semi合集-English.pdf - 第1271页

SEMI E5-1104 © SEMI 1982, 2004 213 Stream,Function Name (Mnemonic) Direction S15,F30 Recipe Verify Acknowledge M,H<-E Description This message is used to acknowledge the reque st to verify one or more recipes. If a si…

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SEMI E5-1104 © SEMI 1982, 2004 212
Stream,Function Name (Mnemonic) Direction
S15,F29 Recipe Verify Request M,H->E,reply
Description
This message is used to request verification of one or more recipes by a recipe executor. If multi-block, it shall be preceded by
the S15F1,F2 inquire/grant transaction. The operation identifier OPID, used where multiple verification requests may be
outstanding, may be zero if no further verifications will be requested before all current verification requests are completed by the
recipe executor. Otherwise, OPID is generated to be unique for the requestor. RESPEC is the object specifier for the recipe
executor.
Structure
L,4
1. <DATAID>
2. <OPID>
3. <RESPEC>
4. L,m
1. <RCPID
1
>
.
.
m. <RCPID
m
>
Exception
If RESPEC is a zero length item, the target is the recipient of the message.
SEMI E5-1104 © SEMI 1982, 2004 213
Stream,Function Name (Mnemonic) Direction
S15,F30 Recipe Verify Acknowledge M,H<-E
Description
This message is used to acknowledge the request to verify one or more recipes. If a single recipe verification was requested and
the recipe was successfully verified, the results are returned to the sender in this message, and RCPID contains the identifier of a
derived object form recipe if created during verification. If multiple recipe verifications were requested, then LINKID shall be
non-zero.
Structure
L,5
1. <OPID>
2. <LINKID>
3. <RCPID>
4. L,n (n = # attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
n. L,2
1. <RCPATTRID
n
>
2. <RCPATTRDATA
n
>
5. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
LINKID is zero if and only if a single recipe verification was requested and has been completed. If item 3 is zero length item, no
derived object form recipe was originated. n = 0 if and only if the recipe was not verified or failed verification. p = 0 if and only
if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F31 Recipe Upload Request S,H->E,reply
Description
This message is used to request an execution recipe from a recipe executor.
Structure
<RCPSPEC>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 214
Stream,Function Name (Mnemonic) Direction
S15,F32 Recipe Upload Data M,H<-E
Description
This message is used to send an execution recipe from a recipe executor.
Structure
L,4
1. <RCPSPEC>
2. L,m (m = # attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
3. <RCPBODY>
4. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.