semi合集-English.pdf - 第711页

SEMI E99-1104 E © SEMI 2000, 2004 1 SEMI E99-1104 E THE CARRIER ID READER/WRI TER FUNCTIONAL STANDARD: SPECIFICATION OF CONCEPTS, BEHAVIOR, AND SERVI CES This specification was technically approved by the Global Informat…

SEMI E92-0302

• Placement of a finger pinch sensor in the

approximately 11 mm space behind SEMI E15.1

D1 is recommended.

A1-8 NOTICE: Adjustment of BOLTS/Light Unit

A1-8.1 In order to maintain quick interchangeability

and interoperability and quick attachment/detachment,

adjustment capability should be provided separately by

the box opener/loader and equipment to ensure the port

is positioned correctly with respect to the wafer

handling robot.

A1-8.2 As a result, adjustment means will be necessary

on both the box opener/loader and the equipment. The

box opener/loader may have a capability to calibrate its

critical dimensions in advance, for example, the

parallelism between bottom interface surface and HDP.

In this case, it is not necessary to adjust the box

opener/loader after installation. The equipment should

have a capability to adjust bottom interface plane with

respect to the wafer-handling robot. In case of changing

the box opener/loader in the field, adjustment might

then not be necessary on both the box opener/loader

and the equipment side.

A1-8.3 A fixture may help facilitate this adjustment.

A1-8.4 If fine adjustment is needed after reattaching

the box opener/loader (due to deficient adjustment of

the box opener/loader or equipment side), it may be

done on the equipment side by means of adjusting

screws or other mechanism at bottom interface plane.

A1-9 NOTICE: Control Connection Area

A1-9.1 Connection should be completed after sliding

in the box opener/loader. Disconnection should be

completed before sliding out the box opener/loader.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standard set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of copy-

righted material or of an invention covered by patent

rights. By publication of this standard, SEMI takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E99-1104

THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD:

SPECIFICATION OF CONCEPTS, BEHAVIOR, AND SERVICES

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the Japanese Information and Control Committee. Current edition approved by the

North American Regional Standards Committee on January 10, 2003. Initially available at www.semi.org

January 2003; to be published March 2003. Originally published February 2000; previously published March

2003.

This standard was editorially modified in September 2004 to correct an error. Change was made to Section

R4.1.1.3.

NOTICE: The designation of SEMI E99 was updated during the 1104 publishing cycle to reflect changes to SEMI

E99.1.

1 Purpose

1.1 The purpose of the Carrier ID Reader/Writer

Functional Standard effort is to provide a common

specification for concepts, behavior, and services

(functions) provided by a Carrier ID Reader and a

Carrier ID Reader/Writer to an upstream controller. A

standard interface will increase interchangeability of

Carrier ID Reader/Writers so that users and equipment

suppliers have a wider range of choices.

2 Scope

2.1 The Carrier ID Reader/Writer Interface Standard

addresses the functional requirements for a generic

Carrier ID Reader/Writer interface with an upstream

controller.

2.2 The specification includes required behavior and

required communications for both a Carrier ID Reader

and a Carrier ID Reader/Writer.

2.3 This specification does not require, define, or

prohibit asynchronous messages sent by the Carrier ID

Reader or Reader/Writer.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This standard does not define the specific protocol

to be used for the Carrier ID Reader/Writer.

Supplements to this standard are required to describe

how the functions of the Carrier ID Reader/Writer are

implemented for specific protocols.

4 Referenced Standards

4.1 SEMI Standards

SEMI E1.9  Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E15  Specification for Tool Load Port

SEMI E30  Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39  Object Services Standard: Concepts,

Behavior, and Services

SEMI E47.1  Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E62  Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

SEMI E87 — Specification for Carrier Management

(CMS)

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CIDRW — represents both the Carrier ID Reader

and the Carrier ID Reader/Writer

5.1.2

FOUP — Front Opening Unified Pod

5.2 Definitions

5.2.1 attribute — information about or associated with

some entity or object.

5.2.2 carrier — 1. a container, such as a FOUP or open

cassette, with one or more positions for holding

substrates (SEMI E87). 2. any cassette, box, pod, or

boat that contains wafers.

5.2.3 carrier ID — an identifier for a carrier. A value

that uniquely identifies a given carrier in a factory. The

identifier may be represented physically with any one

of various technologies. For electronic tags with read/

SEMI E99-1104

write capability, in some cases the user may designate a

portion of the data to be used as a carrier ID.

5.2.4 carrier ID reader — a unit (subsystem) that

detects and decodes data from the ID tag.

5.2.5 carrier ID reader/writer — a unit (subsystem)

with the functionality of both a carrier ID reader and a

carrier ID writer.

5.2.6 carrier ID tag (tag, ID tag) — a physical device

for storing Carrier ID and other information. There are

two basic types of tags, read-only tags and read/write

tags.

5.2.7 carrier ID writer — a unit which encodes data

for and writes it to the carrier ID tag.

5.2.8 cassette — an open structure that holds one or

more substrates.

5.2.9 controller — a system that provides control

(performs required operations when certain conditions

occur or when interpreting and acting upon

instructions) and communicates with a higher level

manager. Controllers exist at all levels within a factory.

Examples of controllers include the Multiple ID

Reader/Writer Controller, the Equipment Controller,

and the Load Port Controller.

5.2.10 front-opening unified pod (FOUP) — a box

(that complies with SEMI E47.1) with a non-removable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (that mates with a

FIMS port that complies with SEMI E62).

5.2.11 fundamental requirements — the requirements

for information and behavior that must be satisfied for

compliance to a standard. Fundamental requirements

apply to specific areas of application, objects, or

services.

NOTE 1: All portions of the carrier ID reader/writer

specification are considered to be fundamental requirements

unless explicitly described as optional. See also optional

requirement.

5.2.12 load port — the interface location on a tool

where wafer carriers are delivered. It is possible that

wafers are not removed from, or inserted into, the

carrier at this location.

5.2.13 message interleaving — the practice of sending

a new message request before receiving the reply to an

earlier request.

5.2.14 multiple ID reader/writer controller — a unit

controlling the Reader/Writer function of one or

multiple ID Reader/Writer Heads, communicates the

command/data with the equipment controller or the

equivalent controller such as Load port Controller in the

equipment configuration.

5.2.15 optional capability — a specification that is not

required for an implementation to be compliant to a

standard. The supplier developing the CIDWR has the

option to provide these additional capabilities or not

depending on supplier’s product configuration. See also

fundamental requirement.

5.2.16 reader/writer head — a structured portion

which functions to detect the ID code and/or to write

the ID code. The ID reader/writer unifying a head

function inside its body can be placed as a head. The ID

reader/writer not unifying a head function will be

located separately from the head.

5.2.17 tag fault — any condition that causes errors

when reading or writing to the tag, including power

faults and tag damage.

5.2.18 upstream controller — a controller that directs

the Carrier ID Reader/Writer through the communi-

cation interface.

5.3 Data Types

5.3.1 enumerated — may take on one of a limited set

of possible values. These values may be given logical

names, but they may be represented by any single-item

data type.

5.3.2 form — type of data: positive integer, unsigned

integer, integer, floating point (float), enumerated,

boolean, text, formatted text, structure, list, ordered list.

5.3.3 integer — may take on the value of any negative

or unsigned integer. Messaging protocol may impose a

limit on the range of possible values.

5.3.4 structure — a specific set of items, of possibly

mixed data types, in a specified arrangement.

5.3.5 text — a character string. Messaging protocol may

impose restrictions, such as length or ASCII

representation.

5.3.6 unsigned integer — may take on the value of any

positive integer or zero. Messaging protocol may

impose a limit on the range of possible values.

6 Conventions

6.1 State Model Methodology

6.1.1 This document uses the Harel state chart

convention for describing dynamic operation of defined

objects. The outline of this convention is described in

an attachment of SEMI E30. The official definition of

this convention is described in “State Charts: A Visual

Formalism for Complex Systems” written by D. Harel

in Science of Computer Programming 8, 1987

1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945,

http://www.elsevier.nl/homepage/browse.htt