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SEMI E40-0705 © SEMI 1995, 2005 1 SEMI E40-0705 STANDARD FOR PROCES SING MANAGEMENT This standard was techni cally approved by the global Information & Control Committee. This edition was approved for publication by …

SEMI E39.1-0703 © SEMI 1995, 2003 3

Parameter Name SECS-II Data Item

Status L,n

1. L,2

1.<ERRCODE

2.<ERRTEXT

n. L,2

1. <ERRCODE

2. <ERRTEXT

TargetSpec TARGETSPEC

5.2 SECS-II Data Items Without Corresponding SEMI E94 Parameters

5.2.1 Table 3 contains the SECS-II data items that do not correspond to SEMI E39’s service parameters.

Table 3 Additional Data Item Requirements Table

Function SECS-II Data Item

Used to satisfy SECS-II conventions for linking a multi-block inquiry with a subsequent multi-

block message. Neither required nor specified by OSS.

DATAID

Used to inform receiver of total message length size for SECS-II multi-block conventions.

Neither required nor specified by SEMI E39.

DATALENGTH

Used to satisfy SECS-II multi-block requirements. Neither required nor specified by OSS. GRANT

6 Data Item Format Restrictions

ATTRID Format: 20

The ASCII version of ATTRID is restricted to the

characters from 20

through 7E

, excluding the

following characters: the “greater than” symbol “>”, the

colon “:”, the question mark “? ”, the asterisk “*”, and

the tilde “~ ”. The space character (20

) may not be

used as the first or last character. Maximum length is 40

characters.

OBJTYPE Format: 20

The ASCII version of OBJTYPE is restricted to the

characters from 20

through 7E

, excluding the

following characters: the “greater than” symbol “>”, the

colon “:”, the question mark “? ”, the asterisk “*”, and

the tilde “~ ”. The space character (20

) may not be

used as the first or last character. Maximum length is 40

characters.

OBJID Format: 20

The ASCII version of OBJID is restriced to the

characters from 20

through 7E

, excluding the

following characters: the “greater than” symbol “>”, the

colon “:”, the question mark “? ”, the asterisk “*”, and

the tilde “~ ”. The space character (20

) may not be

used as the first or last characer. The equipment shall

allow the OBJID to be any length from 1 to 80

characters, inclusive. A zero length OBJID implies that

no OBJID is specified.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E40-0705 © SEMI 1995, 2005 1

SEMI E40-0705

STANDARD FOR PROCESSING MANAGEMENT

This standard was technically approved by the global Information & Control Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available

at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published

June 2003.

1 Purpose

1.1 Automated management and command of material processing in equipment is a crucial aspect enabling factory

automation. This standard addresses the communications needs within the semiconductor manufacturing

environment with respect to the processing of material in equipment.

1.2 This standard specifies the application of the appropriate processing to specified material received at the

processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to

processing, and the messaging services which are needed to accomplish the task.

1.3 The communications services defined here enable standards-based interoperability of independent systems.

They allow application software to be developed that can assume the existence of these services and allow software

products to be developed which offer them.

1.4 Implementation of automated processing management will help eliminate misprocessing of material. The

adoption of the standards described will greatly reduce the effort required to integrate compliant equipment

components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard

services.

2 Scope

2.1 The scope of this standard is automated material processing based on discrete processing jobs. It provides the

functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of

other multi-resource equipment, as well as to host control of many types of equipment.

2.2 This standard supports individual management of jobs for identical processing of material within a group and

concurrent processing of independent groups. Where material contains other material (such as carriers containing

wafers), processing may be specified in terms of either material type.

2.3 A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A

method is defined for taking advantage of recipe variable parameters. This is not expected to satisfy all closed loop

control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex

data.

2.4 This standard does not provide services for receiving material for processing, or disposing of it after processing

is complete. Automation of material transfer is assumed to be provided through other services, such as those defined

in applicable SEMI standards.

2.5 This standard presents a solution from the concepts and behavior down to the messaging services. It does not

define the messaging protocol.

2.6 A messaging service includes the identification that a message shall be exchanged and a definition of the data

which is contained in that message. It does not include information on the structure of the message, how the data is

represented within the message, or how the message is exchanged. This additional information is contained within

the message protocol.

2.7 The defined services may be applied to multiple protocols. Information on the mapping of processing

management services to special protocols (e.g., SECS-II) are added as adjunct standards.

2.8 The services assume a communications environment in which a reliable connection has been established

between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection,

and handling communication failures are beyond the scope of this standard.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards and Documents

3.1 SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E53 — Event Reporting

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 The following definitions are arranged in alphabetical order. Some definitions use terms defined elsewhere

within this section. No references beyond this section should be necessary for a basic understanding of these terms.

4.2 Definitions

4.2.1 agent — an intelligent system within a factory that provides one or more service resources and uses the

services of other agents. A generalization of host, equipment, cell, cluster, cluster module, station controller, and

work station. Agents are associated with a physical system or a collection of physical systems, including computer

platforms.

4.2.2 form — type of data representing information contained in an object attribute or service message parameter.

4.2.3 fundamental requirements — the requirements for information and behavior that must be satisfied for

compliance to a standard. Fundamental requirements apply to specific areas of application, objects, or services.

4.2.4 post-conditioning — activities performed by the processing resource after departure of the material being

processed but related to the processing of that material (e.g., cleanup).

4.2.5 pre-conditioning — activities performed by the processing resource before arrival of the material being

processed but related to the processing of that material.

4.2.6 processing agent — an intelligent system within a factory which is independently capable of providing

manufacturing value added to material.

4.2.7 processing resource — an entity within a processing agent which provides the manufacturing value added to

material.

4.2.8 process job — a material processing job for a processing resource specifying and tracking the processing to be

applied to the material.

4.2.9 recipe — the pre-planned and reusable portion of the set of instructions, settings, and parameters under control

of a processing resource that determines the processing environment seen by the material. Recipes may be subject to

change between runs or processing cycles.

4.2.10 recipe executor — a component of a module that stores and executes recipes.

4.2.11 recipe namespace — a logical management domain with the responsibility for the storage and management

of recipes. It ensures the uniqueness of recipe identifiers and provides services pertaining to recipes stored within

that domain.

4.2.12 service — the set of messages and definition of the behavior of a service-provider that enables remote access

to a particular functionality.

4.2.13 service-provider — the software control entity that is the provider of a particular functionality which may be

accessible remotely.