semi合集-English.pdf - 第3860页
SEMI F22-1102 © SEMI 1997, 2002 10 7.5.16 Isolati on valve 7.5.17 Tu bing to tool Termination inside the tool gas jungle area with an isolation val v e as pa rt of the tool. 7.6 Tool Gas Jungle 7.6.1 Process gas segre g …
SEMI F22-1102 © SEMI 1997, 2002 9
7 Specialty Gas Distribution Systems
7.1 Process Gas Panel System (see Figure 4)
7.1.1 High Pressure
7.1.1.1 “Pigtail”/Cylinder connection assembly
7.1.1.2 Pressure transducer
7.1.1.3 Excess flow sensor
7.1.1.4 Nitrogen check valve
7.1.1.5 Nitrogen flow restrictor
7.1.1.6 Nitrogen purge valve
7.1.1.7 Vent valve
7.1.1.8 Process valve (regulator isolation)
7.1.1.9 Valve specifications
7.1.1.10 Tubing material specifications
7.1.2 Low Pressure
7.1.2.1 Pressure relief valve
7.1.2.2 Pressure transducer
7.1.2.3 Particle filter
7.1.2.4 Vent valve
7.1.2.5 Process valve
7.1.3 Pressure Regulator and Component
Specifications
7.1.4 Vacuum Generator System
7.1.4.1 Venturi
7.1.4.2 Venturi supply valve
7.1.4.3 Supply check valve
7.1.4.4 Vacuum/pressure gauge
7.2 Nitrogen Purge Panel System
7.2.1 High Pressure
7.2.1.1 “Pigtail”/Cylinder connection assembly
7.2.1.2 Pressure gauge
7.2.1.3 Vent valve
7.2.1.4 Process valve (regulator isolation)
7.2.1.5 Pressure regulator
7.2.1.6 Low Pressure
7.2.1.7 Pressure gauge
7.2.1.8 Particle filter
7.2.1.9 Process valve
7.3 Distribution Lines — Gas Delivery System
(Facilities)
7.3.1 Tubing specifications
7.3.2 Welding specifications
7.3.3 Valve specifications
7.3.4 System design specifications
7.3.5 Segregation specifications (cross contamination
prevention)
7.3.6 System Quality Assurance/Quality Control
standards
7.3.6.1 Static leak test and specification
7.3.6.2 He leak rate test and specification
7.3.6.3 Particle generation test and specification
7.3.6.4 Gaseous impurity test and specification
7.3.7 Hazardous gas detection requirements
7.4 Gas Box
7.4.1 Secondary pressure regulator
7.4.2 Secondary particle filtration
7.4.3 Isolation valves
7.4.4 Sampling point(s)
7.4.5 POU purification
7.5 Valve Manifold Box
7.5.1 Face seal connection
7.5.2 Isolation valve
7.5.3 Micro weld fitting
7.5.4 3/8 inch or 1/2 inch 316L SS tubing manifold
7.5.5 Micro weld fitting
7.5.6 1/4 inch 316L SS tubing stick line
7.5.7 Isolation valve
7.5.8 Pneumatic isolation valve
7.5.9 Face seal connection
7.5.10 Purge gas inlet micro weld fitting
7.5.11 Pressure regulator
7.5.12 Flow through pressure transducer or dead space
pressure transducer or pressure gauge
7.5.13 Excess flow device
7.5.14 Vent gas outlet micro tee weld fitting
7.5.15 Face seal connection
SEMI F22-1102 © SEMI 1997, 2002 10
7.5.16 Isolation valve
7.5.17 Tubing to tool
Termination inside the tool gas jungle area with an
isolation valve as part of the tool.
7.6 Tool Gas Jungle
7.6.1 Process gas segregation
7.6.2 Manual isolation valve
7.6.3 AOV
7.6.4 MFC
7.6.5 Final particle filtration
7.6.6 Hazardous gas detection
7.6.7 Control systems
7.6.8 Electronics
8 Related Documents
8.1 SEMI Documents
SEMI E12 — Standard for Standard Pressure,
Temperature, Density, and Flow Units Used in Mass
Flow Meters and Mass Flow Controllers
SEMI E16 — Guideline for Determining and
Describing Mass Flow Controller Leak Rates
SEMI E17 — Guideline for Mass Flow Controller
Transient Characteristics Tests
SEMI E18 — Guideline for Temperature Specifications
of the Mass Flow Controller
SEMI E27 — Standard for Mass Flow Controller and
Mass Flow Meter Linearity
SEMI E28 — Guideline for Pressure Specifications of
the Mass Flow Controller
SEMI E29 — Standard Terminology for the Calibration
of Mass Flow Controllers and Mass Flow Meters
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEMI F2 — Specification for 316L Stainless Steel
Tubing for General Purpose Semiconductor
Manufacturing Applications
SEMI F3 — Guide for Welding Stainless Steel Tubing
for Semiconductor Manufacturing Applications
SEMI F4 — Specification for Pneumatically Actuated
Cylinder Valves
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F6 — Guide for Secondary Containment of
Hazardous Gas Piping Systems
SEMI F13 — Guide for Gas Source Control Equipment
SEMI F14 — Guide for the Design of Gas Source
Equipment Enclosures
SEMI F15 — Test Method for Enclosures Using Sulfur
Hexafluoride Tracer Gas and Gas Chromatography
SEMI F16 — Specification for 316L Stainless Steel
Tubing Which is to be Finished and Electropolished for
High Purity Semiconductor Manufacturing
Applications
SEMI F17 — Specification for High Purity Quality
Electropolished 316L Stainless Steel Tubing,
Component Tube Stubs, and Fittings Made from
Tubing
SEMI F19 — Specification for the Finish of the Wetted
Surfaces of Electropolished 316L Stainless Steel
Components
SEMI F20 — Specification for 316L Stainless Steel
Bar, Extruded Shapes, Plate, and Investment Castings
for Components Used in the High Purity
Semiconductor Manufacturing Applications
SEMI S1 — Safety Guideline for Eqiupment Safety
Labels
SEMI S2 — Environmental, Health, and Safety
Guidelines for Semiconductor Manufacturing
Equipment
SEMI S4 — Safety Guideline for the
Segregation/Separation of Gas Cylinders Contained in
Cabinets
SEMI S5 — Safety Guideline for Flow Limiting
Devices
SEMI S6 — Safety Guideline for Ventilation
SEMI F22-1102 © SEMI 1997, 2002 11
Figure 2
Bulk Gas High Pressure Gaseous Supply System Flow Chart