent of having an Operational Script is to help put the

SECS-II message Scenarios into a context. Although

this context will vary, it represents a typical operational

sequence found in most semiconductor device

manufacturers’ applications.

— System Initialization

— Synchronization

— Machine Setup

— Production Setup

— Processing

— Post-Processing

— Shutdown

The following script is not intended to be complete, but

to serve as an example to be further developed on an

implementation basis.

A1.1 Anytime Capabilities  All capabilities can

generally occur at anytime during the operational script

sequence.

A1.2 System Initialization and Synchronization 

Upon system initialization, the default setting for

communication (enabled or disabled) becomes

effective, as well as any equipment constants or other

information retained in non-volatile storage. The initial

communication status is displayed at the equipment.

Assuming the communication state is enabled, the

equipment will attempt to establish communication

with a host computer. See Section 4.1 for a description

of the scenario for establishing communications.

Upon receiving an indication that the equipment was

previously not communicating, the host would typically

perform synchronization activities including setting the

equipment’s clock and requesting selected status

information. Note that synchronization activity is host

application-dependent and may be implemented using

various scenarios.

A1.3 Production Set-Up  The host typically has the

following information:

— what material

— what process step

— what process program to use (PPID)

— current equipment status, VID’s, SVID’s

— data collection requirements (trace data & event

data)

— VID’s needed

— Equipment constants (ECID’s)

Based upon the above information, the host will

perform setup activities as required. It must be verified

that the correct process program is available and

selected at the equipment.

A1.3.1 Auxiliary Material and Manual Set-Up 

Auxiliary material can be checked and verified at this

point. If status variables exist for auxiliary material,

they may be requested by the host.

Any other manual, non-process, and/or non-product

specific set-up also may take place at this point. The

operator may interact with the equipment and the host.

If the operator interacts with the equipment, the

equipment communications link with the host should

stay operational.

The operator and the host may exchange information

via equipment terminal services.

A1.3.2 Product/Process Set-Up  Specific product

and/or process information is communicated to the

equipment prior to processing material.

A1.3.3 Material Load  The host may instruct an

operator or a material handling system to deliver

material to the equipment.

Once the material has arrived at the equipment, the

equipment or the operator will notify the host.

A1.3.4 Production Data Collection Set-Up  The host

instructs the equipment to collect event-based data.

Reports are defined and linked to events. Event reports

can be enabled or disabled.

The host instructs the equipment to collect data from

the equipment based on time intervals.

SEMI E30-1103 © SEMI 1992, 2003

The host configures the equipment to monitor specific

variables and to send event reports when variables

transition between monitoring zones.

A1.4 Processing

A1.4.1 Start Process Executing  The host or

operator issues a command to start.

A1.4.2 Equipment Signals End of Run  When

process execution is completed, the equipment

generates events. If any of the events are enabled, they

will be sent as event reports.

A1.5 Post-Processing  The equipment has

completed processing material. It now makes the

material available to the operator or material handling

system for removal. The equipment signals the host that

it is available for more work.

A1.5.1 Material Unload  Material is unloaded from

the equipment by an operator or material handling

system.

A.2 Equipment Front Panel

In the GEM standard, several requirements are stated

that involve the display or input of information at the

equipment front panel. The “equipment front panel”

refers to an area on the equipment that is available to

the operator under normal use (i.e., without removing

maintenance access panels). This may include a CRT

display, keyboard, switches, and lights.

This application note provides some guidance for

implementation of the GEM front panel capabilities. All

of these requirements map directly to state models and

capabilities defined in Sections 3 and 4. All capabilities

may be implemented in either hardware (buttons,

switches, lights) or in a software/CRT equivalent.

A2.1 Displays and Indicators  The intent of various

displays is to inform the operator of either the current

state of the equipment or of a recent change of state (or

both). Therefore, it is most useful if these displays are

continuously visible and easily recognized at a distance.

Required displays/indicators include:

Communications State: This means that three distinct

states must be represented: DISABLED,

ENABLED/NOT COMMUNICATING, and

ENABLED/COMMUNICATING.

Terminal Services: An “New Host Message” indicator

must be supplied.

A2.2 Switches/Buttons  Note that discrete switches

also contain information for the user. However, these

tend to represent the desired states of the operator/user.

The equipment’s response to a change of a switch may

not be instantaneous. Still, the current position of

switches should be available to the operator.

It may be appropriate to limit the access to some

switches and buttons. This might be done via any of the

standard methods, keys, passwords, combinations, etc.

This is especially true for system default switches that

would not often be changed. Required switches/buttons

include:

Communications State System Default: In what

communications state should the equipment be when

system initialization is complete? The choices are

DISABLED and ENABLED.

Communications State Selector: This is a toggle or

button that will initiate a transition from ENABLED to

DISABLED or vice versa.

Message Recognition Button: This button is used to

initiate an event message to the host which indicates

that the “New Host Message” has been read. This

button should function only when the New Host

Message Indicator is activated and when the received

message is displayed in the terminal display.

A.3 Examples of Equipment Alarms

Table A.3 provides alarm examples pertaining to

various configurational aspects of equipment.

NOTE: It is important to stress that these are just

examples intended to illustrate that alarms pertain to

situations in which there exists a potential for

exceeding physical safety limits associated with people,

equipment, and material being processed as per the

GEM definition of an alarm.

NOTE: The alarm capability is intended as an addition

to standard safety alarms (e.g., lights, horns). There is

no intent to replace direct operator reaction to such

problems. Nor is there the expectation that the host can

necessarily prevent or directly address such alarms.

An actual machine shall have an associated set of

alarms defined by the manufacturer that pertains to its

specific configuration and design. The equipment

manufacturer is responsible for supplying

documentation associated with these alarm definitions.