semi合集-English.pdf - 第5983页

SEMI P42-0304 © SEMI 2004 16 <ShotPosition> <X>-30000</X> <Y>78750</Y> <UnitType>um</UnitType> < / S h o t P o s i t i o n > </ShotInform ation> <ShotInforma tion&…

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SEMI P42-0304 © SEMI 2004 15
</WaferInformation>
<ShotMapInformation>
<StepPitch>
<X>20000</X>
<Y>20000</Y>
<UnitType>um</UnitType>
</StepPitch>
<ShotMapArray>
<C>10</C>
<R>9</R>
</ShotMapArray>
<ShotMapOffset>
<X>0</X>
<Y>-1250</Y>
<UnitType>um</UnitType>
</ShotMapOffset>
</ShotMapInformation>
<ShotAreaInformation>
<ShotAreaID>AREA-A</ShotAreaID>
<ReticleID>RET-G</ReticleID>
<ShotAreaSize>
<X>20100</X>
<Y>20100</Y>
<UnitType>um</UnitType>
</ShotAreaSize>
<ShotAreaShift>
<X>0</X>
<Y>0</Y>
<UnitType>um</UnitType>
</ShotAreaShift>
<ShotAreaPositionShift>
<X>0</X>
<Y>0</Y>
<UnitType>um</UnitType>
</ShotAreaPositionShift>
</ShotAreaInformation>
<ShotInformation>
<ShotID>S1</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>3</C>
<R>1</R>
</ShotLocation>
<ShotPosition>
<X>-50000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S2</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>4</C>
<R>1</R>
</ShotLocation>
SEMI P42-0304 © SEMI 2004 16
<ShotPosition>
<X>-30000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S3</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>5</C>
<R>1</R>
</ShotLocation>
<ShotPosition>
<X>-10000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S4</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>6</C>
<R>1</R>
</ShotLocation>
<ShotPosition>
<X>10000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S5</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>7</C>
<R>1</R>
</ShotLocation>
<ShotPosition>
<X>30000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S6</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>8</C>
<R>1</R>
</ShotLocation>
<ShotPosition>
<X>50000</X>
<Y>78750</Y>
<UnitType>um</UnitType>
SEMI P42-0304 © SEMI 2004 17
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S7</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>2</C>
<R>2</R>
</ShotLocation>
<ShotPosition>
<X>-70000</X>
<Y>58750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S8</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>3</C>
<R>2</R>
</ShotLocation>
<ShotPosition>
<X>-50000</X>
<Y>58750</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
(To be repeated)
<ShotInformation>
<ShotID>S77</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>7</C>
<R>9</R>
</ShotLocation>
<ShotPosition>
<X>30000</X>
<Y>-81250</Y>
<UnitType>um</UnitType>
</ShotPosition>
</ShotInformation>
<ShotInformation>
<ShotID>S78</ShotID>
<ShotAreaID>AREA-A</ShotAreaID>
<ShotLocation>
<C>8</C>
<R>9</R>
</ShotLocation>
<ShotPosition>