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SEMI F4-1000 © SEMI 1990 , 2000 5 NOTICE: SE MI makes no warra nties or representations as to the suitabilit y of the standards set forth herein for any particular application. The determination of the suitability o f th…

SEMI F4-1000 © SEMI 1990, 2000 4

8.6.1 Cylinder valves shall be opera ted alternately

through minimum and maximum temperatures

specified in Section 8.1.2 in 1000 cycle increments until

completion of the specified number of cycles. The first

thermal cycle shall take the cylinder valves to

maximum temperature. Cylinder valves shall be at

thermal equilibrium while mechanically cycling.

Initially, and at the completion of every 1000 cycles,

the cylinder valves shall not exceed the inboard,

internal, and outboard leakage tests specified in SEMI

F1 at normal temperature.

8.6.2 The cylinder valve inlet pressu re shall be the

cylinder valve rated pressure. Cylinder valves shall be

cycled at a rate of one cycle per ten seconds, equally

divided between opening and closing. During the off

cycle, the cylinder valve's downstream pressure shall be

allowed to decay to 50% or less of the inlet pressure.

8.7 Tip-Over Test



After being s ubjected to tip-over

tests the cylinder valves shall show no evidence of

structural damage, shall not exceed the inboard,

internal, and outboard leak rates specified in SEMI F1,

and shipping caps or other protective devices shall be

able to be removed or adjusted so that the valve can be

operated.

8.7.1 Tip-over testing shall be conducted in

accordance with CGA V-9, Section 5.2.6.4.

8.7.2 The tip-over tests shall be performed with the

cylinder valve installed on a 166 kPa (2400 psig), 250

mm (10 inches) diameter by 1550 mm (61 inches) long

(including cap) gas cylinder, or onto a smaller cylinder

if the valve is restricted by the manufacture for use on

the smaller cylinder.

8.7.3 A shipping cap or other protec tive device shall

be installed onto the cylinder during the tip-over tests.

If a special cap or protective device is used it shall

conform to the requirements of CGA V-9, Appendix E-

49 CFR cylinder drop protocol.

9 Manufacturing Requirements

9.1 Acceptance Testing

9.1.1 Each cylinder valve shall be acceptance tested

for inboard, internal, and outboard leakage per SEMI

F1.

9.1.2 Each actuator shall be tested fo r leakage of less

than 1 sccm at 550 kPa (80 psig).

9.1.3 Each cylinder valve shall be vi sually inspected

for cleanliness, damage, proper markings, and actuator

function, as a minimum.

9.2 Marking — Each cylinder valve shall be

permanently identified with the following minimum

information:

9.2.1 Manufacturer’s name or logo.

9.2.2 Manufacturer’s part number or part number

code.

9.2.3 Outlet type (CGA number or other specification

identification).

9.2.4 Pressure relief device marked in accordance with

CGA pamphlet S-1.1 or other specification

identification.

9.2.5 Manufacturer’s serial number or code that will

provide traceability for materials, test data, and

assembly date.

9.2.6 Flow limiting information when the flow

limiting device is integral to the cylinder valve and not

intended for removal.

9.3 Traceability — The manufacturer shall use a

program to qualify raw materials, parts, assemblies, and

purchased components and to provide traceability of all

components (manufactured or purchased) used in

production of cylinder valves.

9.4 Instructions

9.4.1 Clear, concise instructions and diagrams stated

in terms clearly understandable and adequate for proper

installation and safe operation shall be provided with

each cylinder valve.

9.4.2 Instructions for periodic maintenance or repair,

as required, shall be made available by the

manufacturer. No repairs or maintenance shall be

conducted without these instructions. Parts that require

replacement shall be identified.

9.5 Maintenance — Ideally, the cylinder valve shall be

capable of fulfilling the performance and qualification

requirements of this specification after any of the

maintenance procedures specified by the cylinder valve

manufacturer. Maintenance shall be performed by only

those persons the cylinder valve manufacturer deems

qualified.

10 Related Documents

10.1 Military Specification

MIL-DTL-2E — Valves, Cylinder, Gas

5 Military Specification, Commanding Officer, Naval Publications

and Forms Center, Attention: MPFC 105, 5801 Tabor Avenue,

Philadelphia, PA 19120

SEMI F4-1000 © SEMI 1990, 20005

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user's attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F5-1101 © SEMI 1990, 20011

SEMI F5-1101

GUIDE FOR GASEOUS EFFLUENT HANDLING

This guide was technically approved by the Global Environmental Health & Safety Committee and is the

direct responsibility of the North American Environmental Health & Safety Committee. Current edition

approved by the North American Regional Standards Committee on August 27, 2001. Initially available at

www.semi.org September 2001; to be published November 2001. Originally published in 1990.

NOTICE: This document, as balloted, is intended to

replace SEMI F5-90 in its entirety.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this guide and are not intended to modify

or supersede the official guide. These have been

supplied by the Task Force to enhance usage of the

guide.

1 Purpose

1.1 The purpose of this guide is to provide the

semiconductor industry with the general knowledge and

background information for understanding the

principles of exhaust systems.

1.2 It includes suggestions for layout and selection as

well as application of appropriate methods and

equipment for abating emissions.

1.3 This guide is intended for use in abatement

selection for both gaseous and particulate contaminant

materials potentially emitted from semiconductor

manufacturing facilities.

2 Scope

2.1 Applicability — This guide presents a review and

evaluation of available information including:

• Chemical and physical properties of chemical

compounds and elements, that are, or may be,

released from semiconductor manufacturing

operations,

• Some current industry practices for separating

exhaust systems for different groups of materials,

• Potential methods for abating emissions of gaseous

and particulate contaminants exhausted from

semiconductor manufacturing operations at “End-

of-Pipe”,

• Potential methods for abating emissions of gaseous

and particulate contaminants exhausted from

semiconductor manufacturing processes at “Point-

of-Use” and reasons why they should be used for

some processes,

• Standard industry methods of recovery,

replacement, and “usage reduction” for minimizing

release of materials.

2.2 Contents — This document contains the following

sections:

1. Purpose

2. Scope

3. Limitations

4. Referenced Standards

5. Terminology

6. Philosophy

7. Classification of Emissions

8. End-of-Pipe Abatement Technologies

9. Point-of-Use (POU) Abatement Technologies

10. Provisions for Emergency Release

11. Summary Table

12. Alternative Approaches

13. Related Documents

Appendix 1 — End-of-Pipe Abatement Design

Appendix 2 — POU Abatement Technology Types

2.3 This guide does not purport to address all of the

safety issues associated with its use. It is the

responsibility of the users of this guide to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This guide makes only a few recommendations

regarding the fire protection aspects of exhaust systems.

Additional

recommendations on the risk assessment of

systems, compatibility of materials, and the potential

need for use of non-combustible materials or the fitting

of fire detectors, sprinklers etc., are within the scope of